Provided is a technique capable of more accurately determining a solder protruding defect in an appearance inspection device that acquires an image of an inspection region of an inspection target and measures a height of a predetermined place in the inspection region with a height measurement device. The appearance inspection device includes: an imaging unit (3); a height measurement unit (20); a moving mechanism (5) that moves the imaging unit (3) and the height measurement unit (20). When a restricted region (M) in the inspection target is irradiated with the measurement light emitted from the height measurement unit (20), the determination unit restricts defect determination based on the information on the height of the predetermined place measured by the height measurement unit (20).

A defect inspection apparatus includes an illumination unit configured to irradiate a surface of a sample with a linear illumination spot; a condensing detection unit configured to condense reflected light of the illumination spot and to control a polarization state of the incident light to form an optical image; and a sensor unit configured to output the optical image and including an array-shaped light receiving portion and an antireflection film at a position conjugate with the illumination spot, in which the condensing detection unit includes a polarization control unit configured to increase light incident efficiency to the sensor unit. The normal line of the light receiving surface of the sensor unit is inclined from the optical axis of the condensing detection unit by 10 degrees or more and less than 80 degrees. The light condensing detection unit increases the optical magnification in the lateral direction of the illumination spot.

A subject-to-be-examined support unit that supports a subject to be examined, a light source unit that outputs light entering the subject-to-be-examined support unit from a side opposite to a side by which a sample is supported, a fluorescent plate that is illuminated with the light that has been output from the light source unit and passed through the subject-to-be-examined support unit and the sample, and emits fluorescence, a photomultiplier that detects fluorescence that has been emitted from the fluorescent plate and passed through the subject-to-be-examined support unit and the sample, and a plate support unit that supports the fluorescent plate are provided. The plate support unit is structured in such a manner that a distance between the subject-to-be-examined support unit and the fluorescent plate is changeable by moving the fluorescent plate in a direction closer to the subject-to-be-examined support unit and in a direction away therefrom.

A method for sorting products and sorting apparatus with a flow of granular products moving in an inspection zone, in which a light beam is moved over the product flow to generate a reflected stream of light. At least one detector unit is provided to detect light reflected by the products to generate detection signals. This detector unit cooperates with a control unit to sort the products by these detection signals. The detector unit contains at least two sensors that are provided one after the other in the reflected stream of light so that a sensor is placed upstream of a downstream sensor. Each sensor detects a different part of the reflected stream of light.

An apparatus and method for analyzing particulates in a sample is disclosed. The method includes placing the sample on a moveable stage in an apparatus having a tunable MIR light scanner and a visible imaging system, the stage moving between the MIR light scanner and the visible imaging system, providing a visible image of the sample, and receiving user input as to a region of the sample that is to be analyzed. The sample is then moved to the MIR light scanner, the MIR light scanner generating an MIR light beam that is focused to a point on the specimen and measuring light reflected from the specimen. The specimen is then scanned at a first MIR wavelength by moving the specimen relative to the MIR light beam, and particles are identified that meet a selection criterion. The MIR absorption spectrum of each of the identified particle is then automatically measured.

A system and method for characterization of patterns marked on a fabric. The system includes a light source generating a light beam to impinge on a fabric; an optical arrangement including a parabolic mirror with a hole and an optical device, directing said light beam towards the fabric; a wavelength division unit; a light detection unit; and a computing device. The optical device changes and orients the direction of the light beam towards the fabric providing a scan of an area of the fabric, line-by-line, and redirects scattered light towards the light detection unit. The wavelength division unit separates the scattered light into spectral bands or colors and the computing device characterizes a pattern marked on the fabric by executing an algorithm that analyzes electrical voltage signals and that computes a quality measure of said marked pattern.

A system and method for characterization of patterns marked on a fabric. The system includes a light source generating a light beam to impinge on a fabric; an optical arrangement including a parabolic mirror with a hole and an optical device, directing said light beam towards the fabric; a wavelength division unit; a light detection unit; and a computing device. The optical device changes and orients the direction of the light beam towards the fabric providing a scan of an area of the fabric, line-by-line, and redirects scattered light towards the light detection unit. The wavelength division unit separates the scattered light into spectral bands or colors and the computing device characterizes a pattern marked on the fabric by executing an algorithm that analyzes electrical voltage signals and that computes a quality measure of said marked pattern.

An apparatus and method for analyzing particulates in a sample is disclosed. The method includes placing the sample on a moveable stage in an apparatus having a tunable MIR light scanner and a visible imaging system, the stage moving between the MIR light scanner and the visible imaging system, providing a visible image of the sample, and receiving user input as to a region of the sample that is to be analyzed. The sample is then moved to the MIR light scanner, the MIR light scanner generating an MIR light beam that is focused to a point on the specimen and measuring light reflected from the specimen. The specimen is then scanned at a first MIR wavelength by moving the specimen relative to the MIR light beam, and particles are identified that meet a selection criterion. The MIR absorption spectrum of each of the identified particle is then automatically measured.

Method for sorting products and sorting apparatus with a flow of granular products (1) moving in an inspection zone (4), wherein a light beam (8) is moved over the product flow in order to generate a reflected stream of light (12), wherein at least one detector unit (13) is provided to detect light reflected by the products (1) in order to generate detection signals, wherein this detector unit (13) cooperates with a control unit in order to sort the products (1) by means of these detection signals. The invention is characterised in that the detector unit (13) contains at least two sensors (19,20) that are provided one after the other in said reflected stream of light (12) so that a sensor (19) is placed upstream of a downstream sensor (20), wherein each sensor (19,20) detects a different part of the reflected stream of light (12).

Provided is a technique capable of more accurately determining a solder protruding defect in an appearance inspection device that acquires an image of an inspection region of an inspection target and measures a height of a predetermined place in the inspection region with a height measurement device. The appearance inspection device includes: an imaging unit (3); a height measurement unit (20); a moving mechanism (5) that moves the imaging unit (3) and the height measurement unit (20). When a restricted region (M) in the inspection target is irradiated with the measurement light emitted from the height measurement unit (20), the determination unit restricts defect determination based on the information on the height of the predetermined place measured by the height measurement unit (20).