To improve the output signal quality of a load measurement by means of active magnetization, the invention provides a load measurement method for measuring a mechanical load on a test object (14), comprising: a) generating and applying a magnetic field to the test object (14); b) detecting a magnetic field changed by the test object (14) as a result of a mechanical load on the test object (14) by means of a first magnetic field detection device (20) to generate a first measurement signal (U1, UAB), c) detecting a magnetic field changed by the test object (14) as a result of a mechanical load on the test object (14) by means of a second magnetic field detection device (22) to generate a second measurement signal (U1, UAB), d) computationally determining a third measurement signal (UBT) from the first measurement signal (U1, UAB) and the second measurement signal (U2, UAT), and preferably comprising the steps of e) forming a difference from one (U2, UAT) of the first and the second measurement signals and the computationally determined third measurement signal (UBT) to produce an output signal, f) determining the mechanical load applied to the test object (14) based on the output signal. The invention also provides a corresponding load measurement device for carrying out the load measurement method.

To improve the output signal quality of a load measurement by means of active magnetization, the invention provides a load measurement method for measuring a mechanical load on a test object (14), comprising: a) generating and applying a magnetic field to the test object (14); b) detecting a magnetic field changed by the test object (14) as a result of a mechanical load on the test object (14) by means of a first magnetic field detection device (20) to generate a first measurement signal (U1, UAB), c) detecting a magnetic field changed by the test object (14) as a result of a mechanical load on the test object (14) by means of a second magnetic field detection device (22) to generate a second measurement signal (U1, UAB), d) computationally determining a third measurement signal (UBT) from the first measurement signal (U1, UAB) and the second measurement signal (U2, UAT), and preferably comprising the steps of e) forming a difference from one (U2, UAT) of the first and the second measurement signals and the computationally determined third measurement signal (UBT) to produce an output signal, f) determining the mechanical load applied to the test object (14) based on the output signal. The invention also provides a corresponding load measurement device for carrying out the load measurement method.

The present disclosure enables measurement with satisfactory sensitivity in a low pressure range, and thus accurate measurement in a wider pressure range, by providing a pressure sensor that includes a diaphragm layer and a pressure receiving region formed in the diaphragm layer. In addition, the pressure sensor includes a first piezostrictive element, a second piezostrictive element, a third piezostrictive element, and a fourth piezostrictive element. In addition, the pressure sensor includes a first magnetostrictive element, a second magnetostrictive element, a third magnetostrictive element, and a fourth magnetostrictive element.

A method of manufacturing a pressure sensor comprises: above a film portion formed on one surface of a substrate, depositing a first magnetic layer, a second magnetic layer and an intermediate layer between the first and second magnetic layers on one surface of a substrate; removing the deposited layers leaving a part thereof; and removing a part of the substrate from another surface of the substrate. By removing the deposited layers leaving a part thereof, a strain detecting element is formed in a part of a first region, the strain detecting element comprising the first magnetic layer, the second magnetic layer and the intermediate layer. By removing a part of the substrate, a part of the first region of the substrate is removed. In addition, the deposition of the first magnetic layer is performed with the substrate being bended.

A method of manufacturing a pressure sensor comprises: above a film portion formed on one surface of a substrate, depositing a first magnetic layer, a second magnetic layer and an intermediate layer between the first and second magnetic layers on one surface of a substrate; removing the deposited layers leaving a part thereof; and removing a part of the substrate from another surface of the substrate. By removing the deposited layers leaving a part thereof, a strain detecting element is formed in a part of a first region, the strain detecting element comprising the first magnetic layer, the second magnetic layer and the intermediate layer. By removing a part of the substrate, a part of the first region of the substrate is removed. In addition, the deposition of the first magnetic layer is performed with the substrate being bended.

Systems and methods are presented for cancelling noise from sensed magnetostriction-based strain measurements. A drive signal corresponds to a drive coil, and a sensed signal corresponds to a sensed coil. The drive signal is used to at least partially eliminate noise similar to the drive signal from the sensed signal to generate an output signal.

According to one embodiment, a pressure sensor includes a support, a film unit supported by the support, having an upper surface, and capable of being deformed, and a first sensing element provided on the upper surface. The first sensing element includes a first magnetic layer, a second magnetic layer provided apart from the first magnetic layer and a first intermediate unit including a first intermediate layer including a portion provided between the first and second magnetic layers. The first magnetic layer extends in a first direction parallel to the upper surface, and a first major axis length of the first magnetic layer is longer than a first minor axis length. The second magnetic layer extends in a second direction parallel to the upper surface and crossing the first direction, and a second major axis length of the second magnetic layer is longer than a second minor axis length.

According to one embodiment, a pressure sensor includes a support, a film unit supported by the support, having an upper surface, and capable of being deformed, and a first sensing element provided on the upper surface. The first sensing element includes a first magnetic layer, a second magnetic layer provided apart from the first magnetic layer and a first intermediate unit including a first intermediate layer including a portion provided between the first and second magnetic layers. The first magnetic layer extends in a first direction parallel to the upper surface, and a first major axis length of the first magnetic layer is longer than a first minor axis length. The second magnetic layer extends in a second direction parallel to the upper surface and crossing the first direction, and a second major axis length of the second magnetic layer is longer than a second minor axis length.

A blood-pressure sensor includes a substrate, a first electrode, a magnetization fixed layer, a nonmagnetic layer, a magnetization free layer, and a second electrode. The substrate is bent to generate a tensile stress at least in a first direction. The first electrode is provided on the substrate. The magnetization fixed layer has magnetization to be fixed in a second direction, and is provided on the substrate. The nonmagnetic layer is provided on the magnetization fixed layer. The magnetization free layer has a magnetization direction which is different from the first direction and from a direction perpendicular to the first direction. The second electrode is provided on the magnetization free layer.

A blood-pressure sensor includes a substrate, a first electrode, a magnetization fixed layer, a nonmagnetic layer, a magnetization free layer, and a second electrode. The substrate is bent to generate a tensile stress at least in a first direction. The first electrode is provided on the substrate. The magnetization fixed layer has magnetization to be fixed in a second direction, and is provided on the substrate. The nonmagnetic layer is provided on the magnetization fixed layer. The magnetization free layer has a magnetization direction which is different from the first direction and from a direction perpendicular to the first direction. The second electrode is provided on the magnetization free layer.