A micro electro-mechanical system (MEMS) device is provided. The MEMS device includes: a substrate having a first surface and a second surface and wherein the first surface is exposed to an environment outside the MEMS device; and a MEMS microphone disposed at a first location on the second surface of the substrate and having a diaphragm positioned such that acoustic waves received at the MEMS microphone are incident on the diaphragm. The MEMS device also includes: a first integrated circuit disposed at a second location of the substrate, wherein the first integrated circuit is electrically coupled to the MEMS microphone; and a MEMS measurement device at a third location, wherein the MEMS measurement device comprises a motion sensor and a pressure sensor.

An apparatus comprises an electrically active layer having a first plurality of substantially parallel electrodes and a second plurality of substantially parallel electrodes, wherein the first plurality of electrodes are not parallel to the second plurality of electrodes, such that there exists a matrix of intersection points between the electrodes. A signal generator is configured to generate excitation signals and is connected to the first plurality of electrodes, and a signal detector is configured to detect output signals from the second plurality of electrodes, wherein an output signal from one of the second plurality of electrodes is indicative of the degree of capacitive coupling to one of the first plurality of electrodes on application of an excitation signal thereto. A flexible top layer is sealed to the electrically active layer to define at least one hermetic void between portions of the top layer and portions of the electrically active layer.

Provided are a pressure sensor which exhibits exceptional performance and a method of producing the same. The pressure sensor includes: a silicon substrate having a cavity; a diaphragm which is formed of a metallic glass and has a tensile stress in a range in which a resonant frequency is higher than an audible range; and a counter electrode which is insulated from the diaphragm and has a plurality of holes. The diaphragm and the counter electrode are disposed on the silicon substrate to face each other with a gap therebetween, the diaphragm and the counter electrode being released from the silicon substrate by the cavity.

Provided are a pressure sensor which exhibits exceptional performance and a method of producing the same. The pressure sensor includes: a silicon substrate having a cavity; a diaphragm which is formed of a metallic glass and has a tensile stress in a range in which a resonant frequency is higher than an audible range; and a counter electrode which is insulated from the diaphragm and has a plurality of holes. The diaphragm and the counter electrode are disposed on the silicon substrate to face each other with a gap therebetween, the diaphragm and the counter electrode being released from the silicon substrate by the cavity.

A capacitive pressure sensor for an internal combustion engine is provided having a housing having a bottom surface, variable capacitor and circuitry. The variable capacitor is formed by a stationary electrode and an elastically bendable electrode. Pressure exerted on the bottom surface acts to bend the elastically bendable electrode. This bending alters the capacitance of the variable capacitor. The circuitry is configured to generate a signal based on the variable capacitance of the variable capacitor. This capacitance is representative of the pressure exerted on the bottom surface.

A device for cavitation detection of a pure water hydraulic system based on pressure includes a chamber component; an inner diameter of the drainage nozzle gradually increases along an inflow direction of a liquid medium, so as to reduce a flow velocity of the liquid medium after being drained into the drainage nozzle; and the detection assembly includes a housing, one end of the housing facing the drainage nozzle is an open end, an elastic cover sheet is arranged in the open end, an electrode is arranged in the housing, diaphragms are respectively arranged on two sides of the electrode, and the electrode is closely attached to the elastic cover sheet through one of the diaphragms; the liquid medium is ejected from the drainage nozzle and impacts the elastic cover sheet.