An inner fin is a wave fin having board portions extending in a pipe longitudinal direction and a top portion connecting the board portions located adjacent with each other. The wave fin has a wave-shaped cross-section perpendicularly intersecting a pipe longitudinal direction, and the board portion is bent into a waveform extending in the pipe longitudinal direction when seen from a pipe layering direction. A wave pitch WP [mm], a wave depth WD [mm], and a passage width H [mm] are set to satisfy relationships of 2.2≤WP/WD≤4.28 and 0.5≤WD/H≤1.8.

A method for at least partially removing a contamination layer (24) from an optical surface (14a) of an optical element (14) that reflects EUV radiation includes: performing an atomic layer etching process for at least partially removing the contamination layer (24) from the optical surface (14a), which, in turn, includes: exposing the contamination layer (24) to a surface-modifying reactant (44) in a surface modification step, and exposing the contamination layer (24) to a material-detaching reactant (45) in a material detachment step. The optical element (14) is typically taken, before the atomic layer etching process is performed, from an optical arrangement, in particular from an EUV lithography system, in which the optical surface (14a) of the optical element (14) is exposed to EUV radiation (6), during which the contamination layer (24) is formed.

A liner tube for an inlet channel of a plate heat exchanger may include an open front side for supplying a refrigerant mass flow, an at least partially closed rear side, and at least two bag-like chambers running in a longitudinal direction of the liner tube. Each chamber may communicate with the open front side, and may have openings at chamber-dependent different positions for distributing the refrigerant mass flow in plate stacks of the plate heat exchanger.

A method for at least partially removing a contamination layer (24) from an optical surface (14a) of an optical element (14) that reflects EUV radiation includes: performing an atomic layer etching process for at least partially removing the contamination layer (24) from the optical surface (14a), which, in turn, includes: exposing the contamination layer (24) to a surface-modifying reactant (44) in a surface modification step, and exposing the contamination layer (24) to a material-detaching reactant (45) in a material detachment step. The optical element (14) is typically taken, before the atomic layer etching process is performed, from an optical arrangement, in particular from an EUV lithography system, in which the optical surface (14a) of the optical element (14) is exposed to EUV radiation (6), during which the contamination layer (24) is formed.

An electricity storage device is provided with a heat transfer sheet which is arranged between an electricity storage body and a water jacket and which is capable of being elastically deformed. The water jacket has formed therein a fluid distribution section in communication with a cooling fluid inlet of the water jacket, a fluid recovery section in communication with a cooling fluid outlet of the water jacket, and a heat exchange section which connects the fluid distribution section and the fluid recovery section via a fluid passageway partitioned by fins rising in the thickness direction of the water jacket. The heat transfer sheet is arranged in an area which corresponds to the heat exchange section on the surface of a body section and which does not overlap the fluid distribution section and the fluid recovery section.

Embodiments of the present disclosure are directed to a cold plate assembly for an electrical cabinet, including: a main body part, a sealing part, and a mounting part. The main body part is provided with a channel for the circulation of a liquid cooling medium and an accommodation groove located on a first upper surface of the main body part. The sealing part is disposed in the accommodation groove and the mounting part is located above the sealing part. A lower surface of the mounting part faces the main body part, and a second upper surface of the mounting part is configured to mount an electronic device to be cooled.

An indirect evaporative cooling air-conditioning device, for blowing cooled air into a room, includes an air intake, for collecting air to be cooled; a plurality of plates forming a stack; and a ventilation system. Each plate has a dry face opposite a wet face, which is to be kept wet with water. Each plate is intended to be cooled by water evaporation from the wet face. Two adjacent plates are spaced from each other, along a transverse axis, to form a channel, either dry or wet. A dry channel is delimited by two dry faces of the adjacent plates. A wet channel is delimited by two wet faces of the adjacent plates. Each wet channel includes several wet outlets distributed along a lateral axis, and/or each dry channel includes several air inlets distributed along the lateral axis, which is perpendicular to a longitudinal axis and to the transverse axis.

A heat exchanger assembly is provided. The heat exchanger assembly may comprise a hot layer disposed between at least two cold layers. The hot layer may comprise a hot layer fin disposed within a hot layer closure bar. The hot layer closure bar may comprise a parting sheet support coupled to a frame. The parting sheet support may be configured to support a parting sheet while also allowing a fluid flow through the hot layer. The parting sheet support may comprise fluid channels configured to allow the fluid flow through the parting sheet support.

A liner tube for an inlet channel of a plate heat exchanger may include an open front side for supplying a refrigerant mass flow, an at least partially closed rear side, and at least two bag-like chambers running in a longitudinal direction of the liner tube. Each chamber may communicate with the open front side, and may have openings at chamber-dependent different positions for distributing the refrigerant mass flow in plate stacks of the plate heat exchanger.

A tube (13) has a container of phase change material M for a heat exchange bundle (3) of a heat exchanger (1) of an air conditioning system of a passenger compartment of a vehicle. The tube (13) includes a first plate (15) configured to form a first outer surface (17) of the tube (13), a second plate (19) configured to be sealingly assembled with the first plate (15) and to form a second outer surface (21) opposite the first outer surface (17), and an intermediate plate (23) configured to be sealingly assembled with the first and second plates (15, 19), between the latter, and to define on either sides thereof at least one channel (9) for the flow of a coolant F into the bundle (3) and at least one recess (25) for the phase change material M. The invention also relates to a heat exchange bundle and to a method for assembling a heat exchanger including the tube (13).