A sensor includes a detector including an element substrate, a membrane including an outer surface, an inner surface on an opposite side of the outer surface, and a diaphragm, a side wall provided on the element substrate and supporting a portion of the inner surface of the membrane outside the diaphragm, and a fixed electrode provided on the element substrate and surrounded by the side wall, facing the inner surface of the membrane with a space therebetween and having an electrostatic capacitance between the fixed electrode and the diaphragm. A first recess portion is provided in the outer surface of the membrane between the center of the diaphragm and the side wall in the thickness direction of the membrane.

A pressure measuring sensor having a ceramic pressure sensor includes a temperature transducer to provide a thermovoltage dependent on a temperature gradient. The temperature transducer includes two series-connected thermoelements, each of which has a galvanic contact between a wire of the thermoelement and a connecting conductor connecting the galvanic contacts of the two thermoelements to one another. The temperature transducer enables the compensation for a measuring error caused by a temperature gradient occurring along the pressure measuring sensor.

Pressure sensors having ring-tensioned membranes are disclosed. A tensioning ring is bonded to a membrane in a manner that results in the tensioning ring applying a tensile force to the membrane, flattening the membrane and reducing or eliminating defects that may have occurred during production. The membrane is bonded to the sensor housing at a point outside the tensioning ring, preventing the process of bonding the membrane to the housing from introducing defects into the tensioned portion of the membrane. A dielectric may be introduced into the gap between the membrane and the counter electrode in a capacitive pressure sensor, resulting in an improved dynamic range.

A ceramic pressure sensor is described which is produced using an alternative production method and has a ceramic base body, a ceramic measuring membrane which is disposed on the base body and is to be charged with a pressure to be measured, and a pressure measuring chamber enclosed in the base body below the measuring membrane. A method to produce the pressure sensor by means of which, in particular, more complex shapes of the measuring membrane and/or the base body are producible with minimal pores wherein the base body and/or the measuring membrane have layers applied on each other in a 3-D printing method and produced by the selective laser melting of nanopowder layers.

A pressure measurement cell is disclosed including a base body, substantially cylindrical at least in sections, a measuring membrane joined to the base body in a pressure-tight manner along a perimeter joint to form a measurement chamber between the base body and the measuring membrane, and a joining material that joins the perimeter joint between the base body and the measuring membrane. The base body and/or the measuring membrane have/has a stepped recess into which the joining material is at least partially disposed, the stepped recess structured to yield a minimum distance between the base body and the measuring membrane.

Arrangement with capacitive pressure-measuring cell has a diaphragm for measuring vacuum pressure and a printed circuit board acting as a temperature sensor and another electronic component designed as a microchip that contains a digital signal processor with a temperature-to-digital converter and a capacitance-to-digital converter using a time measuring method. The converters determine temperature and capacitance of the cell in comparison to a reference resistor for temperature arranged on the printed circuit board and reference capacitor for capacitance for the pressure to be measured dependent on deformation of the diaphragm. A temperature-corrected pressure signal derived from the two measured signals uses correlation, the measured signals having been determined in advance from a calibration process, and the temperature-corrected pressure signal is provided as a pressure signal at the signal output for further processing. In this manner there is quick pressure measurement with high measuring accuracy.

Pressure sensors having ring-tensioned membranes are disclosed. A tensioning ring is bonded to a membrane in a manner that results in the tensioning ring applying a tensile force to the membrane, flattening the membrane and reducing or eliminating defects that may have occurred during production. The membrane is bonded to the sensor housing at a point outside the tensioning ring, preventing the process of bonding the membrane to the housing from introducing defects into the tensioned portion of the membrane. A dielectric may be introduced into the gap between the membrane and the counter electrode in a capacitive pressure sensor, resulting in an improved dynamic range.

A method for manufacturing a pressure measuring cell, which has a ceramic platform and a ceramic measuring membrane, wherein the measuring membrane is joined with the platform pressure tightly by an active hard solder, or braze, wherein the method includes: providing the platform, the measuring membrane and the active hard solder, or braze, positioning the active hard solder, or braze, between the platform and the measuring membrane; melting the active hard solder, or braze, by irradiating the active hard solder, or braze, by a laser, wherein the irradiating of the active hard solder, or braze, occurs through the measuring membrane; and letting the active hard solder, or braze, solidify by cooling.

A sensor for detecting pressure, filling level, density, temperature, mass and/or flow rate, wherein at least one central sensor component is coupled to a further component by nanowires and wherein the sensor component is stiffened, fixed and/or electrically contacted this way.

Shaped body, in particular for a pressure sensor, having a membrane and having a supporting section supporting the membrane, the membrane being produced at least in sections from a ceramic material by means of additive manufacturing, in particular 3D screen printing, and the greatest possible distance between two points lying on the outer circumference of the membrane (12) is less than 20 mm.