Patent classifications
G01N2021/646
SELECTIVE MARKING OF A SUBSTRATE WITH FLUORESCENT PROBES HAVING A SMALL FORM FACTOR
A photoluminescent material can be applied to part of a substrate as part of substrate inspection. The photoluminescent material includes a conjugated polymer having a coiled macroscopic molecular shape and a meta-linkage or an ortho-linkage. The substrate is imaged using an inspection system. The conjugated polymer can be, for example, poly(m-phenylene ethynylene) (PPE) or poly(para-phenylene vinylene) (PPV).
Optical sensor for surface inspection and metrology
An optical system configured to measure a raised or receded surface feature on a surface of a sample may comprise a broadband light source; a tunable filter configured to filter broadband light emitted from the broadband light source and to generate a first light beam at a selected wavelength; a linewidth control element configured to receive the first light beam and to generate a second light beam having a predefined linewidth and a predetermined coherence length; collimating optics optically coupled to the second light beam and configured to collimate the second light beam; collinearizing optics optically coupled to the collimating optics and configured to align the collimated second light beam onto the raised or receded surface feature of the sample, and a processor system and at least one digital imager configured to measure a height of the raised surface or depth of the receded surface from light reflected at least from those surfaces.
Inspection apparatus and inspection method
An inspection apparatus is an inspection apparatus includes an excitation light source that generates excitation light to irradiate the object, a dichroic mirror that separates fluorescence from the sample by transmitting or reflecting the fluorescence according to a wavelength, a camera that images fluorescence reflected by the dichroic mirror, a camera that images fluorescence transmitted through the dichroic mirror, and a control apparatus that derives color irregularity information of a light-emitting element based on a first fluorescence image acquired by the camera and a second fluorescence image acquired by the camera, and an edge shift width corresponding to a width of a wavelength band in which transmittance and reflectance change according to a change in wavelength in the dichroic mirror is wider than a full width at half maximum of a normal fluorescence spectrum of the light-emitting element.
FACET REGION DETECTION METHOD AND WAFER GENERATION METHOD
A facet region detection method includes a first irradiation step and a second irradiation step in which a first surface and a second surface, respectively, of an ingot are irradiated with light, and a first fluorescence detection step and a second fluorescence detection step in which distribution of the number of photons of fluorescence in the first surface and the second surface, respectively, is obtained. The facet region detection method further includes a first determination step and a second determination step in which a facet region and a non-facet region are determined in the first surface and the second surface on a basis of the number of photons of the fluorescence, and a calculation step in which an estimated position of a facet region inside the ingot is calculated based on the facet region in the first surface and the facet region in the second surface.
OPTICAL SENSOR FOR SURFACE INSPECTION AND METROLOGY
An optical system configured to measure a raised or receded surface feature on a surface of a sample may comprise a broadband light source; a tunable filter configured to filter broadband light emitted from the broadband light source and to generate a first light beam at a selected wavelength; a linewidth control element configured to receive the first light beam and to generate a second light beam having a predefined linewidth and a predetermined coherence length; collimating optics optically coupled to the second light beam and configured to collimate the second light beam; collinearizing optics optically coupled to the collimating optics and configured to align the collimated second light beam onto the raised or receded surface feature of the sample, and a processor system and at least one digital imager configured to measure a height of the raised surface or depth of the receded surface from light reflected at least from those surfaces.
INSPECTION SYSTEM FOR OPTICAL SURFACE INSPECTION OF A TEST SPECIMEN
An inspection system for optical surface inspection of a test specimen having a fluorescent agent arranged on the test specimen includes an illumination system, an optical detection system, and a detection filer system. The illumination system is for illuminating the test specimen and the fluorescent agent with illuminating radiation, and includes one or more illuminating means. The optical detection system is for detecting fluorescent radiation emitted by the test specimen with the fluorescent agent. The detection filter system is set up to filter illumination radiation of the illumination system in the inspection system in such a way that the optical detection system only detects fluorescence radiation from the fluorescence agent.
RARE EARTH COMPLEX-CONTAINING COMPOSITION AND FLUORESCENT PENETRANT INSPECTION METHOD USING SAME
The present embodiment provides a composition containing a rare earth complex and a fluorine-based solvent, which can also be used in a fluorescent flaw inspection method. A rare earth complex-containing composition according to the present embodiment is a rare earth complex-containing composition that contains a rare earth complex containing: a rare earth ion; two or more phosphine oxide ligands having different structures; and a β-diketone ligand, the rare earth complex being dissolved in a fluorine-based solvent. The present embodiment also relates to a fluorescent flaw inspection method using the same.
Systems and methods for inspecting solar modules using high-power light sources
Embodiments of the present disclosure are directed to systems and methods for inspecting solar modules, and in particular systems and methods incorporating high-power light sources to impart ultraviolet fluorescence of solar modules. The systems and methods can include a filter and/or a camera.
Optical structural health monitoring
A method, system and devices for optical structural health monitoring that implements digital image correlation (DIC) by applying an invisible pattern comprising a random dot pattern and/or codes, which is applied using a coating containing a dye or substance that is not visible during the normal lighting conditions. The structure is imaged at different time intervals by capturing images of the pattern and codes using a camera and suitable light source. The captured images of the pattern and codes are stored in a CAD file that represents the structure or part to which the pattern and codes are applied, and includes the locations of the pattern and codes. Comparative measurements of the pattern and codes (e.g., using DIC) determine one or more structural health parameters, such as strain, deformation, and other stresses or averse conditions that may be detected from one interval to another (e.g., between measurements).
RESIN COMPOSITION QUALITY CONTROLLING METHOD, CABLE AND TUBE QUALITY CONTROLLING METHOD, DETERMINATION DEVICE, INSPECTION SYSTEM, AND CABLE AND TUBE
A resin composition quality controlling method includes a step of measuring a Raman spectrum of a resin composition composed of TiO.sub.2 particles dispersed in a base material mainly composed of a silicone rubber by irradiating the resin composition with laser, and a step of determining a concentration of the TiO.sub.2 particles in the resin composition based on an intensity of a fluorescence spectrum in the Raman spectrum.