A microfabricated valve with no moving parts. In one embodiment, the valve includes a reservoir of a liquid that is in fluid communication with an outlet channel having a throat that is less than 100 microns wide. Preferably, the channel is an elongated slit. The configuration of channel is adapted and configured such that surface tension of the liquid prevents flow out of the channel. A heater increases the temperature of the meniscus of the fluid, until a portion of the fluid is ejected from the channel. The ejection of the fluid creates both a thrusting effect and a cooling effect.

A microfabricated valve with no moving parts. In one embodiment, the valve includes a reservoir of a liquid that is in fluid communication with an outlet channel having a throat that is less than 100 microns wide. Preferably, the channel is an elongated slit. The configuration of channel is adapted and configured such that surface tension of the liquid prevents flow out of the channel. A heater increases the temperature of the meniscus of the fluid, until a portion of the fluid is ejected from the channel. The ejection of the fluid creates both a thrusting effect and a cooling effect.

Methods and systems are provided for a microfluidic cartridge including a high performance actuator useful for analyte detection, labeling and analysis. Microfluidic processing systems are to carry out chemical or biochemical reactions, or sequences of reactions, with small volumes (typically between 1 microliter and 10 milliliters) of reactants and products. A microfluidic processing system can comprise a network of tubes interfaced with discrete components such as valves and sensors, or an integrated device made of plastic, glass, metal, or other materials, or a combination of materials, with components such as valves and sensors built into the device and connected by flow passageways formed in the material.

A two-stage fluid control valve includes a first stage electronically switchable, bi-stable two-port valve movable between an open position and a leak-free closed position, and a second stage microvalve configured to control the flow of fluid through a fluid outlet of the two-stage fluid control valve when the first stage electronically switchable, bi-stable two-port valve is in the open position. The electronically switchable, bi-stable two-port valve is disposed between the second stage microvalve and a fluid inlet of the two-stage fluid control valve.

A two-stage fluid control valve includes a first stage electronically switchable, bi-stable two-port valve movable between an open position and a leak-free closed position, and a second stage microvalve configured to control the flow of fluid through a fluid outlet of the two-stage fluid control valve when the first stage electronically switchable, bi-stable two-port valve is in the open position. The electronically switchable, bi-stable two-port valve is disposed between the second stage microvalve and a fluid inlet of the two-stage fluid control valve.

Pump systems having electrically conductive membranes are described. In embodiments of the invention, the electrically conductive membranes can be utilized as speakers to produce ultrasonic and audible sounds. The electrically conductive membranes are made from materials such as graphene, graphene oxide, and polymer films having a thin conductive coating.

A microfluidic device includes a three-dimensional slat structure having a plurality of interstices configured to generate a high power, high flow rate of fluids by electroosmotic flow. The microfluidic device includes a housing for holding and moving fluids through the slat structure, and a plurality of electrodes that generate an electric field within the plurality of interstices.

A microfluidic device includes a three-dimensional slat structure having a plurality of interstices configured to generate a high power, high flow rate of fluids by electroosmotic flow. The microfluidic device includes a housing for holding and moving fluids through the slat structure, and a plurality of electrodes that generate an electric field within the plurality of interstices.

A microfabricated valve with no moving parts. In one embodiment, the valve includes a reservoir of a liquid that is in fluid communication with an outlet channel having a throat that is less than 100 microns wide. Preferably, the channel is an elongated slit. The configuration of channel is adapted and configured such that surface tension of the liquid prevents flow out of the channel. A heater increases the temperature of the meniscus of the fluid, until a portion of the fluid is ejected from the channel. The ejection of the fluid creates both a thrusting effect and a cooling effect.