Coatings that can be used on limited line of sight substrates are described. In some embodiments, the coating may be a metal alloy coating applied to an inner surface of an article such as a rod, tube or pipe. The inner surface can be present within a cavity of an article.

Shock absorbers that include a piston member configured to contact a functional fluid during movement of the piston member are described. The piston member can include a coating on a surface of the piston member. The coating can include a metal or metal alloy such as, for example, molybdenum or tungsten in combination with one or more other materials.

Rods and pipes that include a coated surface are described. The rod or pipe can include an alloy layer on a surface. The alloy layer can include molybdenum or tungsten and at least one element or at least one compound comprising one or more of nickel, cobalt, chromium, tin, phosphorous, iron, magnesium or boron.

Metal work rolls that contact a functional fluid during movement of a rotatable body are described. The rotatable body can include a coated surface with a surface coating. The surface coating can include a metal or metal alloy such as, for example, a molybdenum alloy or a nickel alloy or a tungsten alloy. Systems and processes using the coated work rolls are also described.

Rotational devices that include a substrate with a coated surface are described. The coated surface can include an alloy layer with molybdenum or tungsten and at least one element selected from the group consisting of nickel, cobalt, chromium, tin, phosphorous, iron, magnesium and boron. Systems including the rotational devices are also described.

Pneumatic articles that include a moveable component with a coated surface are described. The coated surface can include a surface coating including an alloy layer that includes molybdenum or tungsten in combination with one or more other materials. Pneumatic cylinders and pneumatic devices are also described.

Hydraulic devices that include a moveable component configured to contact a functional fluid during movement of the hydraulic device are described. The hydraulic device can include a coating on a surface. The coating can include a metal or metal alloy such as, for example, a molybdenum or tungsten in combination with one or more other materials.

Reciprocating devices that include a moveable component configured to contact a functional fluid during movement of the moveable component are described. The moveable component can include a coating on a surface of the moveable component that contacts the functional fluid. The coating can include a metal or metal alloy such as, for example, a molybdenum in combination with one or more other materials. Pneumatic and hydraulic devices and devices are also described.

To provide a silicon oxide film which exhibits high gas barrier performance even under a thin film condition.

A silicon oxide film characterized by satisfying the following requirements (1) and (2):

(1) the water vapor transmission rate (WVTR) at a film thickness of at most 500 nm is at most 9.0×10.sup.−3 g/m.sup.2.Math.day,
(2) the carbon concentration in the film, as measured by X-ray photoelectron spectroscopy (XPS), is at most 3.0 atom %.

A method for making a dense organosilicon film with improved mechanical properties, the method comprising the steps of: providing a substrate within a reaction chamber; introducing into the reaction chamber a gaseous composition comprising a novel mono- or dialkoxysilane; and applying energy to the gaseous composition comprising the novel mono- or dialkoxysilane in the reaction chamber to induce reaction of the gaseous composition comprising the novel mono- or dialkoxysilane to deposit an organosilicon film on the substrate, wherein the organosilicon film has a dielectric constant of from about 2.8 to about 3.3, an elastic modulus of from about 7 to about 30 GPa, and an at. % carbon of from about 10 to about 30 as measured by XPS.