In order to produce accurate sensor element in a simple way, the invention provides a method for producing a sensor element (10) for a pressure or force sensor, comprising the steps:

a) providing a component (13) to be deformed,

c) applying to the component (13) a sensor function and contact layer (24) consisting of a material with a k-factor between 2 and 10,

d) planar ablation of the material of the sensor function and contact layer (24) by means of a laser, in such a manner that strain gauges (44) with a resistance structure with a meandering shape and contact pads (46.1, 46.2, 46.3, 46.4) remain standing,

wherein, for ablating the material, laser pulses from the group of laser pulses comprising:

laser pulses in the sub-ps range,

laser pulses from a broadband laser source (28) with a wavelength bandwidth of 10 nm to 70 nm

laser pulses from a broadband laser source (28) with a fundamental wavelength and a wavelength bandwidth of at least 1%, preferably at least 2%, most preferably at least 3% of the fundamental wavelength,

laser pulses compressed by a pulse compression process, and

laser pulses conducted through a hollow-core fiber.

are used.

In order to produce accurate sensor element in a simple way, the invention provides a method for producing a sensor element (10) for a pressure or force sensor, comprising the steps:

a) providing a component (13) to be deformed,

c) applying to the component (13) a sensor function and contact layer (24) consisting of a material with a k-factor between 2 and 10,

d) planar ablation of the material of the sensor function and contact layer (24) by means of a laser, in such a manner that strain gauges (44) with a resistance structure with a meandering shape and contact pads (46.1, 46.2, 46.3, 46.4) remain standing,

wherein, for ablating the material, laser pulses from the group of laser pulses comprising:

laser pulses in the sub-ps range,

laser pulses from a broadband laser source (28) with a wavelength bandwidth of 10 nm to 70 nm

laser pulses from a broadband laser source (28) with a fundamental wavelength and a wavelength bandwidth of at least 1%, preferably at least 2%, most preferably at least 3% of the fundamental wavelength,

laser pulses compressed by a pulse compression process, and

laser pulses conducted through a hollow-core fiber.

are used.

A pressure sensor which detects a combustion pressure of an engine includes: a contact part which is in direct or indirect contact with a casing of the engine when the pressure sensor is attached to the engine; and a pressure detection unit which detects the combustion pressure and outputs a signal corresponding to the combustion pressure, wherein the pressure detection unit includes a pressure detection element which detects the combustion pressure and outputs a signal, and a circuit unit which converts the signal obtained from the pressure detection element into a signal corresponding to the combustion pressure, and the pressure detection unit is provided at a location positioned more inside the engine than the contact part when the pressure sensor is attached to the engine.

A pressure sensor which detects a combustion pressure of an engine includes: a contact part which is in direct or indirect contact with a casing of the engine when the pressure sensor is attached to the engine; and a pressure detection unit which detects the combustion pressure and outputs a signal corresponding to the combustion pressure, wherein the pressure detection unit includes a pressure detection element which detects the combustion pressure and outputs a signal, and a circuit unit which converts the signal obtained from the pressure detection element into a signal corresponding to the combustion pressure, and the pressure detection unit is provided at a location positioned more inside the engine than the contact part when the pressure sensor is attached to the engine.

A pulse wave sensor unit includes a pressure sensor, and an adhesive tape to attach the pressure sensor to a measurement portion to be measured. The pressure sensor includes a diaphragm part, and an annular support part which supports the diaphragm part and has an aperture for allowing the diaphragm part to face the measurement portion, and a closed space is able to be formed between the diaphragm part and the measurement portion by attaching the pressure sensor to the measurement portion using the adhesive tape.

A support (17) for an electronic module (7) for generating a signal, this module being intended to be inserted into a sensor (1) for measuring the pressure of the gases contained in a vehicle cylinder, the support (17) including a portion (19) for receiving the electronic module (7) and elements (25) for retaining the electronic module (7) on the receiving portion (19), the electronic module (7) including a body (8), the receiving portion (19) including elements (31a, 31b) for attaching the retaining elements (25), and the retaining elements (25) being configured to pivot between an open position (PO) in which the electronic module (7) can be placed on the receiving portion (19) and a closed position in which the retaining elements (25) are attached to the attachment elements (31a, 31b) in order to retain the body (8) of the electronic module (7) on the support (17).

A cylinder liner for an internal combustion engine is formed of cylindrical liner body having an interior cavity with a cylindrical inner surface, a sensor embedded in the cylindrical liner body and being configured for sensing a physical condition on the cylindrical inner surface, and a transmitter connected to the cylindrical liner body at a position remote from the sensor. A connecting wire connects the transmitter to the sensor, and is embedded in in the cylindrical liner body. The sensor is located in an upper portion of the cylindrical liner body and the transmitter is located directly below the sensor, such that the wire runs vertically. The transmitter can send information obtained by the sensor to a remote processor for calculating various operating states of the liner.

A pressure sensor has a stem in which a pressure introduction hole into which a pressure medium is introduced and a diaphragm deformable according to the pressure of the pressure medium are formed, and a strain detecting element which is arranged on the diaphragm via an insulating film and being configured to output a detection signal according to the deformation of the diaphragm. The strain detecting element is configured to have a portion made of polysilicon. A low doping layer having a higher electrical resistivity than polysilicon and a higher crystallinity than the insulating film is arranged between the insulating film and the strain detecting element.

A pulse wave sensor unit includes a pressure sensor, and an adhesive tape to attach the pressure sensor to a measurement portion to be measured. The pressure sensor includes a diaphragm part, and an annular support part which supports the diaphragm part and has an aperture for allowing the diaphragm part to face the measurement portion, and a closed space is able to be formed between the diaphragm part and the measurement portion by attaching the pressure sensor to the measurement portion using the adhesive tape.

A pulse wave sensor unit includes a pressure sensor, and an adhesive tape to attach the pressure sensor to a measurement portion to be measured. The pressure sensor includes a diaphragm part, and an annular support part which supports the diaphragm part and has an aperture for allowing the diaphragm part to face the measurement portion, and a closed space is able to be formed between the diaphragm part and the measurement portion by attaching the pressure sensor to the measurement portion using the adhesive tape.