According to one embodiment, a sensor includes a sensor element, a housing provided around the sensor element, and a processor. The sensor element includes a base body including first and second base body regions, and first and second sensor parts. The first sensor part is provided in the first base body region, and includes a first sensor movable part. The second sensor part is provided in the second base body region and includes first and second beams. The processor can derive a rotation angle and an angular velocity based on a signal obtained from the first sensor movable part. The processor can detect acceleration and a temperature based on a first resonance frequency of the first beam and a second resonance frequency of the second beam. The processor can correct one of the rotation angle or the angular velocity based on one of the temperature or the acceleration.

A gyroscope comprising a resonant structure and a plurality of transducers configured to drive a vibrational mode in the resonant structure and detect vibrations of the resonant structure, wherein at least one of the plurality of transducers comprises a piezoelectric mono crystal.

A gyroscope comprising a resonant structure and a plurality of transducers configured to drive a vibrational mode in the resonant structure and detect vibrations of the resonant structure, wherein at least one of the plurality of transducers comprises a piezoelectric mono crystal.

The present invention relates to a method for operating a rotation sensor for detecting a plurality of rates of rotation about orthogonal axes (x,y,z). The rotation sensor comprises a substrate, driving masses, X-Y sensor masses, and Z sensor masses. The driving masses are driven by drive elements to oscillate in the X-direction. The X-Y sensor masses are coupled to the driving masses, and driven to oscillate in the X-Y direction radially to a center. When a rate of rotation of the substrate occurs about the X-axis or the Y-axis, the X-Y sensor masses are jointly deflected about the Y-axis or X-axis. When a rate of rotation of the substrate occurs about the Z-axis, the X-Y sensor masses are rotated about the Z-axis, and the Z sensor masses are deflected substantially in the X-direction.

The present invention relates to a method for operating a rotation sensor for detecting a plurality of rates of rotation about orthogonal axes (x,y,z). The rotation sensor comprises a substrate, driving masses, X-Y sensor masses, and Z sensor masses. The driving masses are driven by drive elements to oscillate in the X-direction. The X-Y sensor masses are coupled to the driving masses, and driven to oscillate in the X-Y direction radially to a center. When a rate of rotation of the substrate occurs about the X-axis or the Y-axis, the X-Y sensor masses are jointly deflected about the Y-axis or X-axis. When a rate of rotation of the substrate occurs about the Z-axis, the X-Y sensor masses are rotated about the Z-axis, and the Z sensor masses are deflected substantially in the X-direction.

A gyro sensor element includes a base, driving vibrating arms, which extend from the base, have a first surface and a second surface located on an opposite side to the first surface, and make a driving vibration, and detecting vibrating arms, which extend from the base, have a third surface located on a same side as the first surface and a fourth surface located on an opposite side to the third surface, and vibrate in accordance with a physical quantity applied to the driving vibrating arms, wherein the driving vibrating arms have bottomed grooves on at least one of the first surface and the second surface, and driving electrodes disposed on inner surfaces of the bottomed grooves, and the detecting vibrating arms have through holes penetrating the detecting vibrating arms in a direction crossing the third surface and the fourth surface, and detecting electrodes disposed on at least a part of an inner wall surface of the through holes.

A gyro sensor element includes a base, driving vibrating arms, which extend from the base, have a first surface and a second surface located on an opposite side to the first surface, and make a driving vibration, and detecting vibrating arms, which extend from the base, have a third surface located on a same side as the first surface and a fourth surface located on an opposite side to the third surface, and vibrate in accordance with a physical quantity applied to the driving vibrating arms, wherein the driving vibrating arms have bottomed grooves on at least one of the first surface and the second surface, and driving electrodes disposed on inner surfaces of the bottomed grooves, and the detecting vibrating arms have through holes penetrating the detecting vibrating arms in a direction crossing the third surface and the fourth surface, and detecting electrodes disposed on at least a part of an inner wall surface of the through holes.

A vibrating body of an angular velocity detection element includes detection beams extending in a cross shape from a central base and external connection beams and internal connection beams connected between adjacent detection beams. The detection beams each include a base end detection beam that is connected to the central base and a central detection beam, a left detection beam and a right detection beam that define three prongs. The central detection beam is connected to the external connection beams on both sides, the left detection beam is connected to the internal connection beam on the left side and the right detection beam is connected to the internal connection beam on the right side. The adjacent external connection beams undergo driven vibration so as to be displaced in directions so as to have mirror relationships with each other with the detection beams interposed between the external connection beams acting as boundaries therebetween.

A vibrating body of an angular velocity detection element includes detection beams extending in a cross shape from a central base and external connection beams and internal connection beams connected between adjacent detection beams. The detection beams each include a base end detection beam that is connected to the central base and a central detection beam, a left detection beam and a right detection beam that define three prongs. The central detection beam is connected to the external connection beams on both sides, the left detection beam is connected to the internal connection beam on the left side and the right detection beam is connected to the internal connection beam on the right side. The adjacent external connection beams undergo driven vibration so as to be displaced in directions so as to have mirror relationships with each other with the detection beams interposed between the external connection beams acting as boundaries therebetween.

A sensor module that includes an inertial sensor and an abnormality determination unit that determines that the inertial sensor is abnormal when a structural resonance frequency at the first time point and a structural resonance frequency at the second time point are separated by a predetermined value or more.