A sensor system. The sensor system includes: an analog processing arrangement comprising: a drive circuit which generates an analog drive signal to drive an oscillating element of a microelectromechanical gyroscope; a detection circuit configured to generate analog rotation-rate and quadrature signals from a signal detected by the gyroscope; an analog-to-digital converter(s) configured to convert the analog rotation-rate and quadrature signals into digital rotation-rate and quadrature signals; a compensation circuit, which, in a measurement operating mode of the sensor system, compensates a quadrature effect on the analog quadrature signal using at least one quadrature compensation value; and a digital processing arrangement comprising a digital processing circuit, which, in the measurement operating mode of the sensor system, is configured to compensate a temperature-dependent quadrature-induced zero rate offset ZRO of the digital rotation-rate signal using at least one ZRO compensation value and temperature information.

A sensor system. The sensor system includes: an analog processing arrangement comprising: a drive circuit which generates an analog drive signal to drive an oscillating element of a microelectromechanical gyroscope; a detection circuit configured to generate analog rotation-rate and quadrature signals from a signal detected by the gyroscope; an analog-to-digital converter(s) configured to convert the analog rotation-rate and quadrature signals into digital rotation-rate and quadrature signals; a compensation circuit, which, in a measurement operating mode of the sensor system, compensates a quadrature effect on the analog quadrature signal using at least one quadrature compensation value; and a digital processing arrangement comprising a digital processing circuit, which, in the measurement operating mode of the sensor system, is configured to compensate a temperature-dependent quadrature-induced zero rate offset ZRO of the digital rotation-rate signal using at least one ZRO compensation value and temperature information.

A gyroscope includes: a mass, which is movable with respect to a supporting body; a driving loop for keeping the mass in oscillation according to a driving axis; a reading device, which supplying an output signal indicating an angular speed of the body; and a compensation device, for attenuating spurious signal components in quadrature with respect to a velocity of oscillation of the mass. The reading device includes an amplifier, which supplies a transduction signal indicating a position of the mass according to a sensing axis. The compensation device forms a control loop with the amplifier, extracts from the transduction signal an error signal representing quadrature components in the transduction signal, and supplies to the amplifier a compensation signal such as to attenuate the error signal.

A gyroscope includes: a mass, which is movable with respect to a supporting body; a driving loop for keeping the mass in oscillation according to a driving axis; a reading device, which supplying an output signal indicating an angular speed of the body; and a compensation device, for attenuating spurious signal components in quadrature with respect to a velocity of oscillation of the mass. The reading device includes an amplifier, which supplies a transduction signal indicating a position of the mass according to a sensing axis. The compensation device forms a control loop with the amplifier, extracts from the transduction signal an error signal representing quadrature components in the transduction signal, and supplies to the amplifier a compensation signal such as to attenuate the error signal.

A phase-locked loop for a driver circuit for operating a MEMS gyroscope, including a seismic mass that is excitable into oscillations. The phase-locked loop including an input interface for receiving position signals that represent the present position of the oscillating seismic mass of the MEMS gyroscope, a phase detector for ascertaining the phase and frequency of the present oscillation movement of the seismic mass, based on the received position signals, at least two oscillators that are alternatively activatable, the alternatively activatable oscillators having different energy consumptions and/or different noise properties, and at least one output interface for outputting a signal that is provided by the oscillator that is presently activated.

A phase-locked loop for a driver circuit for operating a MEMS gyroscope, including a seismic mass that is excitable into oscillations. The phase-locked loop including an input interface for receiving position signals that represent the present position of the oscillating seismic mass of the MEMS gyroscope, a phase detector for ascertaining the phase and frequency of the present oscillation movement of the seismic mass, based on the received position signals, at least two oscillators that are alternatively activatable, the alternatively activatable oscillators having different energy consumptions and/or different noise properties, and at least one output interface for outputting a signal that is provided by the oscillator that is presently activated.

A sensor for measuring rate of rotation is disclosed which includes a disk resonator, an anchor coupled to the disk resonator and further coupled to a substrate, and an optical waveguide wrapping around at least a portion of the perimeter of the disk resonator, the optical waveguide having an input end and an output end, wherein the disk resonator is configured to expand radially when subject to a rotational input, and wherein said radial expansion is adapted to cause a change in an optical signal passing through the optical waveguide.

A sensor for measuring rate of rotation is disclosed which includes a disk resonator, an anchor coupled to the disk resonator and further coupled to a substrate, and an optical waveguide wrapping around at least a portion of the perimeter of the disk resonator, the optical waveguide having an input end and an output end, wherein the disk resonator is configured to expand radially when subject to a rotational input, and wherein said radial expansion is adapted to cause a change in an optical signal passing through the optical waveguide.

An inertial measurement unit with distributed sensors to provide superior accuracy for acceleration, angular velocity and in some cases orientation. By using a distributed sensor configuration, improved accuracy is possible by leveraging the geometric configuration of the sensor array. The devices and methods described below provide for a distributed sensor IMU with distributed accelerometers, in addition to optionally distributed magnetometers and a further optional gyroscope.

A microelectromechanical inertial sensor including a substrate and an electromechanical structure situated on the substrate.