The present disclosure provides a new wet atomic layer etch (ALE) process for etching copper. More specifically, the present disclosure provides various embodiments of methods that utilize new etch chemistries for etching copper in a wet ALE process. By utilizing the new etch chemistries disclosed herein within a wet ALE process, the present disclosure provides a highly selective etch of copper with monolayer precision.

Cleaning processing equipment may include generating a function characterizing a relationship between fouling formation in the processing equipment and operation of the processing equipment. A cleaning recipe may be selected based on properties of fouling material formed in the processing equipment during operation of the processing equipment. Operating costs associated with cleaning schedules may be determined based on the first function and the cleaning recipe and one of the cleaning schedules may be selected based on the respective determined operating costs. A cleaning process on the processing equipment may be executed according to the selected cleaning schedule using the selected cleaning recipe.

Systems and methods are provided for removing ferrous debris from a vehicle assembly in an alkaline degreaser bath. A degreaser tank is configured in shape and size to accommodate a degreasing cleaning of vehicle assemblies. A conveyor system may selectively transfer vehicle assemblies into and out of the degreaser tank. A flushing system includes a plurality of debris removal flushing stations strategically located at side walls of the degreaser tank. Each station includes a set of electromagnets adjacent to an exterior of the degreaser tank to attract metal debris to a collection area at an interior wall, opposite the set of electromagnets. A drain port is located at the side wall, below the electromagnets. A supply line is provided above the electromagnets to selectively provide degreaser toward and direct debris to the drain port. A controller engages each debris removal flushing station based on a predetermined cycle.

Systems and methods are provided for removing ferrous debris from a vehicle assembly in an alkaline degreaser bath. A degreaser tank is configured in shape and size to accommodate a degreasing cleaning of vehicle assemblies. A conveyor system may selectively transfer vehicle assemblies into and out of the degreaser tank. A flushing system includes a plurality of debris removal flushing stations strategically located at side walls of the degreaser tank. Each station includes a set of electromagnets adjacent to an exterior of the degreaser tank to attract metal debris to a collection area at an interior wall, opposite the set of electromagnets. A drain port is located at the side wall, below the electromagnets. A supply line is provided above the electromagnets to selectively provide degreaser toward and direct debris to the drain port. A controller engages each debris removal flushing station based on a predetermined cycle.

Provided is a composition for removing iron sulfide, containing, as an active ingredient, an ,-unsaturated aldehyde represented by the following general formula (1):

##STR00001##

wherein R.sup.1 to R.sup.3 each independently represent a hydrogen atom, an alkyl group having 1 to 10 carbon atoms, an alkenyl group having 2 to 10 carbon atoms, or an aryl group having 6 to 12 carbon atoms, provided that R.sup.1 may be connected to R.sup.2 or R.sup.3, to constitute an alkylene group having 2 to 6 carbon atoms; and that R.sup.1 and R.sup.2 are not a hydrogen atom at the same time.

Provided is a composition for removing iron sulfide, containing, as an active ingredient, an ,-unsaturated aldehyde represented by the following general formula (1):

##STR00001##

wherein R.sup.1 to R.sup.3 each independently represent a hydrogen atom, an alkyl group having 1 to 10 carbon atoms, an alkenyl group having 2 to 10 carbon atoms, or an aryl group having 6 to 12 carbon atoms, provided that R.sup.1 may be connected to R.sup.2 or R.sup.3, to constitute an alkylene group having 2 to 6 carbon atoms; and that R.sup.1 and R.sup.2 are not a hydrogen atom at the same time.

Systems and methods are provided for removing ferrous debris from a vehicle assembly in an alkaline degreaser bath. A degreaser tank is configured in shape and size to accommodate a degreasing cleaning of vehicle assemblies. A conveyor system may selectively transfer vehicle assemblies into and out of the degreaser tank. A flushing system includes a plurality of debris removal flushing stations strategically located at side walls of the degreaser tank. Each station includes a set of electromagnets adjacent to an exterior of the degreaser tank to attract metal debris to a collection area at an interior wall, opposite the set of electromagnets. A drain port is located at the side wall, below the electromagnets. A supply line is provided above the electromagnets to selectively provide degreaser toward and direct debris to the drain port. A controller engages each debris removal flushing station based on a predetermined cycle.

Systems and methods are provided for removing ferrous debris from a vehicle assembly in an alkaline degreaser bath. A degreaser tank is configured in shape and size to accommodate a degreasing cleaning of vehicle assemblies. A conveyor system may selectively transfer vehicle assemblies into and out of the degreaser tank. A flushing system includes a plurality of debris removal flushing stations strategically located at side walls of the degreaser tank. Each station includes a set of electromagnets adjacent to an exterior of the degreaser tank to attract metal debris to a collection area at an interior wall, opposite the set of electromagnets. A drain port is located at the side wall, below the electromagnets. A supply line is provided above the electromagnets to selectively provide degreaser toward and direct debris to the drain port. A controller engages each debris removal flushing station based on a predetermined cycle.

A novel minimum boiling binary azeotrope of n-undecane and n-butyl-3-hydroxybutyrate is shown to have utility as a solvent for degreasing of both nonpolar and polar contaminants. The components of the azeotrope are stable against degradation and the composition is largely invariant with pressure, yielding a unique solvent that can be used in cold cleaning and in vapor degreasing at elevated temperatures and over a wide range of pressures.

A novel minimum boiling binary azeotrope of n-undecane and n-butyl-3-hydroxybutyrate is shown to have utility as a solvent for degreasing of both nonpolar and polar contaminants. The components of the azeotrope are stable against degradation and the composition is largely invariant with pressure, yielding a unique solvent that can be used in cold cleaning and in vapor degreasing at elevated temperatures and over a wide range of pressures.