A force feedback actuator includes a pair of electrodes and a dielectric member. The pair of electrodes are spaced apart from one another to form a gap. The dielectric member is disposed at least partially within the gap. The dielectric member includes a first portion having a first permittivity and a second portion having a second permittivity that is different from the first permittivity. The dielectric member and the pair of electrodes are configured for movement relative to each other.

A microphone device comprises a microphone die including a first microphone motor and a second microphone motor, an acoustic integrated circuit structured to process signals produced by the first microphone motor and the second microphone motor, and a sensor die stacked on top of the acoustic integrated circuit, wherein the sensor die comprises a pressure sensor. Another microphone comprises a microphone die including a first microphone motor and a second microphone motor and an integrated circuit die. The integrated circuit die comprises an acoustic integrated circuit structured to process signals produced by the first microphone motor and the second microphone motor, a pressure sensor, and a pressure integrated circuit structured to press signals produced by the pressure sensor.

A micro electro-mechanical system (MEMS) device is provided. The MEMS device includes: a substrate having a first surface and a second surface and wherein the first surface is exposed to an environment outside the MEMS device; and a MEMS microphone disposed at a first location on the second surface of the substrate and having a diaphragm positioned such that acoustic waves received at the MEMS microphone are incident on the diaphragm. The MEMS device also includes: a first integrated circuit disposed at a second location of the substrate, wherein the first integrated circuit is electrically coupled to the MEMS microphone; and a MEMS measurement device at a third location, wherein the MEMS measurement device comprises a motion sensor and a pressure sensor.

An apparatus comprises an electrically active layer having a first plurality of substantially parallel electrodes and a second plurality of substantially parallel electrodes, wherein the first plurality of electrodes are not parallel to the second plurality of electrodes, such that there exists a matrix of intersection points between the electrodes. A signal generator is configured to generate excitation signals and is connected to the first plurality of electrodes, and a signal detector is configured to detect output signals from the second plurality of electrodes, wherein an output signal from one of the second plurality of electrodes is indicative of the degree of capacitive coupling to one of the first plurality of electrodes on application of an excitation signal thereto. A flexible top layer is sealed to the electrically active layer to define at least one hermetic void between portions of the top layer and portions of the electrically active layer.

The invention relates to a method for monitoring the function of a capacitive pressure measuring cell (10) comprising a measuring capacitor (C.sub.M) and a reference capacitor (C.sub.R) as well as a temperature element, wherein in an evaluation unit the pressure measurement value p is obtained by forming the quotient Q from the capacitance values of the reference capacitor (C.sub.R) and the measuring capacitor (C.sub.M). The method is characterized by the following method steps: in a matching procedure the characteristic curve of the quotient Q and the capacitance values of the measuring capacitor (C.sub.M) are each stored in a lookup table versus the pressure and at different temperature scenarios; then the corresponding absolute value of the quotient Q and of the capacitance value of the measuring capacitor (C.sub.M) from the lookup table are continuously assigned respectively to the determined pressure measurement value p at the temperature detected at this moment by the temperature element; the behavior of the course of the two absolute values of the quotient Q as well as of the capacitance value of the measuring capacitor (C.sub.M) is compared with each other; in the case of a significant deviation from an expected behavior, the evaluation unit is temporarily switched into a safety mode and meanwhile the gradient of the temperature element is detected and evaluated; in the case of a significant increase of the gradient of the temperature element, a temperature compensation is initiated; or in the case of an unchanged gradient of the temperature element, an error signal is generated.

A force feedback actuator includes a pair of electrodes and a dielectric member. The pair of electrodes are spaced apart from one another to form a gap. The dielectric member is disposed at least partially within the gap. The dielectric member includes a first portion having a first permittivity and a second portion having a second permittivity that is different from the first permittivity. The dielectric member and the pair of electrodes are configured for movement relative to each other.

Microphones including a housing defining a cavity, a plurality of conductors positioned within the cavity, at least one dielectric bar positioned within the cavity, and a transducer diaphragm. The conductors are structured to move in response to pressure changes while the housing remains fixed. A first conductor generates first electrical signals responsive to the pressure changes resulting from changes in an atmospheric pressure. A second conductor generates second electrical signals responsive to the pressure changes resulting from acoustic activity. The dielectric bar is fixed with respect to the cavity and remains fixed under the pressure changes. The dielectric bar is adjacent to at least one of the conductors. In response to an applied pressure that is an atmospheric pressure and/or an acoustic pressure, the transducer diaphragm exerts a force on the housing and displaces at least a portion of conductors with respect to the dielectric bar.

An apparatus comprises an electrically active layer having a first plurality of substantially parallel electrodes and a second plurality of substantially parallel electrodes, wherein the first plurality of electrodes are not parallel to the second plurality of electrodes, such that there exists a matrix of intersection points between the electrodes. A signal generator is configured to generate excitation signals and is connected to the first plurality of electrodes, and a signal detector is configured to detect output signals from the second plurality of electrodes, wherein an output signal from one of the second plurality of electrodes is indicative of the degree of capacitive coupling to one of the first plurality of electrodes on application of an excitation signal thereto. A flexible top layer is sealed to the electrically active layer to define at least one hermetic void between portions of the top layer and portions of the electrically active layer.

A microphone device comprises a microphone die including a microphone motor, an acoustic integrated circuit structured to process signals produced by the microphone motor, and a sensor die stacked on top of the acoustic integrated circuit, wherein the sensor die comprises a pressure sensor. Another microphone comprises a microphone die including a microphone motor and an integrated circuit die. The integrated circuit die comprises an acoustic integrated circuit structured to process signals produced by the microphone motor, a pressure sensor, and a pressure integrated circuit structured to press signals produced by the pressure sensor.

A microphone device comprises a microphone die including a microphone motor, an acoustic integrated circuit structured to process signals produced by the microphone motor, and a sensor die stacked on top of the acoustic integrated circuit, wherein the sensor die comprises a pressure sensor. Another microphone comprises a microphone die including a microphone motor and an integrated circuit die. The integrated circuit die comprises an acoustic integrated circuit structured to process signals produced by the microphone motor, a pressure sensor, and a pressure integrated circuit structured to press signals produced by the pressure sensor.