A fitting for an upper brush in a double brush scrubbing chamber of a wafer cleaning system is disclosed. The fitting includes a base plate, a flanged pipe, and a threaded connector. The base plate includes a threaded hole with a stop surface therein and a channel extending from the stop surface through a lower surface of the base plate. The flanged pipe is inserted into the base plate such that the flange at the top end of a hollow tube rests on the stop surface and the hollow tube passes through the channel of the base plate. The threaded connector has a passage therethrough, and engages the threaded hole of the base plate to fix the flanged pipe in place. This structure is able to provide fluid while minimizing particle generation.

A fitting for an upper brush in a double brush scrubbing chamber of a wafer cleaning system is disclosed. The fitting includes a base plate, a flanged pipe, and a threaded connector. The base plate includes a threaded hole with a stop surface therein and a channel extending from the stop surface through a lower surface of the base plate. The flanged pipe is inserted into the base plate such that the flange at the top end of a hollow tube rests on the stop surface and the hollow tube passes through the channel of the base plate. The threaded connector has a passage therethrough, and engages the threaded hole of the base plate to fix the flanged pipe in place. This structure is able to provide fluid while minimizing particle generation.

A pipe connection swivel joint assembly includes a pipe member having an end flange with a conical proximal surface. A split ring assembly includes a pair of swivel ring halves each having a conical inner surface disposed against the conical proximal surface of the pipe member. The pair of swivel ring halves further include a plurality of mounting holes extending axially through the pair of swivel ring halves and a plurality of ring fastening holes. An outer ring is connected to the pair of swivel ring halves by a plurality of split ring fasteners engaged with the plurality of ring fastening holes. The outer ring supports a pair of distance plates that are disposed between opposing ends of the pair of swivel ring halves.

A pipe connection swivel joint assembly includes a pipe member having an end flange with a conical proximal surface. A split ring assembly includes a pair of swivel ring halves each having a conical inner surface disposed against the conical proximal surface of the pipe member. The pair of swivel ring halves further include a plurality of mounting holes extending axially through the pair of swivel ring halves and a plurality of ring fastening holes. An outer ring is connected to the pair of swivel ring halves by a plurality of split ring fasteners engaged with the plurality of ring fastening holes. The outer ring supports a pair of distance plates that are disposed between opposing ends of the pair of swivel ring halves.

A method of manufacturing a joint flange using a thickness-increased, machined pipe is provided. The method includes a pipe cutting operation in which a pipe is cut to a predetermined length, a flange forming operation in which a flange having a mounting hole for installing the pipe is formed by die casting, a bump-forming operation in which a thickness-increased part, which is formed by increasing a thickness of one end of the pipe, is bumped to form a first bead locked to the flange, a machining operation in which a circumference of the thickness-increased part is machined to form a sealing groove having an O-ring installed, and a fixing operation in which the pipe is inserted in the mounting hole of the flange and the other end of the pipe is pressed to form a second bead so that the pipe is pressed to a lower end of the flange.

A method of manufacturing a joint flange using a thickness-increased, machined pipe is provided. The method includes a pipe cutting operation in which a pipe is cut to a predetermined length, a flange forming operation in which a flange having a mounting hole for installing the pipe is formed by die casting, a bump-forming operation in which a thickness-increased part, which is formed by increasing a thickness of one end of the pipe, is bumped to form a first bead locked to the flange, a machining operation in which a circumference of the thickness-increased part is machined to form a sealing groove having an O-ring installed, and a fixing operation in which the pipe is inserted in the mounting hole of the flange and the other end of the pipe is pressed to form a second bead so that the pipe is pressed to a lower end of the flange.

A method for manufacturing a pipe conduit arrangement including sticking a pipe stub onto a pipe conduit at least up to the flush state of the of the flange section end-face and the nips conduit end-face, fixing the pipe conduit in the pipe stub in a press fit which is produced by the radial widening of the pipe conduit, and axially clamping the arisen pipe conduit units by way of clamping the flange sections of the pine stubs into the nine conduit arrangement. Also described is a pipe conduit arrangement.

A method for manufacturing a pipe conduit arrangement including sticking a pipe stub onto a pipe conduit at least up to the flush state of the of the flange section end-face and the nips conduit end-face, fixing the pipe conduit in the pipe stub in a press fit which is produced by the radial widening of the pipe conduit, and axially clamping the arisen pipe conduit units by way of clamping the flange sections of the pine stubs into the nine conduit arrangement. Also described is a pipe conduit arrangement.

A composite tapered tubular assembly includes a composite tapered tube extending between a first end and a second end and tapered so as to have a smaller radius R1 at the first end than a radius R2 at the second end. The assembly also includes a first internal annular wedge that is in contact with an inner surface of the tube at said first end and a first external annular wedge in contact with the outer surface of the tube at said first end. The assembly further includes a first nut provided at said first end that is configured to be connected to said first internal wedge and a second external annular wedge provided on an outer surface of the tube and a second internal annular wedge in contact with the inner surface of said composite tube at said second end, and a second nut connected to an internal surface.

A composite pipe termination is provided. The composite pipe includes a composite pipe wall thickness and a cut end. An annular part of composite material is attached around the outside of the composite pipe at the cut end. The annular part has a radial thickness which tapers towards the composite pipe in the direction along the composite pipe away from the cut end to provide an exterior surface having a tapered portion. A pinning structure includes one or more pins which extend through the annular part and partially through the composite pipe wall thickness to further attach the annular part to the composite pipe.