An implementation cost of a line-scan optical coherence tomography (OCT) apparatus is reduced by miniaturizing a scanning mirror and using a light source with relaxed requirement in intensity uniformity. The mirror reflects a probe light beam to different parts of a sample for line-scanning the sample. A line-compressing lens compresses the probe light beam's cross-sectional length before the beam reaches the mirror, allowing the mirror to be miniaturized to reflect only the compressed beam. In generating a linear light beam that gives the probe light beam, a cascade of collimating lens, Powell lens and focusing lens generates the linear light beam from a raw light beam of a point source. A slit further filters the linear light beam to remove a peripheral portion thereof such that the linear light beam is substantially uniform in intensity even if an asymmetrical divergent light source is used.

A tomographic imaging system includes a light source, a light irradiation unit that irradiates light to a transparent material composite thin film sample and a reference mirror and acquires an interference signal between light reflected and scattered from the sample and light reflected from the reference mirror, a light measuring unit that measures the interference signal acquired by the light irradiation unit, a light transmission unit that transmits the light output from the light source to the light irradiation unit and transmits the interference signal of the light transmitted from the light irradiation unit to the light measuring unit; and a signal processing apparatus that converts the interference signal of the sample, outputs the converted interference signal as a tomographic image, and monitors the interference signal acquired by the light irradiation unit to modulate intensity and a polarization state of the light input to the light irradiation unit.

An implementation cost of a line-scan optical coherence tomography (OCT) apparatus is reduced by miniaturizing a scanning mirror and using a light source with relaxed requirement in intensity uniformity. The mirror reflects a probe light beam to different parts of a sample for line-scanning the sample. A line-compressing lens compresses the probe light beam's cross-sectional length before the beam reaches the mirror, allowing the mirror to be miniaturized to reflect only the compressed beam. In generating a linear light beam that gives the probe light beam, a cascade of collimating lens, Powell lens and focusing lens generates the linear light beam from a raw light beam of a point source. A slit further filters the linear light beam to remove a peripheral portion thereof such that the linear light beam is substantially uniform in intensity even if an asymmetrical divergent light source is used.

An optical coherence tomography (OCT) system for profilometry measurements of a specimen with a lateral resolution across the profilometry measurements is provided. The OCT system includes a line-field generator, an interferometer, and a spectrometer. The line-field generator includes a filter arranged in a focal plane of a lens for spatially filtering extended line-field light into a line-field light of a width equal to the lateral resolution. The interferometer is configured to interfere the line-field light reflected from the specimen illuminated with a line-shaped focus with a reference signal of the line-field light to produce an interference pattern. The spectrometer configured to analyze spectral components of the interference pattern in a digital domain to produce the profilometry measurements of the specimen.

A spectroscopic measuring apparatus and method are provided. The apparatus includes a first light source, object, microlens, and imaging lenses, an optical fiber, a spectrometer and a position controller. The object lens to allows light from the first light source to be incident on a stage configured to support a measurement object. The microlens is disposed between the object lens and the stage. The imaging lens images light reflected from the measurement object. The optical fiber has an input terminal disposed on a first image plane of the imaging lens. The spectrometer is disposed at an output terminal of the optical fiber. The position controller controls positions of the object lens, the microlens, and the optical fiber, and adjusts the position of the object lens so that a focus of the object lens is positioned at a virtual image position of a virtual image generated by the microlens.

A device for interferential distance measurement between two objects that are situated in a movable manner with respect to each other along at least one shifting direction includes at least one light source as well as at least one splitting element, which splits a beam of rays emitted by the light source at a splitting location into at least two partial beams that propagate onward at different angles. The device furthermore includes at least one deflecting element that effects a deflection of the incident partial beams in the direction of a merging location, where the split partial beams are superimposed in an interfering manner and the optical paths of the partial beams of rays between the splitting location and the merging location being arranged such that the traversed optical path lengths of the partial beams between the splitting location and the merging location are identical in the event of a change of distance between the two objects. Furthermore, at least one detector system is provided for detecting distance-dependent signals from the superimposed pair of interfering partial beams.

A pixelated color mask is combined with a pixelated polarization mask in dynamic interferometry. The color mask includes a wavelength-selective bandpass filter placed in front of each camera pixel such that each set of contiguous four camera pixels is covered by two green bandpass filters, a red bandpass filter, and a blue bandpass filter. The pixelated phase mask is coupled to the color filters such that one polarization filter covers one set of color filters. At least three polarization filters are used to calculate phase. In addition, the color signals can be used, for example, to encode the motion of the interferometer, to provide very high speed autofocus or tip/tilt feedback, to create a color image of the object being measured, to automatically focus the system at different positions for different measurements conducted with different color sources, and to perform heterodyne interferometry with a single, vibration-immune measurement.

A spectroscopic measuring apparatus and method are provided. The apparatus includes a first light source, object, microlens, and imaging lenses, an optical fiber, a spectrometer and a position controller. The object lens to allows light from the first light source to be incident on a stage configured to support a measurement object. The microlens is disposed between the object lens and the stage. The imaging lens images light reflected from the measurement object. The optical fiber has an input terminal disposed on a first image plane of the imaging lens. The spectrometer is disposed at an output terminal of the optical fiber. The position controller controls positions of the object lens, the microlens, and the optical fiber, and adjusts the position of the object lens so that a focus of the object lens is positioned at a virtual image position of a virtual image generated by the microlens.

Methods and systems for focusing and measuring by mean of an interferometer device, having an optical coherence tomography (OCT) focusing system, by separately directing an overlapped measurement and reference wavefront towards a focus sensor and towards an imaging sensor; where a predefined focusing illumination spectrum of the overlapped wavefront is directed towards the focus sensor, and where a predefined measurement illumination spectrum of the overlapped wavefront is directed towards the imaging sensor. Methods and systems for maintaining focus of an interferometer device, having an OCT focusing system, during sample's stage moves.

Exemplary apparatus and method are provided for illuminating a sample. With such exemplary apparatus and/or method, it is possible to, using at least one source arrangement, provide at least one first electro-magnetic radiation. Using an optical system of an optics arrangement, it is possible to receive the first electro-magnetic radiation(s), and modifying the at least one first electro-magnetic radiation to be at least one second electro-magnetic radiation so as to be forwarded to the sample. Further, with the optical system, it is possible to extend the at least one second electro-magnetic radiation into or across the sample for a distance of at least 2 times the Raleigh range of a Gaussian beam when the optics arrangement and the sample are stationary with respect to one another. Additionally, using the optical system, it is possible to control a placement of a focus of the at least one second electro-magnetic radiation on or in the sample.