A calibration method of an X-ray measuring device includes: a front-stage feature position calculation step of parallelly moving spheres disposed in N places a plurality of times, and identifying centroid positions ImPos(1 to Q)_Dis(1 to M)_Sphr_(1 to N) of projected images of the spheres in the N places; an individual matrix calculation step of calculating an individual projection matrix PPj (j=1 to Q) for each of the spheres; an individual position calculation step of calculating moving positions Xb of the spheres on the basis of the individual projection matrix PPj (j=1 to Q); a coordinate integration step of calculating specific relative position intervals X(1 to N) of the spheres; a rear-stage feature position calculation step; a transformation matrix calculation step of calculating a projective transformation matrix Hk (k=1 to Q); a rotation detection step; a position calculation step; and a center position calculation step.

An expansion/contraction amount calculation device 1 calculates an amount of deformation of an electrode by calculating an amount of expansion/contraction of the electrode based on 3D data of the electrode. The expansion/contraction amount calculation device 1 includes a controller 10 including: a feature point identifier 11 configured to identify a feature point from arrangement information regarding a piece of an active material, the arrangement information being included in the 3D data; a coordinate generator 12 configured to generate, based on relative positional information regarding the feature point, a coordinate system for calculation of the amount of deformation; and a calculator 14 configured to calculate, by comparing first 3D data with second 3D data, the amount of expansion/contraction of the electrode and the amount of deformation of the electrode.

The invention relates to a computer-implemented method for the measurement of an object, wherein the method comprises the following steps: ascertainment of measurement data using a radiographic measurement of the object, wherein the measurement data generates a digital representation of the object with a large number of items of image information of the object; and carrying out the following steps at least before ending the ascertainment of measurement data: analysis of at least one portion of the digital representation of the object; optimization of at least one recording parameter of the radiographic measurement using the analysed portion of the digital representation of the object; and adaptation of the step of ascertainment of measurement data taking the at least one recording parameter into consideration. The invention thus provides a computer-implemented method that has an increased efficiency.

In one embodiment, an automatic high-speed X-ray system may generate a high-resolution X-ray image of an inspected sample at a direction substantially orthogonal to a plane of the inspected sample. The system may determine a first cross-sectional shape of a first portion of a first element of interest in the inspected sample based on grayscale values of the X-ray image associated with the first element of interest. The system may determine a second cross-sectional shape of a second portion of the first element of interest in the inspected sample. The second cross-sectional shape may be determined based on the grayscale values of the X-ray image associated with the first element of interest. The system may determine one or more first metrological parameters associated with the first element of interest in the inspected sample based a comparison of the first cross-sectional shape and the second cross-sectional shape.

In order to sufficiently capture spatial distortion specific to an X-ray CT device and evaluate the three-dimensional shape measurement accuracy of the X-ray CT device, in a utensil, by attaching support rods fixing spheres to the tip thereof and having different lengths to a base spheres are arranged in an XYZ space on the base. On a flat surface on the top of the base, the support rods supporting the spheres and having different lengths are arranged at predetermined intervals. In doing so, the spheres are arranged in the XYZ space respectively at appropriate inter-sphere distances.

In order to sufficiently capture spatial distortion specific to an X-ray CT device and evaluate the three-dimensional shape measurement accuracy of the X-ray CT device, in a utensil, by attaching support rods fixing spheres to the tip thereof and having different lengths to a base spheres are arranged in an XYZ space on the base. On a flat surface on the top of the base, the support rods supporting the spheres and having different lengths are arranged at predetermined intervals. In doing so, the spheres are arranged in the XYZ space respectively at appropriate inter-sphere distances.

An x-ray examination arrangement includes an x-ray radiation source arranged at a source position, at least two x-ray detectors having active detector areas and being arranged such that the active detector areas capture different solid angle ranges with respect to x-ray radiation produced by the x-ray radiation source and emanating from the source position, and a control device configured to calculate a projection onto a virtual detector plane based on radiographs respectively captured by the at least two x-ray detectors and spatial poses of the at least two x-ray detectors relative to the source position, and provide a combined radiograph for the virtual detector plane based on the projection. In addition, a method for operating the x-ray examination arrangement and a computed tomography device are provided.

A measuring device includes a measuring stage on which a subject is placed, an X-ray irradiation unit, an X-ray detection unit that detects scattered X-rays generated from the subject and an analysis unit that analyzes the diffraction image obtained by photo-electrically converting scattered X-rays and presumes (estimates) the three-dimensional shape of the subject. In the subject, holes are formed in the ON stack film from the opening of the etching mask film formed on the ON stack film. The analysis unit presumes the three-dimensional shape of the subject based a plurality of the diffraction images acquired while changing a rotation angle of the measuring stage and the measurement data of the subject by at least one of measuring methods of a multi-wavelength light measurement and a laser ultrasonic wave measurement.

In order to sufficiently capture spatial distortion specific to an X-ray CT device and evaluate the three-dimensional shape measurement accuracy of the X-ray CT device, in a utensil, by attaching support rods fixing spheres to the tip thereof and having different lengths to a base spheres are arranged in an XYZ space on the base. On a flat surface on the top of the base, the support rods supporting the spheres and having different lengths are arranged at predetermined intervals. In doing so, the spheres are arranged in the XYZ space respectively at appropriate inter-sphere distances.

Described is determining a local deviation of a geometry of an object from a target geometry of the object on the basis of a digital representation of the object that comprises image information items that each specify a value of a measurand for the object at a defined position of the object. This includes determining the object representation, determining a distance field from the image information items of the object representation that comprises distance values for a specific point of the distance field that specifies the shortest distance of the point from a closest material boundary of the geometry of the object, determining the target geometry of the object, and determining the local deviation of the geometry of the object from the target geometry of the object at a test point on a material boundary predefined by the target geometry.