An object transfer function for a sample object is determined on the basis of a reference measurement. Subsequently, an optimization is carried out in order to find an optimized illumination geometry on the basis of the object transfer function and an optical transfer function for an optical unit.

An optical fiber splitter device comprising at least two optical fibers of different lengths is disclosed for partial or complete compensation of the optical path difference between waves interfering to generate a hologram or an interferogram. Various implementations of this fiber splitter device are described in apparatuses for holographic and interferometric imaging of microscopic and larger samples.

An X-ray phase contrast imaging system includes an X-ray source, a detector, a plurality of gratings including a first grating and a second grating, and a grating positional displacement acquisition section configured to obtain a positional displacement of the grating based on a Fourier transform image obtained by Fourier transforming an interference fringe image detected by the detector.

An object transfer function (201) for a sample object is determined on the basis of a reference measurement. Subsequently, an optimization (250) is carried out in order to find an optimized illumination geometry on the basis of the object transfer function and an optical transfer function (202) for an optical unit.

A method of evaluating an insulated-gate semiconductor device having an insulated-gate structure including a channel formation layer made of a wide-bandgap semiconductor and a gate insulating film formed contacting the channel formation layer includes removing the gate insulating film in order to expose a surface of the channel formation layer; taking a phase image of the exposed surface of the channel formation layer using a phase mode of an atomic force microscope; evaluating a surface condition of the exposed surface of the channel formation layer by calculating an evaluation metric from phase shift values in the phase image and by determining whether the evaluation metric satisfies a prescribed condition; and determining that the insulated-gate semiconductor device is acceptable when the evaluation metric satisfied the prescribed condition.

A microscope, a method, and a system are provided. A system includes a first optical system, a second optical system, and one or more processors. The first optical system is configured to generate an optical phase signal associated with a first image of a sample in a first field of view. The second optical system is configured to generate a polarized signal associated with a second image of the sample in a second field of view. The one or more processors is configured to generate a co-registered phase and polarization information map based on the optical phase signal and the polarized signal. The first field of view is the same as the second field of view. The first image and the second image are captured sequentially.

[Object] To obtain interference light having a stronger light intensity, and to more accurately measure a refractive index of a measured object, with a simplified configuration. [Solution Means] A light measurement device 100 includes a phase adjustment unit 120 and a detector 140. The phase adjustment unit 120 outputs reference light E(R) based on object light E1 being light to be obtained by transmission or reflection of light E from a light source with respect to a measured object 200, and signal light E(S) whose phase is adjusted to be different from a phase of signal light. The detector 140 derives a transmission or reflection light intensity distribution or a refractive index of the measured object 200, based on interference light E2 between signal light E(S) and reference light E(R) to be output by the phase adjustment unit 120. An optical axis of light E from a light source is linearly disposed. The phase adjustment unit 120 and the detector 140 are disposed on the optical axis of light E from a light source.

An optical fiber splitter device comprising at least two optical fibers of different lengths is disclosed for partial or complete compensation of the optical path difference between waves interfering to generate a hologram or an interferogram. Various implementations of this fiber splitter device are described in apparatuses for holographic and interferometric imaging of microscopic and larger samples.

A method of evaluating an insulated-gate semiconductor device having an insulated-gate structure including a channel formation layer made of a wide-bandgap semiconductor and a gate insulating film formed contacting the channel formation layer includes removing the gate insulating film in order to expose a surface of the channel formation layer; taking a phase image of the exposed surface of the channel formation layer using a phase mode of an atomic force microscope; evaluating a surface condition of the exposed surface of the channel formation layer by calculating an evaluation metric from phase shift values in the phase image and by determining whether the evaluation metric satisfies a prescribed condition; and determining that the insulated-gate semiconductor device is acceptable when the evaluation metric satisfied the prescribed condition.

An X-ray phase contrast imaging system includes an X-ray source, a detector, a plurality of gratings including a first grating and a second grating, and a grating positional displacement acquisition section configured to obtain a positional displacement of the grating based on a Fourier transform image obtained by Fourier transforming an interference fringe image detected by the detector.