Provided herein are devices and systems comprising an illumination module configured to provide a source light to an optical interference module, which converts the source light to a line of light and processes light signal; an interference objective module, which handles light from the optical interference module and processes light signal generated from a sample; a two-dimensional camera configured to receive a backscattered interference signal from the sample, and a data processing module which processes the interference signal into an image.

An optical coherence tomography (OCT) system for profilometry measurements of a specimen with a lateral resolution across the profilometry measurements is provided. The OCT system includes a line-field generator, an interferometer, and a spectrometer. The line-field generator includes a filter arranged in a focal plane of a lens for spatially filtering extended line-field light into a line-field light of a width equal to the lateral resolution. The interferometer is configured to interfere the line-field light reflected from the specimen illuminated with a line-shaped focus with a reference signal of the line-field light to produce an interference pattern. The spectrometer configured to analyze spectral components of the interference pattern in a digital domain to produce the profilometry measurements of the specimen.

Embodiments of the present invention provide a method and apparatus for frequency-domain optical interferometry imaging. Embodiments of the invention include an apparatus comprising a line-shaping optical element for directing optical radiation into a line illumination, an imaging optical element for receiving optical radiation comprising radiation reflected from a target sample and a reference point associated with the target sample, and a detection unit for measuring common path interferences between a plurality of reflections from the target sample and the reference point. Embodiments of the invention include a method comprising directing radiation into a line illumination, directing the line illumination towards a target sample, receiving radiation reflected from the target sample at a detection unit, and measuring common path interferences between a plurality of reflections at the target sample and a reference point.

A source module suitable for an optical coherence tomography system. The source module comprises a source operable to emit a divergent, source output beam either of circular cross-section (e.g. as output by a vertical cavity surface emitting laser) or of elliptical cross-section (e.g. as output by an edge-emitting semiconductor laser or diode). Collimation optics are provided to convert the source output beam into a non-divergent, collimated beam of elliptical cross-section having a major axis and a minor axis. A cylindrical lens is arranged with its plano axis aligned with the major axis of the elliptical collimated beam and its power axis aligned with the minor axis of the elliptical collimated beam so as to form a line focus extending along the major axis of the elliptical collimated beam.

Embodiments of the present invention provide a method and apparatus for frequency-domain optical interferometry imaging. Embodiments of the invention include an apparatus comprising a line-shaping optical element for directing optical radiation into a line illumination, an imaging optical element for receiving optical radiation comprising radiation reflected from a target sample and a reference point associated with the target sample, and a detection unit for measuring common path interferences between a plurality of reflections from the target sample and the reference point. Embodiments of the invention include a method comprising directing radiation into a line illumination, directing the line illumination towards a target sample, receiving radiation reflected from the target sample at a detection unit, and measuring common path interferences between a plurality of reflections at the target sample and a reference point.

Embodiments of the present invention provide a method and apparatus for frequency-domain optical interferometry imaging. Embodiments of the invention include an apparatus comprising a line-shaping optical element for directing optical radiation into a line illumination, an imaging optical element for receiving optical radiation comprising radiation reflected from a target sample and a reference point associated with the target sample, and a detection unit for measuring common path interferences between a plurality of reflections from the target sample and the reference point. Embodiments of the invention include a method comprising directing radiation into a line illumination, directing the line illumination towards a target sample, receiving radiation reflected from the target sample at a detection unit, and measuring common path interferences between a plurality of reflections at the target sample and a reference point.

Provided herein are devices and systems comprising an illumination module configured to provide a source light to an optical interference module, which converts the source light to a line of light and processes light signal; an interference objective module, which handles light from the optical interference module and processes light signal generated from a sample; a two-dimensional camera configured to receive a backscattered interference signal from the sample, and a data processing module which processes the interference signal into an image.

A source module suitable for an optical coherence tomography system. The source module comprises a source operable to emit a divergent, source output beam either of circular cross-section (e.g. as output by a vertical cavity surface emitting laser) or of elliptical cross-section (e.g. as output by an edge-emitting semiconductor laser or diode). Collimation optics are provided to convert the source output beam into a non-divergent, collimated beam of elliptical cross-section having a major axis and a minor axis. A cylindrical lens is arranged with its plano axis aligned with the major axis of the elliptical collimated beam and its power axis aligned with the minor axis of the elliptical collimated beam so as to form a line focus extending along the major axis of the elliptical collimated beam.

Embodiments of the present invention provide a method and apparatus for frequency-domain optical interferometry imaging. Embodiments of the invention include an apparatus comprising a line-shaping optical element for directing optical radiation into a line illumination, an imaging optical element for receiving optical radiation comprising radiation reflected from a target sample and a reference point associated with the target sample, and a detection unit for measuring common path interferences between a plurality of reflections from the target sample and the reference point. Embodiments of the invention include a method comprising directing radiation into a line illumination, directing the line illumination towards a target sample, receiving radiation reflected from the target sample at a detection unit, and measuring common path interferences between a plurality of reflections at the target sample and a reference point.

Improved line-field imaging systems incorporating planar waveguides are presented. In one embodiment the optics of the system are configured such that a line of light on the light scattering object is imaged to the planar waveguide in at least one dimension. Embodiments where the waveguide incorporates a beamsplitter of an interferometer, where the beam divider and waveguide are referenced to one or more common surfaces, and wherein the source and waveguide are optically coupled, are also considered. In another embodiment, the planar waveguide is in contact or close proximity to the light scattering object.