A defect inspecting system includes a detector configured to image a sample and a host control device that acquires an inspection image including a defect and a plurality of reference images not including a defect site and generates a pseudo defect image by editing a predetermined reference image among the plurality of acquired reference images. An initial parameter is determined with which the pseudo defect site is detectable from the pseudo defect image. The host control device acquires a defect candidate site from the inspection image using the initial parameter, estimates a high-quality image from an image of a site corresponding to the defect candidate site using the parameter acquired in image quality enhancement, and specifies an actual defect site in the inspection image by executing defect discrimination. A parameter is determined with which a site close to the specified actual defect site is detectable using the inspection image.

Provided are a charged particle detector and a radiation detector capable of obtaining an observation image with correct contrast without saturation even when the number of signal electrons incident on a detector is increased due to an increase in the current of a primary electron beam. The charged particle detector is characterized by having a scintillator (109) having a signal electron detection surface (109a) for detecting signal electrons emitted when a specimen is irradiated with primary electrons and converting the signal electrons into light, a light detector (111) having a light detection surface (111a) for detecting the light emitted from the scintillator (109), and a light guide (110) disposed between the scintillator (109) and the light detector (111), wherein the area of the light detection surface (111a) is larger than the area of the signal electron detection surface (109a).

Provided are a charged particle detector and a radiation detector capable of obtaining an observation image with correct contrast without saturation even when the number of signal electrons incident on a detector is increased due to an increase in the current of a primary electron beam. The charged particle detector is characterized by having a scintillator (109) having a signal electron detection surface (109a) for detecting signal electrons emitted when a specimen is irradiated with primary electrons and converting the signal electrons into light, a light detector (111) having a light detection surface (111a) for detecting the light emitted from the scintillator (109), and a light guide (110) disposed between the scintillator (109) and the light detector (111), wherein the area of the light detection surface (111a) is larger than the area of the signal electron detection surface (109a).

An object of the present invention is to improve the accuracy of clustering by avoiding detection of false clusters when automatically clustering points on a scatter diagram. A surface analyzer according to a first aspect of the present invention includes a measurement unit (1-2, 4-8) configured to acquire a signal reflecting a quantity of a plurality of components or elements that are analysis targets at a plurality of positions on a sample (3), a scatter diagram generation unit (92) configured to generate a binary scatter diagram based on a measurement result by the measurement unit, a clustering unit (94) configured to perform clustering of points in the binary scatter diagram using a method of a density-based clustering, and a parameter adjustment unit (93) configured to adjust a distance threshold by utilizing distribution information on a signal value of the components or the elements on either axis in the binary scatter diagram, the distance threshold being one of parameters to be set in the density-based clustering.

An object of the present invention is to improve the accuracy of clustering by avoiding detection of false clusters when automatically clustering points on a scatter diagram. A surface analyzer according to a first aspect of the present invention includes a measurement unit (1-2, 4-8) configured to acquire a signal reflecting a quantity of a plurality of components or elements that are analysis targets at a plurality of positions on a sample (3), a scatter diagram generation unit (92) configured to generate a binary scatter diagram based on a measurement result by the measurement unit, a clustering unit (94) configured to perform clustering of points in the binary scatter diagram using a method of a density-based clustering, and a parameter adjustment unit (93) configured to adjust a distance threshold by utilizing distribution information on a signal value of the components or the elements on either axis in the binary scatter diagram, the distance threshold being one of parameters to be set in the density-based clustering.

Systems and methods for fused multi-modal electron microscopy are provided to generate quantitatively accurate 2D maps or 3D volumes with pixel/voxel values that directly reflect a sample's chemistry. Techniques are provided for combining annular dark field detector (ADF), annular bright field (ABF) and/or pixelated detector image data and energy dispersive X-rays (EDX) data and/or electron energy loss spectroscopy (EELS) data for a sample and generating chemical 2D and 3D maps by applying minimization optimization process.

Systems and methods for fused multi-modal electron microscopy are provided to generate quantitatively accurate 2D maps or 3D volumes with pixel/voxel values that directly reflect a sample's chemistry. Techniques are provided for combining annular dark field detector (ADF), annular bright field (ABF) and/or pixelated detector image data and energy dispersive X-rays (EDX) data and/or electron energy loss spectroscopy (EELS) data for a sample and generating chemical 2D and 3D maps by applying minimization optimization process.

The present disclosure provides a sample rotation system and method. The sample rotation system includes a rotation device, and the rotation device includes: a first carrier connected to a sample; a drive portion connected to the first carrier, wherein the drive portion is configured to drive the first carrier to rotate; and the first carrier drives the sample to rotate from an initial position to a target position; an acquisition device, configured to acquire a rotation state of the sample; and a control unit, electrically connected to the drive portion, and configured to control operation of the drive portion.

The present disclosure provides a sample rotation system and method. The sample rotation system includes a rotation device, and the rotation device includes: a first carrier connected to a sample; a drive portion connected to the first carrier, wherein the drive portion is configured to drive the first carrier to rotate; and the first carrier drives the sample to rotate from an initial position to a target position; an acquisition device, configured to acquire a rotation state of the sample; and a control unit, electrically connected to the drive portion, and configured to control operation of the drive portion.

A system for identifying microbial agents such as virus particles in a sample. The system includes at least one processing unit for identifying in an electron micrograph obtained from the sample a darker region and identifying virus particles within the darker region. The system can optionally include an electron microscope, a sample collector and sample treatment chamber.