Gyroscope data can be used to generate upsampled signal. Multiple mobile devices are spaced apart from each other in a spatial arrangement. Each mobile device includes a gyroscope sensor to detect mechanical vibrations caused by signals originating within a vicinity of a mobile device that includes the gyroscope sensor. Each mobile device includes one or more respective processors to receive representations of the mechanical vibrations sensed by the gyroscope sensor at a sampling frequency, and transmit the representations received at the sampling frequency as a respective vibration signal associated with sampling times. The signal processor is coupled to the multiple mobile devices. The signal processor generates a processed upsampled signal by interleaving the vibration signal received from each mobile device and processing the interleaved signal using one or more machine learning filters, and transmitting the processed upsampled signal.

A bulk acoustic wave resonator apparatus includes a resonator member, at least one anchor structure coupling the resonator member to a substrate, and a comb-drive element connected to the resonator member. The comb-drive element includes first comb fingers protruding from the resonator member, and second comb fingers of a different material than the first comb fingers interdigitated with the first comb fingers to define sub-micron capacitive gaps therebetween. Respective sidewalls of the first comb fingers are oppositely-tapered relative to respective sidewalls of the second comb fingers along respective lengths thereof, such that operation of the comb-drive element varies the sub-micron capacitive gaps at the respective sidewalls thereof. Respective tuning electrodes, which are slanted at respective angles parallel to an angle of respective sidewalls of the resonator member, may also be provided for quadrature tuning between different resonance modes of the resonator member. Related devices and fabrication methods are also discussed.

A bulk acoustic wave resonator apparatus includes a resonator member, at least one anchor structure coupling the resonator member to a substrate, and a comb-drive element connected to the resonator member. The comb-drive element includes first comb fingers protruding from the resonator member, and second comb fingers of a different material than the first comb fingers interdigitated with the first comb fingers to define sub-micron capacitive gaps therebetween. Respective sidewalls of the first comb fingers are oppositely-tapered relative to respective sidewalls of the second comb fingers along respective lengths thereof, such that operation of the comb-drive element varies the sub-micron capacitive gaps at the respective sidewalls thereof. Respective tuning electrodes, which are slanted at respective angles parallel to an angle of respective sidewalls of the resonator member, may also be provided for quadrature tuning between different resonance modes of the resonator member. Related devices and fabrication methods are also discussed.

Embodiments of the present disclosure relate generally to acoustically decoupled microelectromechanical system devices and, more particularly, to acoustically decoupled microelectromechanical system devices anchored upon phononic crystals. In some embodiments described herein, a device may comprise a resonator, a handle layer, and a pedestal disposed between the resonator and the handle layer, the pedestal connecting the resonator to the handle layer. In the devices described herein, the resonator and the handle layer may be non-coplanar. In some embodiments, the handle layer comprises a phononic crystal to acoustically decouple the resonator from the substrate of the handle layer.

Embodiments of the present disclosure relate generally to acoustically decoupled microelectromechanical system devices and, more particularly, to acoustically decoupled microelectromechanical system devices anchored upon phononic crystals. In some embodiments described herein, a device may comprise a resonator, a handle layer, and a pedestal disposed between the resonator and the handle layer, the pedestal connecting the resonator to the handle layer. In the devices described herein, the resonator and the handle layer may be non-coplanar. In some embodiments, the handle layer comprises a phononic crystal to acoustically decouple the resonator from the substrate of the handle layer.

The disclosure describes a z-axis gyroscope where a proof mass is suspended from a peripheral suspender and a central suspender. The peripheral suspender forms a truncated triangle around the proof mass, and the central suspender extends through the truncated corner of the triangle formed by the peripheral suspender. The proof mass is driven into a primary oscillation mode by one or more piezoelectric drive transducers located on the peripheral suspender. One or more piezoelectric sense transducers located on the base of the peripheral suspender are configured to detect the secondary oscillation mode of the proof mass.

The disclosure describes a z-axis gyroscope where a proof mass is suspended from a peripheral suspender and a central suspender. The peripheral suspender forms a truncated triangle around the proof mass, and the central suspender extends through the truncated corner of the triangle formed by the peripheral suspender. The proof mass is driven into a primary oscillation mode by one or more piezoelectric drive transducers located on the peripheral suspender. One or more piezoelectric sense transducers located on the base of the peripheral suspender are configured to detect the secondary oscillation mode of the proof mass.

A bulk acoustic wave resonator apparatus includes a resonator member, at least one anchor structure coupling the resonator member to a substrate, and a comb-drive element connected to the resonator member. The comb-drive element includes first comb fingers protruding from the resonator member, and second comb fingers of a different material than the first comb fingers interdigitated with the first comb fingers to define sub-micron capacitive gaps therebetween. Respective sidewalls of the first comb fingers are oppositely-tapered relative to respective sidewalls of the second comb fingers along respective lengths thereof, such that operation of the comb-drive element varies the sub-micron capacitive gaps at the respective sidewalls thereof. Related devices and fabrication methods are also discussed.

A bulk acoustic wave resonator apparatus includes a resonator member, at least one anchor structure coupling the resonator member to a substrate, and a comb-drive element connected to the resonator member. The comb-drive element includes first comb fingers protruding from the resonator member, and second comb fingers of a different material than the first comb fingers interdigitated with the first comb fingers to define sub-micron capacitive gaps therebetween. Respective sidewalls of the first comb fingers are oppositely-tapered relative to respective sidewalls of the second comb fingers along respective lengths thereof, such that operation of the comb-drive element varies the sub-micron capacitive gaps at the respective sidewalls thereof. Related devices and fabrication methods are also discussed.

A rotation sensor, including: (i) a substrate having a top surface and an interior bottom surface; (ii) an electrode module positioned on the top surface of the substrate and including a first set of electrodes configured to generate a bulk acoustic wave directly into the substrate, wherein at least a portion of the bulk acoustic wave is transduced into a shear wave upon reflection on the interior bottom surface of the substrate without use of a reflector, and a second set of electrodes configured to detect the shear wave; and (iii) a controller in communication with the first set and second set of electrodes and configured to determine, based on the detected shear wave, an effect of Coriolis force on the sensor.