A method and an LWIR imaging system for detecting an amorphous and/or crystalline structure of phosphate and/or sulphate salts on the surface of a substrate or within a substrate are described. The method comprises the steps of i) providing an LWIR imaging system, the LWIR imaging system comprising a) an infrared light emitting source (A) that emits over the whole range of 8 to 14 micrometers, b) an LWIR detecting device (B) and c) a ToF distance sensor (C), ii) providing a substrate comprising an amorphous and/or crystalline structure of phosphate and/or sulphate salts on the surface of the substrate or within the substrate, ii) irradiating the provided substrate with the infrared light emitting source and iii) detecting, with the LWIR detecting device and using and/or based on the TOF distance sensor, the intensity of electromagnetic radiation scattered, emitted and/or reflected by the substrate and the amorphous and/or crystalline structure of phosphate and/or sulphate salts.

Systems, indicator wipe product, and methods thereof used to detect the presence of cationic polymer residues on a surface are described. In various embodiments, the cationic polymer to be detected comprises a quaternary silane residual antimicrobial. The indicator wipe may comprise a woven, nonwoven, or double-knit fabric, cotton, functional cellulose, or open cell foam material substrate impregnated with an aqueous dye solution comprising a sulfonephthalein dye. The indicator wipe may be configured to differentiate between traditional monomer quaternary ammonium compounds and cationic polymers such as quaternary silane compounds used in residual antimicrobial coatings by color changes on the indicator wipe and by observing if cationic-dye complexes diffuse by chromatography on the indicator wipe.

Apparatus inspects the presence/absence of foreign substance on object having inspection region and non-inspection region arranged outside the inspection region. The apparatus includes sensor for illuminating the object and output, as image, result acquired by detecting light from region including the inspection region, and processor for detecting foreign substance based on inspection region image acquired by excluding non-inspection region image, which is image of the non-inspection region, from the image output from the sensor. The non-inspection region image includes first part generated by light from predetermined part of the non-inspection region of the inspected object and second part whose pixel value is continuous from pixel value of the first part and the processor specifies the second part based on fact that the pixel value of the second part is continuous from that of the first part.

An apparatus includes a measurement chamber configured to retain one or more sample substances. The apparatus includes an entrance window mounted on a side of the measurement chamber. The apparatus includes a light source configured to generate an incident light beam. The apparatus includes a Raman sensor configured to collect inelastically scattered light from the chamber, and measure an intensity of a Raman peak of a first substance from the one or more sample substances based on the collected inelastically scattered light. The apparatus further includes a processor configured to (i) calculate a concentration of the first substance based on at least the measured intensity of the Raman peak of the first substance, (ii) determine the end point of a wafer cleaning process based on a calculated concentration of the first substance, and (iii) terminate the wafer cleaning process based on the determined end point.

A soil-based coupon having an electronically readable verification code printed thereon is used for verification of soil removal by a cleaning process. The coupon includes a soil overlay covering the verification code. The verification code is at least partially revealed by removal of all or part of the soil overlay during the cleaning process. If the data encoded in the verification code can be correctly decoded after completion of the cleaning process, the cleaning process can be verified. The soil overlay can be designed to match the application. The coupons may be used in a cleaning process verification procedure in which one or more computing devices analyze images of the verification codes to determine whether or not cleaning processes can be verified.

A system to localize debris on an optical surface of a vehicle includes a first array along a first side of a perimeter of the optical surface and including a light source to emit light into a thickness of the optical surface. A second array is along a second side of the perimeter, opposite the first side, and includes a light detector to detect light scatter in the thickness and provide a corresponding output. A third array is along a third side of the perimeter and includes a light source to emit light. A fourth array is along a fourth side of the perimeter, opposite the third side, and includes a light detector to detect light scatter and provide a corresponding output. A controller identifies a presence of the debris, determines a position of the debris based on the output from the light detectors, and remediates the debris.

Systems and methods are described, and one method includes providing an optical fiber extending into a chamber with a volume of the gas; passing an optical beam, from an optical source, through the optical fiber; applying a spectral analysis to the optical beam as received after passing through the optical fiber, and outputting a corresponding spectral analysis signal; and determining, based on the output spectral analysis signal, whether a liquid is carried by the volume of the gas.

A soil-based coupon having an electronically readable verification code printed thereon is used for verification of soil removal by a cleaning process. The coupon includes a soil overlay covering the verification code. The verification code is at least partially revealed by removal of all or part of the soil overlay during the cleaning process. If the data encoded in the verification code can be correctly decoded after completion of the cleaning process, the cleaning process can be verified. The soil overlay can be designed to match the application. The coupons may be used in a cleaning process verification procedure in which one or more computing devices analyze images of the verification codes to determine whether or not cleaning processes can be verified.

An inspection apparatus includes a first optical system configured to irradiate a measurement object with ultraviolet light, a second optical system configured to detect, with a detector, at least one of the specific polarizations and fluorescence of 200 to 400 nm emitted from the measurement object, and a calculation unit that acquires information on an aromatic amino acid and a residue thereof in the irradiated portion according to a detection value of light detected by the detector.

It is desirable to provide an information processing apparatus, an information processing method, a program, and a monitoring system capable of monitoring a condition of a measured surface highly accurately and using the monitoring result effectively. To attain the aforementioned object, according to a mode of the present invention, an information processing apparatus includes an obtaining module and a generating module. The obtaining module obtains measuring data about a measured surface. The generating module generates covering material information about a covering material that covers the measured surface based on a feature of the obtained measuring data.