A heat treatment apparatus including: a cylindrical processing container; a heater configured to heat the processing container; and a cooler configured to cool the processing container, wherein the cooler includes: discharge holes provided at intervals in a longitudinal direction of the processing container, the discharge holes being configured to discharge a cooling medium toward the processing container; a branch configured to divide the cooling medium into a plurality of flowing paths that communicate with the discharge holes; and blowers provided for respective ones of the flowing paths, the blowers being configured to send the cooling medium to the discharge holes that communicate with the respective ones of the flowing paths.

A combustor air bar grid for use within a fluidized bed reactor includes at least two main air collector bars in fluid communication with a source of fluidizing gas, a plurality of primary air bars that are transversal to the main air collector bars and arranged on the at least two main air collector bars such that the main air collector bars support them, and in fluid communication to at least two of the main air collector bars. The main air collector bars and the primary air bars define ash removal openings in the air bar grid and a plurality of fluidized nozzles are arranged to each of the primary air bars for fluidizing the bed reactor. A fluidized bed reactor includes such a combustor air bar grid.

Provided is a high pressure heat treatment apparatus including: an internal chamber accommodating an object to be heat-treated; an external chamber including a housing and a partition plate partitioning the housing into a high-temperature zone accommodating the internal chamber and a low-temperature zone having a lower temperature than the high-temperature zone, the partition plate including a discharge hole for allowing the high-temperature zone and the low-temperature zone to communicate with each other; a gas supply module configured to supply a process gas for the heat treatment to the internal chamber at a first pressure higher than that of the atmosphere, and supply a protective gas to the high-temperature zone and the low-temperature zone at a second pressure set in relation to the first pressure; and a discharge module configured to open the discharge hole to discharge the protective gas in the high-temperature zone to the low-temperature zone.

Proposed are a chilling unit, a heat treatment apparatus including same, and a heat treatment method. More particularly, proposed is a technology capable of rapidly and effectively lowering the temperature of a heating plate by bringing a heat exchange medium of a chilling unit into contact with the heating plate and then circulating a refrigerant after performing a heat treatment process of a substrate through a heat treatment apparatus.

A cooling plate for a metallurgical furnace comprising a body (12) with a front face (18) and an opposite rear face (20), the body having at least one coolant channel (14) therein; the front face (18) being turned towards the furnace interior and preferably comprises alternating ribs (22) and grooves (24). The cooling plate includes wear detection means comprising: a plurality of closed pressure chambers (26, 28) distributed at different locations in said body, said pressure chambers being positioned at predetermined depths below the front face (18) of said body; and a pressure sensor (30) associated with each pressure chamber (26, 28) in order to detect a deviation from a reference pressure inside said pressure chamber when the latter becomes open due to wear out of said body.

A sintering apparatus is provided. The sintering apparatus includes a case having an internal space formed therein and including a door provided in a front portion thereof to open and close the internal space, a magnetron coupled to the case and oscillating microwaves toward the internal space, a heat insulating unit disposed in the internal space to form a chamber space and blocking transmission of heat of the chamber space to the internal space, a susceptor unit disposed in the chamber space and having a sintering space in which a to-be-sintered material is accommodated, and a cooling unit cooling at least one of the case or the chamber space.

A combustor air bar grid for use within a fluidized bed reactor includes at least two main air collector bars in fluid communication with a source of fluidizing gas, a plurality of primary air bars that are transversal to the main air collector bars and arranged on the at least two main air collector bars such that the main air collector bars support them, and in fluid communication to at least two of the main air collector bars. The main air collector bars and the primary air bars define ash removal openings in the air bar grid and a plurality of fluidized nozzles are arranged to each of the primary air bars for fluidizing the bed reactor. A fluidized bed reactor includes such a combustor air bar grid.

A graphitization furnace with a rapid active cooling system is disclosed, including a furnace body and an active cooling system. The active cooling system is provided with at least one medium loop unit and a control unit for controlling a flow velocity of a medium in the medium loop unit, each medium loop unit includes a plurality of heat removal pipes pre-embedded in a furnace cavity of the furnace body, and each heat removal pipe is provided with a medium flow channel communicated with the medium loop unit. The graphitization furnace with a rapid active cooling system can realize rapid active cooling, short turnover time and high energy utilization efficiency of the graphitization furnace, and has wide applicability, which is not only suitable for construction of a new graphitization furnace, but also suitable for transformation of the existing Acheson graphitization furnace.

A hood-type annealing furnace has a base, which has a site on which a batch of a annealing material can be arranged. The annealing material arranged on the site can be covered by a protective hood, which forms an annealing space enclosed by the protective hood and the site. The protective hood can be covered by a heating hood, thereby forming an intermediate space arranged between the heating hood and the protective hood and bounded at the bottom by the base. A cooling gas system is communicably connected or connectable to the intermediate space. The cooling gas system is communicably connected or connectable to the intermediate space, to a cooling gas outlet formed on the base and communicably connected to the intermediate space, and at least one cooling gas inlet formed on the base and communicably connected to the intermediate space.

There is provided a cooling unit, comprising: an intake pipe provided for each of a plurality of zones and configured to supply a gas for cooling a reaction tube; a control valve provided in the intake pipe and configured to adjust a flow rate of the gas; a buffer part configured to temporarily store the gas supplied from the intake pipe; and openings provided so as to blow the gas stored in the buffer part toward the reaction tube, wherein the flow rate of the gas introduced into the intake pipe is set according to vertical length ratios of the zones such that the flow rate and a flow velocity of the gas injected from the openings toward the reaction tube are adjusted by opening and closing the control valve.