Patent classifications
G01L9/0058
PRESSURE TRANSDUCER AND METHOD FOR FABRICATING THE SAME
A pressure transducer comprises a housing including a body section and at least one end cap at one end of the body section, which are made of piezoelectric crystal, and a piezoelectric resonator in the housing. The body section and the end cap are bonded by an atomic diffusion bonding method.
Deformable pressure sensor and methods of use thereof
A deformable differential semiconductor sensor system of pressure and/or compressive displacement is provided. The pressure sensor system includes a deformable and elastic rubber substrate, first and second carbon nanotubes conductive layers, metal free phthalocyanine-carbon nanotubes composite semiconductive layers, first and second terminals on the carbon nanotubes conductive layers and a rubber cover for receiving inputs. The conductive and semiconductive layers of the sensor system are embedded in deformable substrates by using rubbing-in technology.
MEMBRANE DEVICE WITH LAYER STRUCTURE
A membrane device/membrane having a flexible membrane section. A first side of the membrane section is exposed to a process medium and a second side has a layer structure, which includes at least a first layer and a second layer. The first layer has a coefficient of thermal expansion, the value of which lies between the values of the coefficients of thermal expansion of the membrane section and the second layer. The second layer, with respect to the process medium or a component of the process medium has a permeability that is lower than the corresponding permeability of the membrane section. A pressure transmitter and a pressure sensor comprising such a membrane device is provided, as well as a use for a membrane device.
ELECTRONIC DEVICE FOR PRESSURE SENSORS
A device comprising: a stack of layers defining an array of transistors, wherein the stack of layers includes a surface conductor pattern defining (i) an array of gate conductors each providing the gate electrodes for a respective column of transistors, and (ii) an array of pixel conductors, each pixel conductor associated with a respective transistor, and connected via a semiconductor channel of the respective transistor to one of an array of row conductors, each row conductor associated with a respective row of transistors; wherein each gate conductor is configured to extend substantially completely around the pixel conductors of the respective column of transistors associated with the gate conductor.
MEMS strain gauge pressure sensor with mechanical symmetries
A microelectromechanical system (MEMS) strain gauge pressure sensor includes a top wafer stack having a top surface and a first cavity that is configured to receive a first fluid at a first pressure, a backing wafer having a bottom surface opposite the top surface of the top wafer stack; a diaphragm wafer positioned between the top wafer stack and the backing wafer and having a second cavity that is configured to receive a second fluid at a second pressure, and a pedestal connected laterally to the top wafer stack, the backing wafer, and the diaphragm wafer. The diaphragm wafer includes a diaphragm extending between the first cavity and the second cavity, and a resistor positioned on the diaphragm. The MEMS strain gauge pressure sensor has a central axis such that the MEMS strain gauge pressure sensor has mechanical symmetries about the central axis.
Pressure transducer and method for fabricating the same
A pressure transducer comprises a housing including a body section and at least one end cap at one end of the body section, which are made of piezoelectric crystal, and a piezoelectric resonator in the housing. The body section and the end cap are bonded by an atomic diffusion bonding method.
Multi-angle pressure sensor
A pressure sensor able to value touch pressures at oblique angles includes a substrate base, a deformable substrate disposed on the substrate base, and a carbon nanometer layer disposed on the deformable substrate. A cover plate is disposed on the carbon nanometer layer, and two flexible power circuit boards electrically connect the carbon nanometer layer to the substrate base. The device includes a processor. The substrate base includes a substrate and a pad. The pad is located between the substrate and the deformable substrate. The deformable substrate and the cover plate are made of elastic materials. The processor calculates lateral pressures based on the resistance variation value due to the vertical deformation of the carbon nanometer layer and the capacitance variation value between the carbon nanometer layer and the pads when an external physical resistance is experienced as a force applied to the cover plate.
Sensor module and method for producing sensor module
A detector is provided by coating a fluid conductive material on a flat portion of a diaphragm. The detector includes: a resistor element; resistor element electrodes, which are overlapped and connected with mutually opposed parts of the resistor element; and a linear conductor connected with the resistor element electrodes. The resistor element electrodes each include: a linear portion having a linear inner side facing an inner side of paired one of the resistor element electrodes; and peripheral portions defined at both ends of the linear portion, at least one of the peripheral portions being connected with the linear conductor. All of the linear portions are arranged so that inner sides are arranged mutually in parallel. The resistor element is connected with the linear portion. The peripheral portions are exposed without being connected with the resistor element.
PRESSURE SENSING POLYMER
This invention describes a novel, superior pressure sensor, pressure sensing device, or pressure sensing system. This can act as a pressure sensor, device, or system for a fingertip-like tactile sensor or skin, comprising hydrophilic monomer(s), cross-linked with appropriate cross-linking agent(s), with appropriate solvent(s) or diluent(s), electrolyte(s), electrodes, and coating(s). This sensor is extremely sensitive, yet is also robust and has a wide pressure range. The sensor can be made in a variety of shapes and sizes as desired. The sensor can be used for a wide range of applications, from robotic grippers and prosthetic fingers and hands to health and medical monitoring and sports equipment, and other pressure sensing applications.
Membrane device with layer structure
A membrane device/membrane having a flexible membrane section. A first side of the membrane section is exposed to a process medium and a second side has a layer structure, which includes at least a first layer and a second layer. The first layer has a coefficient of thermal expansion, the value of which lies between the values of the coefficients of thermal expansion of the membrane section and the second layer. The second layer, with respect to the process medium or a component of the process medium has a permeability that is lower than the corresponding permeability of the membrane section. A pressure transmitter and a pressure sensor comprising such a membrane device is provided, as well as a use for a membrane device.