A bulk acoustic wave resonator apparatus includes a resonator member, at least one anchor structure coupling the resonator member to a substrate, and a comb-drive element connected to the resonator member. The comb-drive element includes first comb fingers protruding from the resonator member, and second comb fingers of a different material than the first comb fingers interdigitated with the first comb fingers to define sub-micron capacitive gaps therebetween. Respective sidewalls of the first comb fingers are oppositely-tapered relative to respective sidewalls of the second comb fingers along respective lengths thereof, such that operation of the comb-drive element varies the sub-micron capacitive gaps at the respective sidewalls thereof. Respective tuning electrodes, which are slanted at respective angles parallel to an angle of respective sidewalls of the resonator member, may also be provided for quadrature tuning between different resonance modes of the resonator member. Related devices and fabrication methods are also discussed.

A bulk acoustic wave resonator apparatus includes a resonator member, at least one anchor structure coupling the resonator member to a substrate, and a comb-drive element connected to the resonator member. The comb-drive element includes first comb fingers protruding from the resonator member, and second comb fingers of a different material than the first comb fingers interdigitated with the first comb fingers to define sub-micron capacitive gaps therebetween. Respective sidewalls of the first comb fingers are oppositely-tapered relative to respective sidewalls of the second comb fingers along respective lengths thereof, such that operation of the comb-drive element varies the sub-micron capacitive gaps at the respective sidewalls thereof. Respective tuning electrodes, which are slanted at respective angles parallel to an angle of respective sidewalls of the resonator member, may also be provided for quadrature tuning between different resonance modes of the resonator member. Related devices and fabrication methods are also discussed.

A microelectromechanical resonator includes a resonator member suspended over a surface of a substrate by at least one anchor that is connected to the substrate. The resonator member includes outer and inner frames that are concentrically arranged and mechanically coupled by support structures extending therebetween. Related apparatus and gyroscopes are also discussed.

A microelectromechanical resonator includes a resonator member suspended over a surface of a substrate by at least one anchor that is connected to the substrate. The resonator member includes outer and inner frames that are concentrically arranged and mechanically coupled by support structures extending therebetween. Related apparatus and gyroscopes are also discussed.

A signal processing circuit for a gyroscope apparatus is disclosed. The signal processing circuit includes a first electrode and a second electrode pairing with the first electrode. The signal processing circuit, being a negative feedback loop circuit, is configured to be connected with the first electrode and the second electrode and comprises a demodulator configured to convert a current from the first electrode into a voltage and demodulate the converted voltage to output a demodulated signal, an analog-to-digital converter configured to convert the demodulated signal from the demodulator into a digital signal, a proportional-integral-derivative controller that is connected to the analog-to-digital converter, a digital-to-analog converter configured to convert an output signal from the proportional-integral-derivative controller to an analog signal, and a modulator configured to be electrically connected with the second electrode and to be electrically connected with the digital-to-analog converter.

Disclosed is a chip-level resonant acousto-optic coupling solid-state wave gyroscope based on MEMS technology. A surface acoustic progressive wave mode sensitive structure and a micro-ring resonant cavity optical detection structure are combined in the gyroscope. Through acousto-optic effect, mechanical strain of the device crystal caused by wave vibration of a primary surface acoustic wave and a secondary surface acoustic wave caused by Coriolis force is converted into a variation in the refractive index of an optical waveguide etched on the device, so that the optical signal transmitted in the waveguide diffracts, thereby generating frequency modulation. Meanwhile, a micro-ring resonant cavity using the resonance principle peels off the frequency change introduced by the primary surface acoustic wave, and obtains an output signal containing external angular velocity information. Based on the proportional relationship between the detection resolution and the quality factor of the micro-ring resonant cavity, the order of magnitude of the interface detection resolution is improved, and the performance indicators of the gyroscope are simultaneously optimized in terms of improving sensitivity and resolution, and its precision is improved.

A SAW-based inertial sensor incorporates a curved SAW drive resonator and graphene electrodes to increase the Coriolis force on a pillar array and generate secondary SAW waves that create a strain-induced hyperfine frequency transition in an enclosed alkali atom vapor, in conjunction with an integrated FP resonator to measure very small inertial signals corresponding to 10 μg and 0.01°/hr, representing a dynamic range of 10 orders of magnitude.

A SAW-based inertial sensor incorporates a curved SAW drive resonator and graphene electrodes to increase the Coriolis force on a pillar array and generate secondary SAW waves that create a strain-induced hyperfine frequency transition in an enclosed alkali atom vapor, in conjunction with an integrated FP resonator to measure very small inertial signals corresponding to 10 μg and 0.01°/hr, representing a dynamic range of 10 orders of magnitude.

A method is provided for determining a number of revolutions per minute (RPM) of a rotating object. The method includes transmitting interrogation signals at a regular period from a fixed antenna positioned adjacent to the rotating object. The method also includes transmitting echo signals from a sensor antenna positioned on the rotating object, in response to the interrogation signals. The method also includes counting a number of echo signals detected by the fixed antenna, during one revolution of the object. The method also includes determining the RPM of the rotating object based on the number of response signals and the regular period of the signals. A system is also provided for determining the number of revolutions per minute (RPM) of the rotating object.

Gyroscope data can be used to generate upsampled signal. Multiple mobile devices are spaced apart from each other in a spatial arrangement. Each mobile device includes a gyroscope sensor to detect mechanical vibrations caused by signals originating within a vicinity of a mobile device that includes the gyroscope sensor. Each mobile device includes one or more respective processors to receive representations of the mechanical vibrations sensed by the gyroscope sensor at a sampling frequency, and transmit the representations received at the sampling frequency as a respective vibration signal associated with sampling times. The signal processor is coupled to the multiple mobile devices. The signal processor generates a processed upsampled signal by interleaving the vibration signal received from each mobile device and processing the interleaved signal using one or more machine learning filters, and transmitting the processed upsampled signal.