Patent classifications
G
G01
G01L
7/00
G01L7/18
G01L7/24
G01L7/24
Microfabricated pressure transducer
A microfabricated pressure transducer is formed in a multilayer substrate by etching a plurality of shallow and deep wells into the layers, and then joining these wells with voids formed by anisotropic etching. The voids define a flexible membrane over the substrate which deforms when a force is applied.