Aspects and techniques of the present disclosure relate to a process of evaluating a pressurized fluid system including an automatic bleed valve arrangement therein for undesirable air leakage by diagnostically operating the automatic bleed valve arrangement. The disclosure also relates to methods of evaluating air presence in a pressurized fluid system sufficient to warrant bleed valve operation. Further, apparatus and features thereof are characterized.

Aspects and techniques of the present disclosure relate to a process of evaluating a pressurized fluid system including an automatic bleed valve arrangement therein for undesirable air leakage by diagnostically operating the automatic bleed valve arrangement. The disclosure also relates to methods of evaluating air presence in a pressurized fluid system sufficient to warrant bleed valve operation. Further, apparatus and features thereof are characterized.

Provided is a soldering apparatus including: a furnace body including a processing chamber in which boards are processed; a gasket provided at least to a part of the furnace body, and configured to seal the furnace body; a sealed space isolated from the processing chamber, and defined by the furnace body and the gasket; a gas supply apparatus configured to supply a first gas into the sealed space; and a measuring apparatus configured to measure one of pressure in the sealed space and concentration of a second gas in the sealed space.

Provided is a soldering apparatus including: a furnace body including a processing chamber in which boards are processed; a gasket provided at least to a part of the furnace body, and configured to seal the furnace body; a sealed space isolated from the processing chamber, and defined by the furnace body and the gasket; a gas supply apparatus configured to supply a first gas into the sealed space; and a measuring apparatus configured to measure one of pressure in the sealed space and concentration of a second gas in the sealed space.

A method for detecting a gas tightness of a furnace tube device includes: providing a test wafer; conveying the test wafer into the furnace tube device; depositing a dielectric layer on the test wafer; measuring a thickness and a Goodness of Fit (GOF) of the dielectric layer formed on the test wafer by a thickness measuring machine; and judging the gas tightness of the furnace tube device according to the GOF.

A method for detecting a gas tightness of a furnace tube device includes: providing a test wafer; conveying the test wafer into the furnace tube device; depositing a dielectric layer on the test wafer; measuring a thickness and a Goodness of Fit (GOF) of the dielectric layer formed on the test wafer by a thickness measuring machine; and judging the gas tightness of the furnace tube device according to the GOF.

A method for detecting a gas tightness of a furnace tube device includes: providing a test wafer; conveying the test wafer into the furnace tube device; depositing a dielectric layer on the test wafer; measuring a thickness and a Goodness of Fit (GOF) of the dielectric layer formed on the test wafer by a thickness measuring machine; and judging the gas tightness of the furnace tube device according to the GOF.

A method for detecting a gas tightness of a furnace tube device includes: providing a test wafer; conveying the test wafer into the furnace tube device; depositing a dielectric layer on the test wafer; measuring a thickness and a Goodness of Fit (GOF) of the dielectric layer formed on the test wafer by a thickness measuring machine; and judging the gas tightness of the furnace tube device according to the GOF.

Aspects and techniques of the present disclosure relate to a process of evaluating a pressurized fluid system including an automatic bleed valve arrangement therein for undesirable air leakage by diagnostically operating the automatic bleed valve arrangement. The disclosure also relates to methods of evaluating air presence in a pressurized fluid system sufficient to warrant bleed valve operation. Further, apparatus and features thereof are characterized.

Aspects and techniques of the present disclosure relate to a process of evaluating a pressurized fluid system including an automatic bleed valve arrangement therein for undesirable air leakage by diagnostically operating the automatic bleed valve arrangement. The disclosure also relates to methods of evaluating air presence in a pressurized fluid system sufficient to warrant bleed valve operation. Further, apparatus and features thereof are characterized.