Patent classifications
G01B11/2522
Wafer inspection system including a laser triangulation sensor
One example of an inspection system includes a laser, a magnification changer, and a first camera. The laser projects a line onto a wafer to be inspected. The magnification changer includes a plurality of selectable lenses of different magnification. The first camera images the line projected onto the wafer and outputs three-dimensional line data indicating the height of features of the wafer. Each lens of the magnification changer provides the same nominal focal plane position of the first camera with respect to the wafer.
METHODS, APPARATUS, COMPUTER PROGRAMS AND NON-TRANSITORY COMPUTER READABLE STORAGE MEDIUMS FOR CONTROLLING A ROBOT WITHIN A VOLUME
A method of controlling a robot within a volume, the method comprising: receiving a three dimensional model including a model of the robot and a model of the volume in which the robot is configured to move within; defining a plurality of positions within the model of the volume to which the robot is moveable to, the plurality of positions being identified by an operator; receiving scanned three dimensional data of the robot and at least a part of the volume; determining a transformation algorithm using the three dimensional model and the scanned three dimensional data; applying the transformation algorithm to one or more positions of the plurality of positions to provide one or more transformed positions; and controlling movement of the robot using one or more of the transformed positions.
SYSTEM AND METHOD FOR REDUCED-SPECKLE LASER LINE GENERATION
An illumination apparatus for reducing speckle effect in light reflected off an illumination target includes a laser; a linear diffuser positioned in an optical path between an illumination target and the laser to diffuse collimated laser light in a planar fan of diffused light that spreads in one dimension across at least a portion of the illumination target; and a beam deflector to direct the collimated laser light incident on the beam deflector to sweep across different locations on the linear diffuser within an exposure time for illumination of the illumination target by the diffused light. The different locations span a distance across the linear diffuser that provides sufficient uncorrelated speckle patterns, at an image sensor, in light reflected from an intersection of the planar fan of light with the illumination target to add incoherently when imaged by the image sensor within the exposure time.
METHOD FOR DETERMINING FILM THICKNESS, METHOD FOR PRODUCING A FILM AND DEVICE FOR PRODUCING A FILM
The present document discloses a method of determining thickness of a wet film, in particular of microfibrillated cellulose. The method comprises conveying said film (20) in a wet state on a conveyor (10) having a conveyor width, the wet film having a film width which is less than the conveyor width, providing a laser projection (1511) across a film edge, acquiring a series of images, each depicting an area of the conveyor, wherein the laser projection, a portion of the film and a portion of an exposed conveyor surface are visible, and using at least some of said images to determine at least one of a film thickness and a film thickness distribution across the film width. The document also discloses a method of forming a film, in particular a microfibrillated cellulose film, and a device for producing such film.
Light line triangulation apparatus
The present invention relates to a light line triangulation apparatus with a measurement space for receiving a measurement object, a light projector, adapted to project a light line into the measurement space and/or onto the measurement object, an imager for detecting the light line in the measurement space, wherein the imager comprises imaging pixels arranged in a plurality of columns and rows. The apparatus of the invention is characterized in that the imager comprises multiple identical sets of polarization filters, wherein each set of polarization filters comprises at least two polarization filters with different polarization directions, wherein a respective polarization filter covers one of the columns.
SHAPE INSPECTION DEVICE, PROCESSING DEVICE, HEIGHT IMAGE PROCESSING DEVICE
Provided are a shape inspection device, a processing device, a height image processing method, and a height image processing program capable of accurately inspecting a measurement object. A profile data generation unit sequentially generates a plurality of pieces of profile data as the measurement object relatively moves in a Y-axis direction. A height image generation unit extracts characteristic points for the respective pieces of profile data, and moves the respective pieces of profile data in a plane intersecting with a Y axis such that the extracted characteristic points are aligned in a line in a direction corresponding to the Y axis. Then, the height image generation unit arranges the moved profile data in a direction corresponding to the Y axis to correct a height image.
System and method for calibrating a plurality of 3D sensors with respect to a motion conveyance
This invention provides an easy-to-manufacture, easy-to-analyze calibration object which combines measurable and repeatable, but not necessarily accurate, 3D features—such as a two-sided calibration object/target in (e.g.) the form of a frustum, with a pair of accurate and measurable features, more particularly parallel faces separated by a precise specified thickness, so as to provide for simple field calibration of opposite-facing DS sensors. Illustratively, a composite calibration object can be constructed, which includes the two-sided frustum that has been sandblasted and anodized (to provide measurable, repeatable features), with a flange whose above/below parallel surfaces have been ground to a precise specified thickness. The 3D corner positions of the two-sided frustum are used to calibrate the two sensors in X and Y, but cannot establish absolute Z without accurate information about the thickness of the two-sided frustum; the flange provides the absolute Z information.
IMAGING DEVICE FOR ACQUIRING THREE-DIMENSIONAL INFORMATION OF WORKPIECE SURFACE AND TWO-DIMENSIONAL IMAGE OF WORKPIECE
Provided is an imaging device for acquiring three-dimensional information of a workpiece surface and a two-dimensional image. An imaging device comprises a visual sensor for acquiring a two-dimensional image after acquiring three-dimensional information of a workpiece surface. A position detection device is attached to the conveyor drive motor of a conveyor that conveys a workpiece. An image processing part calculates the amount of movement of the workpiece from when the three-dimensional information is acquired to when the two-dimensional image is captured on the basis of an output of the position detection device. The image processing part moves the three-dimensional information relative to the two-dimensional image in such a manner as to correspond to the amount of movement of the workpiece in a predetermined coordinate system.
SHAPE PROFILE MEASUREMENT DEVICE, AND SHRINK-PACKAGING MACHINE
A shape profile measurement device includes: a light projector and a light receiver arranged facing each other; a belt conveyor for conveying an object for measurement; and a calculation unit. The light projector includes a plurality of light-emitting portions arranged in an array direction, and each emits substantially parallel measurement light. The light receiver includes a plurality of light-receiving portions arranged in the array direction facing the plurality of light-emitting portions, and each receives the measurement light emitted from a corresponding light-emitting portion. The light-receiving portions output a signal indicating a light intensity of the received measurement light. The calculation unit acquires the signal of the light receiver when the object is at a plurality of different movement-direction positions between the light-emitting portions and the light-receiving portions, and obtains a shape profile on the basis of the signal acquired and information relating to the plurality of movement-direction positions.
METHOD FOR CREATING A DIGITAL TWIN OF AN INFRASTRUCTURE COMPONENT
Systems and methods for creating a digital twin of an infrastructure component. The digital twin is a computerized, three-dimensional model of the component, typically a pipe, created after manufacture but before installation. The digital twin can be saved on a computer-readable storage medium for later retrieval, and can be loaded into three-dimensional modeling software for manipulation and viewing from various angles and perspectives. The twin is created from a plurality of imaging systems capturing different surfaces or different aspects, whose measurements are mapped to a uniform coordinate system to generate a three-dimensional model. Other data may also be added to or stored with the digital twin, such as manufacturing specifications, photographic data, and current or historical inspection data. The digital twin may be viewed on a mobile device programmed to receive, display, and allow the user to view and manipulate the digital twin.