A spectral imaging system includes an objective lens system, an optical splitter, a dispersion system, and an optical combiner. The optical splitter is arranged to be in an optical path of an object being imaged through the objective lens system to provide an imaging optical path and a spectrometer optical path. The dispersion system is arranged in the spectrometer optical path. The optical combiner is arranged in the imaging optical path and a path of dispersed light from the dispersion system to combined dispersed light with a corresponding optical image of the object.

The present invention enables highly accurate analysis when visualizing analysis results in spectral imaging.

An surface analysis method includes: acquiring spectral image data regarding a sample surface with use of a spectral camera; extracting n wavelengths dispersed in a specific wavelength range in the acquired spectral image data, and converting spectrums of the wavelengths in the spectral image data into n-dimensional spatial vectors for each pixel; normalizing the spatial vectors of the pixels; clustering the normalized spatial vectors into a specific number of classifications; and identifying and displaying pixels clustered into the classifications, for each of the classifications.

Disclosed is a method of acquiring and forming a spectrometry image of a sample including the following steps: e1) acquisition of an initial image, composed of pixels, of an area of the sample and definition of a maximum set of N, 2≤N, measurement positions of spectrometry, each measurement position including a coordinate and an intensity determined on the basis of the pixels; e2) assignment of a classification value to each of the N measurement positions on the basis of deviations, calculated based on an intensity difference and a coordinate difference, between the measurement positions; e3) determination of a group of P, 1≤P≤N, measurement positions as a function of the classification values; e4) successively, for each measurement position of the group, positioning of an excitation beam in the measurement position on the area of the sample, acquisition of a spectrometry measurement and formation of the spectrometry image.

An identification apparatus that identifies properties of a specimen conveyed at a predetermined conveying velocity by a conveying unit includes an identification unit configured to identify a material included in the specimen and acquire a length in a conveying direction of the specimen, and a command unit configured to generate a control signal for controlling a screening device to perform a screening operation with predetermined intensity corresponding to the length, wherein the command unit changes the intensity of the screening operation per the length according to the length.

A user device for imaging a scene includes a first plurality of optical sensors coupled to a substrate for collecting an image of a scene and a second plurality of optical sensors coupled to the substrate for collecting spectral information from the image. A plurality of sets of interference filters are associated with the second plurality of optical sensors, where each interference filter of a set of interference filters is configured to pass light in one of a plurality of wavelength ranges to one or more optical sensors of the second plurality of optical sensors and each optical sensor of the plurality of optical sensors is associated with a spatial area of the image. A processor is adapted to receive an output from the first plurality of optical sensors and the second plurality of optical sensors and determine, based on the spectral information, a target area within the scene. The processor is further adapted to retrieve focus data for the scene, determine a focus distance for the target area and output user-perceptible information to an output display.

Optical spectrometers may be used to determine the spectral components of electromagnetic waves. Spectrometers may be large, bulky devices and may require waves to enter at a nearly direct angle of incidence in order to record a measurement. What is disclosed is an ultra-compact spectrometer with nanophotonic components as light dispersion technology. Nanophotonic components may contain metasurfaces and Bragg filters. Each metasurface may contain light scattering nanostructures that may be randomized to create a large input angle, and the Bragg filter may result in the light dispersion independent of the input angle. The spectrometer may be capable of handling about 200 nm bandwidth. The ultra-compact spectrometer may be able to read image data in the visible (400-600 nm) and to read spectral data in the near-infrared (700-900 nm) wavelength range. The surface area of the spectrometer may be about 1 mm.sup.2, allowing it to fit on mobile devices.

An apparatus to determine occurrence of an anomalous plasma event occurring at or near a process station of a multi-station integrated circuit fabrication chamber is disclosed. In particular embodiments, optical emissions generated responsive to the anomalous plasma event may be detected by at least one photosensor of a plurality of photosensors. A processor may cooperate with the plurality of photosensors to determine that the anomalous plasma event has occurred at or near by a particular process station of the multi-station integrated circuit fabrication chamber.

A label-free optical device for near real time quantification of the multifractal micro-optical properties of a sample includes a source of broadband light; a tunable filter that receives at least a portion of the broadband light and then transmits narrowband light, whereby a specific band of light is selected to avoid unwanted absorption of light by the sample; where the narrowband light is configured to illuminate a selected area of the sample, and in response elastically-scattered light is dispersed from the sample; a light collection device configured to collect at least some of the elastically-scattered light; where at least some of the collected elastically-scattered light is configured to be transmitted to a detector by the light collection device, and the detector is configured to record a light scattering signal; and where the detector is configured to perform light scattering signal measurements at multiple angles or wavelengths to determine a refractive index multifractality of the sample.

Systems and methods here may be used for automated capturing and analyzing spectrometer data of multiple sample gemstones on a stage, including mapping digital camera image data of samples, applying a Raman Probe to a first sample gemstone under evaluation on the stage, receiving spectrometer data of the sample gemstone from the probe, automatically moving the stage to a second sample, using the image data, and analyzing the other samples.

A spectrometer includes: a diffraction means that diffracts light being measured which has entered via an entrance unit; a main sensor that receives the light being measured which has been diffracted by the diffraction means; at least one auxiliary sensor disposed in an optical path of a luminous flux that does not reach the main sensor among luminous fluxes that have entered via the entrance unit, the auxiliary sensor receiving the luminous flux; and a correction means that corrects an output value of the main sensor on the basis of an output value of the auxiliary sensor.