G01B11/2545

Wafer inspection system including a laser triangulation sensor

One example of an inspection system includes a laser, a magnification changer, and a first camera. The laser projects a line onto a wafer to be inspected. The magnification changer includes a plurality of selectable lenses of different magnification. The first camera images the line projected onto the wafer and outputs three-dimensional line data indicating the height of features of the wafer. Each lens of the magnification changer provides the same nominal focal plane position of the first camera with respect to the wafer.

THREE-DIMENSIONAL IMAGE-CAPTURING DEVICE AND IMAGE-CAPTURING CONDITION ADJUSTING METHOD
20230040615 · 2023-02-09 · ·

A 3D image-capturing device that includes at least one camera that acquires a 2D image and distance information of an object, a monitor that displays the 2D image acquired by the camera, and at least one processor including hardware. The processor acquires a first area for which the distance information is not required in the 2D image displayed on the monitor, and sets an image-capturing condition so that the amount of distance information acquired by the camera in the acquired first area is less than or equal to a prescribed first threshold and the amount of distance information acquired by the camera in a second area, which is at least part of an area other than the first area, is greater than a prescribed second threshold that is larger than the first threshold.

Measuring device
11590652 · 2023-02-28 · ·

A user can easily create a robot program. A measuring device includes a position determination processing part that determines a holding position, held by a robot hand, of a workpiece placed in a work space and determines coordinates of a fixed via point having any single attribute based on a result of measurement made by a measuring part and holding information, the fixed via point being one of an approach position of the robot hand for holding the holding position, the holding position, and a retreat position after holding, and an output part that outputs, to a robot controller, the coordinates of the fixed via point determined by the position determination processing part and attribute information showing the attribute of the fixed via point.

Structured light projector and electronic device including the same

Provided is a structured light projector including a light source configured to emit light, and a nanostructure array configured to form a dot pattern based on the light emitted by the light source, the nanostructure array including a plurality of super cells each respectively including a plurality of nanostructures, wherein each of the plurality of super cells includes a first sub cell that includes a plurality of first nanostructures having a first shape distribution and a second sub cell that includes a plurality of second nanostructures having a second shape distribution.

System and method of registering point cloud data using subsample data

A system of generating a three-dimensional (3D) scan of an environment includes multiple 3D scanners including a first 3D scanner at respective first and second positions. The system further includes a controller coupled to the 3D scanners via a common communications network. The first scanner and second scanner transmit a subset of data to the controller while acquiring a set of 3D coordinates. The controller registers the subsets of data to each other while the sets of 3D coordinates is being acquired.

SINGLE-VIEW FEATURE-LESS DEPTH AND TEXTURE CALIBRATION

A method and apparatus for performing a single view depth and texture calibration are described. In one embodiment, the apparatus comprises a calibration unit operable to perform a single view calibration process using a captured single view a target having a plurality of plane geometries having detectable features and being at a single orientation and to generate calibration parameters to calibrate one or more of the projector and multiple cameras using the single view of the target.

BORESCOPE WITH PATTERN PROJECTION

A borescope includes an electronic image capture unit having two image capture sensors as a borescope lens at an end of a shaft that is designed for being inserted into a borescope opening, a position and alignment of the image capture sensors in relation to one another being suitable for ascertaining three-dimension (3D) information using triangulation; and a pattern projector configured to project a pattern into a common recording region of the image capture sensors. The pattern projector includes: a fundamentally optically imaging light-guide bundle, which is made up of statistically distributed optical fibers having differing transmittances, to whose input surface a light source is coupled and whose output surface is aligned with the region captured by the image capture sensors.

METHODS FOR OPTICAL TRACKING AND SURFACE ACQUISITION IN SURGICAL ENVIRONMENTS AND DEVICES THEREOF

A computer assisted system is disclosed that includes an optical tracking system and one or more computing devices. The optical tracking system includes an RGB sensor and is configured to capture color images of an environment in the visible light spectrum and tracking images of fiducials in the environment in a near-infrared spectrum. The computer assisted system is configured to generate a color image of the environment using the color images, identify fiducial locations using the tracking images, generate depth maps from the color images, reconstruct three-dimensional surfaces of structures based on the depth maps, and output a display comprising the reconstructed three-dimensional surface and one or more surgical objects that are associated with the tracked fiducials. The computer assisted system can further include a monitor or a head-mounted display (HMD) configured to present augmented reality (AR) images during a procedure.

FREEFORM SURFACE METROLOGY AND DEFLECTOMETRY
20230228563 · 2023-07-20 ·

Methods, devices and systems describe compact and simple deflectometry configurations that can measure complex shapes of freeform surfaces. One deflectometry system includes a first panel and a second panel positioned at an offset position from each other to provide illumination for an object. The second panel, positioned closer to the object, is operable as a substantially transparent panel, and as a pixelated panel to provide structured light patterns. The system also includes two or more cameras positioned on the second panel an is operable in a first mode where the first panel provides a first structured illumination and the second panel is configured as a substantially transparent panel that allows the first structured illumination from the first panel to transmit toward the object. The system is also operable in a second mode where the second panel is configured to provide a second structured illumination for illuminating the object.

Modeling the topography of a three-dimensional surface

According to an aspect, there is provided a method comprising controlling a structural light source of a modelling arrangement to produce a diffraction pattern of a known geometry on a surface to be modeled, the diffraction pattern accurately complying with a mathematical-physical model and wherein beam output angles of the diffraction pattern are accurately known based on the mathematical-physical model; recording a first image of the surface comprising the diffraction pattern with a first camera and a second image of the surface comprising the diffraction pattern with a second camera substantially simultaneously; determining a point cloud comprising primary points from the diffraction pattern visible in the first image; identifying the corresponding primary points from the second image; and using each primary point of the point cloud in the first and second images as an initial point for search spaces for secondary points in the first and second images.