Disclosed in the present application is a cooling system for a reflow furnace, the reflow furnace comprising a heating zone, and the cooling system being used to regulate a temperature of the heating zone, the cooling system comprising: at least one gas inlet and at least one gas discharge port, the at least one gas inlet and the at least one gas discharge port being disposed on the heating zone; a blowing apparatus; at least one gas intake pipeline, an inlet of the at least one gas intake pipeline being connected to the blowing apparatus, an outlet of the at least one gas intake pipeline being connected to the at least one gas inlet, the at least one gas intake pipeline being able to controllably establish fluid communication between the blowing apparatus and the at least one gas inlet; and at least one gas discharge pipeline, an inlet of the at least one gas discharge pipeline being connected to the at least one gas discharge port, an outlet of the at least one gas discharge pipeline being connected to the outside, and the at least one gas discharge pipeline being able to controllably establish fluid communication between the at least one gas discharge port and the outside. The cooling system of the present application can shorten the time taken for the reflow furnace to change from a higher heating temperature to a lower heating temperature.

The invention relates to a cooling device (100) for cooling at least one element (150, 151) passing through said device, comprising a metal block (115), having a first side and a second side, and comprising a cooling channel (130) for cyrogenic gas. The at least one element (150, 151) can be guided along the sides of the first side of the metal block (115), the cooling channel (130) is at least partially in heat conductive connection with the second side of the metal block (115), and the cooling channel (130) has an attachment (131) on a first end for the entry of cryogenic gas and an attachment on a second end for the exit of cryogenic gas. The invention also comprises a hardening device having such a cooling device (100) and a method for cooling at least one element (150, 151) passing through said device.

Disclosed in the present application is a cooling system for a reflow furnace, the reflow furnace comprising a heating zone, and the cooling system being used to regulate a temperature of the heating zone, the cooling system comprising: at least one gas inlet and at least one gas discharge port, the at least one gas inlet and the at least one gas discharge port being disposed on the heating zone; a blowing apparatus; at least one gas intake pipeline, an inlet of the at least one gas intake pipeline being connected to the blowing apparatus, an outlet of the at least one gas intake pipeline being connected to the at least one gas inlet, the at least one gas intake pipeline being able to controllably establish fluid communication between the blowing apparatus and the at least one gas inlet; and at least one gas discharge pipeline, an inlet of the at least one gas discharge pipeline being connected to the at least one gas discharge port, an outlet of the at least one gas discharge pipeline being connected to the outside, and the at least one gas discharge pipeline being able to controllably establish fluid communication between the at least one gas discharge port and the outside. The cooling system of the present application can shorten the time taken for the reflow furnace to change from a higher heating temperature to a lower heating temperature.

A hood-type annealing furnace has a base, which has a site on which a batch of a annealing material can be arranged. The annealing material arranged on the site can be covered by a protective hood, which forms an annealing space enclosed by the protective hood and the site. The protective hood can be covered by a heating hood, thereby forming an intermediate space arranged between the heating hood and the protective hood and bounded at the bottom by the base. A cooling gas system is communicably connected or connectable to the intermediate space. The cooling gas system is communicably connected or connectable to the intermediate space, to a cooling gas outlet formed on the base and communicably connected to the intermediate space, and at least one cooling gas inlet formed on the base and communicably connected to the intermediate space.

The substrate processing apparatus of the present invention comprises a hot plate for heating a substrate; and a cooling unit for cooling the hot plate; wherein the cooling unit includes a support plate having a space formed between the support plate and the hot plate, and a plurality of nozzles installed on the support plate and for supplying cooling gas to a bottom surface of the hot plate, wherein an outdoor air inlet passage provided in a through structure is provide in the support plate, wherein a portion of the outdoor air inlet passage forms a first region, through which a cable passes, and the remaining portion forms a second region, through which the cable does not pass and outdoor air introduces.

A rotary tube apparatus for cooling or heating flowable granular bulk materials, in particular a sectional cooler (8) for cooling a flowable granular solid material, with structures mounted on its walls for increasing the thermal conduction, characterized in that the structures include hollow tubes (10).

A method for manufacturing a ceramic product containing silicon carbide, including a step of firing a formed body of a green body containing silicon carbide by transporting the formed body from an inlet to an outlet of a continuous furnace, wherein the continuous furnace includes the inlet, a heating zone, a cooling zone, and the outlet in this order, and a furnace atmosphere in both the heating zone and the cooling zone is an inert gas having an oxygen concentration of 100 ppm by volume or less.

The invention relates to a cooling device (100) for cooling at least one element (150, 151) passing through said device, comprising a metal block (115), having a first side and a second side, and comprising a cooling channel (130) for cyrogenic gas. The at least one element (150, 151) can be guided along the sides of the first side of the metal block (115), the cooling channel (130) is at least partially in heat conductive connection with the second side of the metal block (115), and the cooling channel (130) has an attachment (131) on a first end for the entry of cryogenic gas and an attachment on a second end for the exit of cryogenic gas. The invention also comprises a hardening device having such a cooling device (100) and a method for cooling at least one element (150, 151) passing through said device.

A rotary tube apparatus for cooling or heating flowable granular bulk materials, in particular a sectional cooler (8) for cooling a flowable granular solid material, with structures mounted on its walls for increasing the thermal conduction, characterized in that the structures include hollow tubes (10).

A cooling system includes a sensor and a cooling conveyor. The sensor measures a dust characteristic of dust discharged from a dust cyclone of a decoating system. The cooling conveyor receives the dust from the dust cyclone and cools the dust at a cooling rate, and the cooling rate may be controlled based on the measured dust characteristic. A method of cooling dust from a dust cyclone of a decoating system with a cooling system includes measuring a dust characteristic of the dust discharged from the dust cyclone and into a cooling conveyor of the cooling system. The method also includes advancing the dust along the cooling conveyor and cooling the dust at a cooling rate based on the measured dust characteristic.