A fluid pipe device is provided, which includes a pipe member forming a flow channel for flowing a fluid; a heating member for generating heat to heat the pipe member; a metal heat transfer member abutting against the heating member and conducting the heat to the pipe member; and a terminal member electrically connecting the heating member and the heat transfer member. The heat transfer member includes a first heat transfer member and a second heat transfer member, and at least one of the first heat transfer member and the second heat transfer member forms the terminal member at one portion, and the first heat transfer member is provided in the pipe member in such a way as not to be exposed inside the flow channel of the pipe member.

Apparatuses for controlling gas flow are important components for delivering process gases for semiconductor fabrication. These apparatuses for controlling gas flow frequently rely on flow restrictors which can provide a known flow impedance of the process gas. In one embodiment, a flow restrictor is disclosed, the flow restrictor constructed of a plurality of layers, one or more of the layers having a flow passage therein that extends from a first aperture at a first end of the flow restrictor to a second aperture at a second end of the flow restrictor.

Apparatuses for controlling gas flow are important components for delivering process gases for semiconductor fabrication. These apparatuses for controlling gas flow frequently rely on flow restrictors which can provide a known flow impedance of the process gas. In one embodiment, a flow restrictor is disclosed, the flow restrictor constructed of a plurality of layers, one or more of the layers having a flow passage therein that extends from a first aperture at a first end of the flow restrictor to a second aperture at a second end of the flow restrictor.

A fluid pipe device is provided, which includes a pipe member forming a flow channel for flowing a fluid; a heating member for generating heat to heat the pipe member; a metal heat transfer member abutting against the heating member and conducting the heat to the pipe member; and a terminal member electrically connecting the heating member and the heat transfer member. The heat transfer member includes a first heat transfer member and a second heat transfer member, and at least one of the first heat transfer member and the second heat transfer member forms the terminal member at one portion, and the first heat transfer member is provided in the pipe member in such a way as not to be exposed inside the flow channel of the pipe member.

This dampening device comprises a body defining a chamber and presenting at least one orifice intended for the inlet and the outlet of the fluid in the chamber. The dampening device further comprises i) a dampening member located in the chamber and comprising at least one foam with closed cells, and ii) a holding member configured to hold the dampening member in place. The dampening device being characterized in that at least one foam has a porosity comprised between 50% and 98%.

Apparatus, systems and methods for implementing flow cages and flow cage assemblies in association with high pressure fluid flows and fluid valves are provided. Flow cages and flow assemblies are provided to dissipate the energy of a fluid flow, such as by reducing fluid flow pressure and/or fluid flow velocity. In some embodiments the dissipation of the fluid flow energy is adapted to reduce erosion, such as from high-pressure jet flows, to reduce cavitation, such as by controllably increasing the flow area, and/or to reduce valve noise associated with pressure surge.

A pulsation damper configured to reduce pressure variations in a pipe system. The pulsation damper comprises a first pipe section and a second pipe section. The first pipe section is at least partly placed inside the second pipe section such that a product flow can flow through the first pipe section and then through a space formed between the first pipe section and the second pipe section. Due to the increased cross sectional area of the second pipe section pressure variations can be damped efficiently.