A spectral imaging system includes an objective lens system, an optical splitter, a dispersion system, and an optical combiner. The optical splitter is arranged to be in an optical path of an object being imaged through the objective lens system to provide an imaging optical path and a spectrometer optical path. The dispersion system is arranged in the spectrometer optical path. The optical combiner is arranged in the imaging optical path and a path of dispersed light from the dispersion system to combined dispersed light with a corresponding optical image of the object.

An inspecting apparatus includes a table for supporting a workpiece thereon, a light applying unit for applying light to the workpiece supported on the table, and a light detector for detecting light reflected from the workpiece. The light detector includes a camera and a diffusion plate disposed between the table and the camera.

A system comprising a nonlinear medium (NLM), an optical transduction module, a dual homodyne detector and a processor is provided. The NLM receives at least a pump beam and issues the pump, probe and conjugate beams, where the beams are linearly polarized. Optics route the probe, the conjugate or both beams to the sample. The sample imparts polarization rotation to light that interacts therewith. The optical transduction module imparts to the interacted light an optical phase shift that is a 1:1 transduction of the polarization rotation, where at least one of the probe light or the conjugate light carries the imparted optical phase shift. The processor obtains the optical-phase shift based on respective detection signals from the dual homodyne detector and determines, based on the obtained optical-phase shift, at least one of a Faraday polarization rotation, a Kerr polarization rotation or a spin noise spectrum.

A multipass cell assembly for monitoring of fluid is described, as well as fluid processing systems utilizing same, and associated methods of use of such multipass cell assembly for fluid monitoring. The multipass cell assembly is usefully employed in fluid processing operations such as monitoring of vapor deposition process reactants, e.g., reactants used for vapor deposition metallization of tungsten from a tungsten carbonyl precursor.

An apparatus for determining the presence or concentration of target molecules comprises: a radiation source; a surface; a waveguide; a detector; and a spectral filter. The radiation source is operable to produce electromagnetic radiation. The surface defines a two dimensional array of receptor sites. The waveguide is arranged to receive the electromagnetic radiation produced by the radiation source, divide the electromagnetic radiation and direct a portion of the electromagnetic radiation to each one of a two dimensional array of receptor sites. The detector comprises a two dimensional array of sensing elements, each sensing element arranged to receive electromagnetic radiation from a different one of the two dimensional array of receptor sites. The spectral filter is provided between the surface and the detector.

An optical absorbance spectrometer including a sample housing configured to hold a sample, a light source configured to emit broadband light into the sample housing, one or more reflectors configured to reflect the light such that the light passes through a sample holding volume of the sample housing multiple times, and a sensor arranged to receive the light from the sample housing, after the reflections. The sensor comprises a plurality of detectors configured to detect the intensity of the received light at multiple different wavelengths.

An apparatus and a method for correctly measuring a phase of an extreme ultraviolet (EUV) mask and a method of fabricating an EUV mask including the method are described. The apparatus for measuring the phase of the EUV mask includes an EUV light source configured to generate and output EUV light, at least one mirror configured to reflect the EUV light as reflected EUV light incident on an EUV mask to be measured, a mask stage on which the EUV mask is arranged, a detector configured to receive the EUV light reflected from the EUV mask, to obtain a two-dimensional (2D) image, and to measure reflectivity and diffraction efficiency of the EUV mask, and a processor configured to determine a phase of the EUV mask by using the reflectivity and diffraction efficiency of the EUV mask.

A seamless fumed silica monolithic integrating cavity device tailored to analyzing a flowed sample. The device is configured to facilitate optical measurements taken from a sample flowed through a cavity of the device. The cavity is defined by a fumed silica monolith with the added feature of a fused quartz lining on the surface of the monolith. This provides an intermediate surface that allows for cleaning and reuse of the highly effective diffuse light scattering fumed silica monolith. The lining may be placed under pressure or vacuum to structurally enhance mechanical integrity of the underlying monolith. Thus, continued or reliably repeated use of the device may be appreciated as well as use in more industrial environments that are prone to vibration. Additionally, while well suited for flow-based sample analysis, a valve of the cavity may be utilized for holding a sample in a temporarily static state for measurement.

The single-use disposable spectrophotometer described herein can measure one or more blood chemistry analytes from a drop of whole blood. A passive filtration system takes whole blood and delivers plasma along with a dissolved reporter molecule to one or more spectrophotometers which can operate with narrow band optical spectrum centered on an optical detection frequency. The spectrophotometer detects the changes in absorption of the plasma as a result of a chemistry reaction to determine the concentration or activity of one or more analytes.

The present disclosure relates to a method for inspecting a container body adapted and configured to hold substrates, comprising the steps of directing light from a light source onto a reflector element positioned within an interior space of the container body, such that the light is reflected to illuminate at least one interior surface of the container body, wherein the light is reflected by the reflector element in a diffuse manner and generating at least one image of the at least one interior surface by means of at least one camera, and evaluating the state of the container body on the basis of the at least one image.