A method of adjusting an operating parameter of a miniature electromechanical resonator comprises measuring angular coordinates of first and second principal stiffness axes of first and second wine-glass mode of the miniature electromechanical resonator, respectively; determining first and second wine-glass mode frequencies of the resonator being resonant frequencies of the first and second principal stiffness axes, respectively; calculating one or more locations on the resonator for machining to reduce a difference between the first and second wine-glass mode frequencies; and machining the one or more locations on the resonator to reduce the difference between the first and second wine-glass mode frequencies. An apparatus for adjusting an operating parameter of a miniature electromechanical resonator comprises a vibration actuator/detector configured to measure the locations of the first and second principal stiffness axes, and a micro-machining apparatus to add or remove material from the resonator for adjusting the operating parameter thereof.

A method of adjusting an operating parameter of a miniature electromechanical resonator comprises measuring angular coordinates of first and second principal stiffness axes of first and second wine-glass mode of the miniature electromechanical resonator, respectively; determining first and second wine-glass mode frequencies of the resonator being resonant frequencies of the first and second principal stiffness axes, respectively; calculating one or more locations on the resonator for machining to reduce a difference between the first and second wine-glass mode frequencies; and machining the one or more locations on the resonator to reduce the difference between the first and second wine-glass mode frequencies. An apparatus for adjusting an operating parameter of a miniature electromechanical resonator comprises a vibration actuator/detector configured to measure the locations of the first and second principal stiffness axes, and a micro-machining apparatus to add or remove material from the resonator for adjusting the operating parameter thereof.

A micro vibration body includes a curved surface portion, a recessed portion recessed from the curved surface portion, a bottom surface protruding portion protruding from a bottom surface of the recessed portion, and a through hole in the bottom surface protruding portion. A mounting substrate has a positioning recess, into which the bottom surface protruding portion is inserted, and electrode portions surrounding the inner frame portion. A joining member is in the positioning recess and joins the bottom surface protruding portion with the mounting substrate. The bottom surface is in contact with a region of the mounting substrate around the positioning recess. The bottom surface protruding portion has a tip end surface that is at a distance from the positioning recess. The joining member at least partially enters the through hole and is electrically connected to the conductive layer.

An inertial sensor includes a lower substrate and an upper substrate. The upper substrate includes a micro oscillator, electrodes and a pad, which are independent of each other. The micro oscillator includes a curved surface portion, a joint portion recessed inward from an apex of the curved surface portion and joined to a support portion of the lower substrate, a rim at an end of the curved surface portion and a conductive film covering the micro oscillator. The curved surface portion is in an aerial state. The rim is made of the same material as the electrodes, located on a virtual flat plane formed by the electrodes, and apart from and surrounded by the electrodes. A portion of the conductive film that covers the joint portion is electrically bonded to a lower metal film covering the support portion.

A method of manufacturing a micro-oscillator includes: preparing a substrate having a flat portion and a curved surface portion formed in a three-dimensional curved shape protruding from one surface of the flat portion, the curved surface portion being surrounded by the flat portion; and irradiating an outer surface of the curved surface portion with a laser beam to separate the curved surface portion from the flat portion.

A method of manufacturing a micro-oscillator includes: preparing a substrate having a flat portion and a curved surface portion formed in a three-dimensional curved shape protruding from one surface of the flat portion, the curved surface portion being surrounded by the flat portion; and irradiating an outer surface of the curved surface portion with a laser beam to separate the curved surface portion from the flat portion.

A gyroscope comprising a resonator, a plurality of transducers configured to drive a vibrational mode in the resonator and detect vibrations of the resonator, a base configured to support the resonator, the base including attachment points for attachment to an external system, and a vibration isolator for isolating the resonator from the external system, the vibration isolator being formed from resilient material and being located radially inward of the attachment points.

A mounting structure includes a micro vibrator and a mounting substrate. The micro vibrator includes a curved surface portion having an annular curved surface and a connecting portion extending from the curved surface portion toward an inner center position of the curved surface portion. The micro vibrator is disposed so that the connecting portion is bonded to the mounting substrate and the curved surface portion is in a hollow state free from other elements. The mounting substrate includes a plurality of electrode portions that are arranged to face and surround a rim of the curved surface portion of the micro vibrator, and spaced apart from each other, the rim being an end of the curved surface portion opposite to the connecting portion. Further, the mounting substrate includes a guard electrode.

A mounting structure includes a micro vibrator and a mounting substrate. The micro vibrator includes a curved surface portion having an annular curved surface and a connecting portion extending from the curved surface portion toward an inner center position of the curved surface portion. The micro vibrator is disposed so that the connecting portion is bonded to the mounting substrate and the curved surface portion is in a hollow state free from other elements. The mounting substrate includes a plurality of electrode portions that are arranged to face and surround a rim of the curved surface portion of the micro vibrator, and spaced apart from each other, the rim being an end of the curved surface portion opposite to the connecting portion. Further, the mounting substrate includes a guard electrode.

One example includes an instrument system. The system includes instrument components at least partially disposed in an evacuated chamber within an instrument housing. The system also includes a barrier that is configured to seal the evacuated chamber. The barrier includes a plurality of instrument electrodes that are electrically coupled to the instrument components and extending through the barrier. The system further includes a diffusion block formed of a non-diffusive material and coupled to the instrument housing to seal an evacuated cavity within the instrument housing between the barrier and the diffusion block.