A phase-locked loop for a driver circuit for operating a MEMS gyroscope, including a seismic mass that is excitable into oscillations. The phase-locked loop including an input interface for receiving position signals that represent the present position of the oscillating seismic mass of the MEMS gyroscope, a phase detector for ascertaining the phase and frequency of the present oscillation movement of the seismic mass, based on the received position signals, at least two oscillators that are alternatively activatable, the alternatively activatable oscillators having different energy consumptions and/or different noise properties, and at least one output interface for outputting a signal that is provided by the oscillator that is presently activated.

A phase-locked loop for a driver circuit for operating a MEMS gyroscope, including a seismic mass that is excitable into oscillations. The phase-locked loop including an input interface for receiving position signals that represent the present position of the oscillating seismic mass of the MEMS gyroscope, a phase detector for ascertaining the phase and frequency of the present oscillation movement of the seismic mass, based on the received position signals, at least two oscillators that are alternatively activatable, the alternatively activatable oscillators having different energy consumptions and/or different noise properties, and at least one output interface for outputting a signal that is provided by the oscillator that is presently activated.

Gyroscopes are sensors that measure angular rate and angular orientation. A three-dimensional fused silica micro shell rate-integrating gyroscope is presented. One aspect of the gyroscope includes the use of optical sensors to detect motion of the resonator. The proposed gyroscope is attractive because it achieves several magnitudes higher accuracy as well as high vibration and shock insensitivity from a novel resonator design as well as other unique manufacturing processes.

Gyroscopes are sensors that measure angular rate and angular orientation. A three-dimensional fused silica micro shell rate-integrating gyroscope is presented. One aspect of the gyroscope includes the use of optical sensors to detect motion of the resonator. The proposed gyroscope is attractive because it achieves several magnitudes higher accuracy as well as high vibration and shock insensitivity from a novel resonator design as well as other unique manufacturing processes.

A phase locked loop has an oscillator that varies a frequency according to a control signal, a resonance element that resonates at a predetermined resonance frequency and output a signal obtained by shifting a phase of an output signal of the oscillator by 90 degrees at the resonance frequency, a phase detector that detects a phase error between an output signal of the resonance element and an output signal of the oscillator, a feedback controller that controls a frequency of an output signal of the oscillator by proportional control and integral control according to the phase error, and a control signal corrector that corrects the control signal by adding a correction term corresponding to environment information to an output signal of the feedback controller.

A phase locked loop has an oscillator that varies a frequency according to a control signal, a resonance element that resonates at a predetermined resonance frequency and output a signal obtained by shifting a phase of an output signal of the oscillator by 90 degrees at the resonance frequency, a phase detector that detects a phase error between an output signal of the resonance element and an output signal of the oscillator, a feedback controller that controls a frequency of an output signal of the oscillator by proportional control and integral control according to the phase error, and a control signal corrector that corrects the control signal by adding a correction term corresponding to environment information to an output signal of the feedback controller.

A vibration-type angular velocity sensor (100) includes a primary side control circuit (2) and a secondary side control circuit (3) which are configured so that a function as the primary side control circuit (2) and a function as the secondary side control circuit (3) are interchangeable, in which an offset value after interchange and an offset value before interchange are symmetric values with respect to a predetermined reference value.

A vibration-type angular velocity sensor (100) includes a primary side control circuit (2) and a secondary side control circuit (3) which are configured so that a function as the primary side control circuit (2) and a function as the secondary side control circuit (3) are interchangeable, in which an offset value after interchange and an offset value before interchange are symmetric values with respect to a predetermined reference value.

An extensional mode electrostatic microelectromechanical systems (MEMS) gyroscope is described. The MEMS gyroscope operates in an extensional mode. The MEMS gyroscope comprises a vibrating ring structure that is electrostatically excited in the extensional mode.

An extensional mode electrostatic microelectromechanical systems (MEMS) gyroscope is described. The MEMS gyroscope operates in an extensional mode. The MEMS gyroscope comprises a vibrating ring structure that is electrostatically excited in the extensional mode.