The disclosure relates to a device for improving a vacuum in the housing of a machine, in particular a centrifugal-mass energy store, comprising a rotor, for example a shaft having a centrifugal mass arranged thereon, which rotor is supported on at least one superconducting bearing in a contactless manner and is arranged in a vacuum container. In order to maintain the operating state of the superconducting bearing, the superconducting bearing is thermally connected to a cold source cooled by a cryogenic medium. According to the invention, the vacuum in the vacuum container is improved by means of an adsorber thermally connected to a cooling apparatus. The cooling of the adsorber occurs preferably by means of evaporated cooling medium from the superconducting bearing.

A sealing device employing a magnetic fluid for sealing off a vacuum side and an atmosphere side includes two rolling bearings disposed on both sides of the magnetic fluid seal. The magnetic fluid fills the lubrication part of the rolling bearing disposed toward the vacuum side and a magnet is attached to the outer ring toward the vacuum side of said rolling bearing. A ring-shaped yoke formed from a magnetic material and freely fitting into a rotation shaft is attached to the side of the magnet opposite the outer ring of the rolling bearing.

A vibration isolation system including a support, a forward actuator and a return device. The support is for supporting the body on a base. The support has a body engaging surface and a base engaging surface. The base engaging surface is arranged to couple to the base. The support couples the body engaging surface to the body in a coupled state. The support uncouples the body engaging surface from the body in an uncoupled state. The forward actuator moves the body and the body engaging surface together relatively to the base in a first direction from a first initial position to an end position in the coupled state. The return device is configured to move the body engaging surface relatively to the body opposite to the first direction from the end position to a second initial position in the uncoupled state.

The present invention relates to an apparatus for sliding friction free and lubricant free movement in vacuum, wherein the apparatus has a fixed position rail and a rail movable relative thereto by means of magnetic force. The invention further relates to a vacuum chamber, for example for a coating plant having an apparatus in accordance with the invention.

A control apparatus includes a constant storage portion that stores constant values of an electromagnet coil including a resistance value Rm, an inductance Lm, a sampling time Ts, etc. A current storage portion stores previous current command values Ir having been regularly sampled by a microcomputer inside a current control circuit. A low-frequency feedback circuit generates a signal for suppressing an error between DC components and low-frequency components of an input current command value Ir and a detected current value IL and outputs the signal. An output voltage computing circuit calculates, based on the input current command value Ir[n+1], a stored value Ir[n] of the current storage portion, a stored value of a constant storage portion, and the signal of the low-frequency feedback circuit, a voltage for suppling the electromagnet coil with a current in accordance with a command, and outputs the calculated voltage.

The present invention relates to a joint for a device moveable in vacuum, the joint comprising a supporting part, a mobile part and a guiding and connecting part, wherein the mobile part and the supporting part each have at least a region of convex shape, with the regions of convex shape of the mobile part and of the supporting part facing one another and with the guiding and connecting part being arranged, in particular clamped, between the regions of convex shape of the supporting part and of the mobile part, wherein the guiding and connecting part has a greater bending elasticity than either of the supporting part and the mobile part. The invention further relates to a mechanism for moving a device in vacuum, the mechanism comprising a plurality of joints and to a device comprising a plurality of joints and/or a mechanism, with the device being configured to be moved in a vacuum.

The present invention relates to an apparatus for sliding friction free and lubricant free movement in vacuum, wherein the apparatus has a fixed position rail and a rail movable relative thereto by means of magnetic force. The invention further relates to a vacuum chamber, for example for a coating plant having an apparatus in accordance with the invention.

A vibration isolation system including a support, a forward actuator and a return device. The support is for supporting the body on a base. The support has a body engaging surface and a base engaging surface. The base engaging surface is arranged to couple to the base. The support couples the body engaging surface to the body in a coupled state. The support uncouples the body engaging surface from the body in an uncoupled state. The forward actuator moves the body and the body engaging surface together relatively to the base in a first direction from a first initial position to an end position in the coupled state. The return device is configured to move the body engaging surface relatively to the body opposite to the first direction from the end position to a second initial position in the uncoupled state.

A rolling bearing of the present invention includes an inner ring, an outer ring and a rolling element which are all made of a steel material, and (A) a surface of the rolling element is formed with an Ag coating film, and a raceway of at least one of the inner ring and the outer ring is formed with a Cr coating film or (B) a surface of the rolling element is formed with a Cr coating film, and a raceway of at least one of the inner ring and the outer ring is formed with a Cr coating film.

A method and a lubrication system for lubricating a transmission system component. The lubrication system may include a lubrication system reservoir for storing a lubrication liquid; and a distribution system. The distribution system may be configured to refill, with the lubrication liquid, a transmission system reservoir that is configured to lubricate the transmission system component. The refill occurs while the transmission system component and the lubrication system are positioned within a vacuum chamber.