The invention discloses a MEMS sensor detection device and a MEMS sensor system, wherein the MEMS sensor detection device comprises: a readout circuit used for analog signal processing of the output signal of the MEMS sensor to generate detection voltage; a cancellation voltage generation circuit used for generating a gravity cancellation voltage according to the detection voltage, wherein the gravity cancellation voltage and the gravity acceleration are in a positive proportional relationship; a selection circuit used for selecting the detection voltage output in a feedback phase and selecting the gravity cancellation voltage output in a gravity cancellation phase, wherein in one detection period, the feedback phase is located after the gravity cancellation phase; and a feedback circuit used for generating a feedback voltage according to the output voltage of the selection circuit, wherein the feedback voltage is in a positive proportional relationship with the output voltage of the selection circuit. The MEMS sensor detection device and the MEMS sensor system disclosed by the invention can cancel the influence of gravity acceleration and improve the sensitivity of the MEMS sensor system.

The present disclosure provides systems and methods for monitoring an environment of a front opening universal pod (FOUP). The systems and methods may include an environmental sensor disposed within the FOUP and configured to measure one or more environmental parameters of an interior environment of the FOUP; and a wireless transmitter disposed within the FOUP and in communication with the environmental sensor, wherein the wireless transmitter is configured to wirelessly transmit the one or more environmental parameters from the environmental sensor to a controller disposed outside of the FOUP to decide whether the one or more environmental parameters are within threshold limits and receive a message according to a decision of whether the one or more environmental parameters are within the threshold limits from the controller.

The present disclosure provides systems and methods for monitoring an environment of a front opening universal pod (FOUP). The systems and methods may include an environmental sensor disposed within the FOUP and configured to measure one or more environmental parameters of an interior environment of the FOUP; and a wireless transmitter disposed within the FOUP and in communication with the environmental sensor, wherein the wireless transmitter is configured to wirelessly transmit the one or more environmental parameters from the environmental sensor to a controller disposed outside of the FOUP to decide whether the one or more environmental parameters are within threshold limits and receive a message according to a decision of whether the one or more environmental parameters are within the threshold limits from the controller.

A moisture detector includes a sensor chip and a moisture determining unit. The sensor chip includes a humidity detector having a detection surface on which to measure humidity, and also includes a heater heating the detection surface, and the moisture determining unit is configured to, after causing the heater to start heating, determine whether moisture is present on the detection surface based on a difference in changes in the humidity measured by the humidity detector.

The present disclosure provides systems and methods for monitoring an environment of a front opening universal pod (FOUP). The systems and methods may include one or more environmental sensors disposed within the FOUP, configured to measure environmental parameters of the environment of the FOUP and a FOUP configured to hold one or more wafers. The systems and methods may also include a wireless transmitter in communication with the environmental sensor, which may be disposed within the FOUP and configured to transmit the measured environmental parameters from the environmental sensor.

The present disclosure provides systems and methods for monitoring an environment of a front opening universal pod (FOUP). The systems and methods may include one or more environmental sensors disposed within the FOUP, configured to measure environmental parameters of the environment of the FOUP and a FOUP configured to hold one or more wafers. The systems and methods may also include a wireless transmitter in communication with the environmental sensor, which may be disposed within the FOUP and configured to transmit the measured environmental parameters from the environmental sensor.

Several embodiments include a method of computing void fraction in a two-phase mixture in a pipe. A driver and a transmitter antenna can transmit a radio frequency (RF) signal through the pipe. The pipe can convey the two-phase mixture extracted from a geothermal well. The RF signal can pass through the two-phase mixture. A receiver antenna in the pipe can receive the RF signal. A receiver circuit can measure signal strength attenuations of the RF signal at the receiver antenna over a time window. A computation engine can compute an average of the signal strength attenuations over the time window. The computation engine or another computing device can then compute, in real-time, a change in a void fraction of the two-phase mixture based on the average of the signal strength attenuations.

Several embodiments include a method of computing void fraction in a two-phase mixture in a pipe. A driver and a transmitter antenna can transmit a radio frequency (RF) signal through the pipe. The pipe can convey the two-phase mixture extracted from a geothermal well. The RF signal can pass through the two-phase mixture. A receiver antenna in the pipe can receive the RF signal. A receiver circuit can measure signal strength attenuations of the RF signal at the receiver antenna over a time window. A computation engine can compute an average of the signal strength attenuations over the time window. The computation engine or another computing device can then compute, in real-time, a change in a void fraction of the two-phase mixture based on the average of the signal strength attenuations.

A system and method for estimating steam quality for a steam generator is provided which involves obtaining raw measurement values for process variables of the steam generator from sensors coupled to the steam generator; receiving the raw measurement values and slow-rate steam quality samples in order to determine a steam quality estimate, using a measurement module to receive the raw measurement values and determine model input values and a robustness index; using an estimator module to determines a raw steam quality estimate using the model input values and a model that is selected from several models depending on reliability of some of the raw measurements; and using a corrector module to determine the steam quality estimate using the raw steam quality estimate, robustness index, and slow-rate steam quality samples. An output receives the steam quality estimate and can provide the steam quality estimate to another device.

A system and method for estimating steam quality for a steam generator is provided which involves obtaining raw measurement values for process variables of the steam generator from sensors coupled to the steam generator; receiving the raw measurement values and slow-rate steam quality samples in order to determine a steam quality estimate, using a measurement module to receive the raw measurement values and determine model input values and a robustness index; using an estimator module to determines a raw steam quality estimate using the model input values and a model that is selected from several models depending on reliability of some of the raw measurements; and using a corrector module to determine the steam quality estimate using the raw steam quality estimate, robustness index, and slow-rate steam quality samples. An output receives the steam quality estimate and can provide the steam quality estimate to another device.