An embodiment of a shutter assembly is described that comprises a support structure with a number of stations and operatively coupled to a motor configured to translate each of the stations to a position in front of a detector, wherein a first station comprises a first aperture, a first charged particle filter, and a first window; and a second station comprises a second aperture larger than the first aperture, a second charged particle filter, and a second window thinner than the first window.

A method includes introducing a fluidic sample into the void volume and onto the surface of a porous material, bringing the porous material into contact with a hydrophilic substrate compatible with a cryogenic Transmission Electron Microscope, separating the porous material from the substrate, and transferring a portion of the sample from the porous material to the substrate between their contact and separation.

The present disclosure relates to methods of obtaining electron diffraction data of microcrystalline samples.

Molecular structure of a crystal may be solved based on at least two diffraction tilt series acquired from a sample. The two diffraction tilt series include multiple diffraction patterns of at least one crystal of the sample acquired at different electron doses. In some examples, the two diffraction tilt series are acquired at different magnifications.

An improved charged particle beam inspection apparatus, and more particularly, a particle beam inspection apparatus for detecting a thin device structure defect is disclosed. An improved charged particle beam inspection apparatus may include a charged particle beam source to direct charged particles to a location of a wafer under inspection over a time sequence. The improved charged particle beam apparatus may further include a controller configured to sample multiple images of the area of the wafer at difference times over the time sequence. The multiple images may be compared to detect a voltage contrast difference or changes to identify a thin device structure defect.

The present disclosure concerns an electron microscopy method, including the emission of a precessing electron beam and the acquisition, at least partly simultaneous, of an electron diffraction pattern and of intensity values of X rays.

There is provided an image processing method capable of generating an image representative of a magnetic field distribution. The method starts with acquiring phase images providing visualization of electromagnetic fields respectively in a plurality of columns. Then, each of the electromagnetic fields in the columns within the phase images is separated into magnetic field and electric field components. An image representative of a magnetic field distribution is created based on the separated magnetic field components. The step of separating each electromagnetic field includes separating the electromagnetic field in a first one of the columns into magnetic field and electric field components based on the electromagnetic field in a second one of the columns, the latter electromagnetic field having an electric field component oriented in the same direction as that in the first column.

An inspection system that includes charged particle optics that irradiate a bottom of a hole with a charged particle beam propagated along an optical axis, an energy dispersive x-ray detector and a processor. The x-ray detector detects x-ray photons emitted from the bottom of the hole and generates detection signals indicative of the x-ray photons. The processor processes the detection signals to provide an estimate of the bottom of the hole.

A multi-degree-of-freedom sample holder, comprising a housing and a rotating shaft, is disclosed. A frame is provided between the housing and the rotating shaft, and the frame is coaxial with the housing and rotating shaft. The present invention has multiple degrees of freedom such as high-precision translational freedom of the sample along the X-axis, Y-axis and Z-axis, and 360° rotation of the sample around the axis, etc. The sample is always aligned with the sample holder shaft during the rotation, and the static electricity accumulated on the sample can be led out.

The present invention provides a radiotherapy apparatus (100) to generate both photon and electron beam mounted with dual KV beam ray source used for stereotactic imaging and CBCT (Cone Beam Computed Tomography) image with a greater FOV (Field Of View). The apparatus (IOO) comprises of a ring gantry (101), which includes at least two KV sources (102a and 102b), at least two movable detector (103 and 104) and a LINAC X-ray tube (106). The two movable detectors (103, 104) include a first movable detector (104) and a second movable detector (103). The second movable detector (103) has mechanism capture a half fan mode of X-ray beam of imaging radiation with a greater FOV having 250×450 mm. The half fan mode of X ray is captured by moving the second movable detector (103) or first movable detector (104) further towards the ISO centre (105) of the ring gantry (101).