There is provided an apparatus (20), for determining a dryness level of steam from a steam source (22), comprising: a flow measurement device (24) for measuring a flow of the steam from the steam source (22); a condenser (26) for producing condensate from the steam from the steam source (22); and a condensate sensing device (30) configured to: measure a collection value of condensate produced from the steam from the steam source (22); obtain a mass flow rate from the measured flow of the steam from the steam source (22); use the obtained mass flow rate to determine an expected collection value of condensate produced from steam of a known dryness level, or use the obtained mass flow rate to determine an expected collection value of steam from the steam source based on a known dryness level; determine a dryness level of the steam from the steam source (22) by comparing the measured collection value and the expected collection value.

A system and method for estimating steam quality for a steam generator is provided which involves obtaining raw measurement values for process variables of the steam generator from sensors coupled to the steam generator; receiving the raw measurement values and slow-rate steam quality samples in order to determine a steam quality estimate, using a measurement module to receive the raw measurement values and determine model input values and a robustness index; using an estimator module to determines a raw steam quality estimate using the model input values and a model that is selected from several models depending on reliability of some of the raw measurements; and using a corrector module to determine the steam quality estimate using the raw steam quality estimate, robustness index, and slow-rate steam quality samples. An output receives the steam quality estimate and can provide the steam quality estimate to another device.

A system and method for estimating steam quality for a steam generator is provided which involves obtaining raw measurement values for process variables of the steam generator from sensors coupled to the steam generator; receiving the raw measurement values and slow-rate steam quality samples in order to determine a steam quality estimate, using a measurement module to receive the raw measurement values and determine model input values and a robustness index; using an estimator module to determines a raw steam quality estimate using the model input values and a model that is selected from several models depending on reliability of some of the raw measurements; and using a corrector module to determine the steam quality estimate using the raw steam quality estimate, robustness index, and slow-rate steam quality samples. An output receives the steam quality estimate and can provide the steam quality estimate to another device.

Methods, apparatuses, and embodiments related to estimating void fractions in real-time or substantially real-time without disrupting a production flow of, e.g., a geothermal power plant. Some embodiments describe methods and systems of determining void fraction of a two-phase mixture extracted from a geothermal well by measuring the attenuations of one or more radiofrequency signals in a fixed span of a transportation unit (e.g., a pipe). Depending on void fraction of the two-phase mixture in the transportation, the RF signals would attenuate differently across the fixed span. For example, a monitor system can utilize one or more transmitter antennas in the transportation unit to transmit one or more RF signals and utilize one or more receiver antennas to measure attenuations of these RF signals over the fixed span. In some embodiments, an antenna can be configured to serve as both a transmitter antenna and a receiver antenna.

A moisture detector includes a sensor chip and a moisture determining unit. The sensor chip includes a humidity detector having a detection surface on which to measure humidity, and also includes a heater heating the detection surface, and the moisture determining unit is configured to, after causing the heater to start heating, determine whether moisture is present on the detection surface based on a difference in changes in the humidity measured by the humidity detector.

A moisture detector includes a sensor chip and a moisture determining unit. The sensor chip includes a humidity detector having a detection surface on which to measure humidity, and also includes a heater heating the detection surface, and the moisture determining unit is configured to, after causing the heater to start heating, determine whether moisture is present on the detection surface based on a difference in changes in the humidity measured by the humidity detector.

The present disclosure provides systems and methods for monitoring an environment of a front opening universal pod (FOUP). The systems and methods may include an environmental sensor disposed within the FOUP and configured to measure one or more environmental parameters of an interior environment of the FOUP; and a wireless transmitter disposed within the FOUP and in communication with the environmental sensor, wherein the wireless transmitter is configured to wirelessly transmit the one or more environmental parameters from the environmental sensor to a controller disposed outside of the FOUP to decide whether the one or more environmental parameters are within threshold limits and receive a message according to a decision of whether the one or more environmental parameters are within the threshold limits from the controller.

The present disclosure provides systems and methods for monitoring an environment of a front opening universal pod (FOUP). The systems and methods may include an environmental sensor disposed within the FOUP and configured to measure one or more environmental parameters of an interior environment of the FOUP; and a wireless transmitter disposed within the FOUP and in communication with the environmental sensor, wherein the wireless transmitter is configured to wirelessly transmit the one or more environmental parameters from the environmental sensor to a controller disposed outside of the FOUP to decide whether the one or more environmental parameters are within threshold limits and receive a message according to a decision of whether the one or more environmental parameters are within the threshold limits from the controller.

The invention discloses a MEMS sensor detection device and a MEMS sensor system, wherein the MEMS sensor detection device comprises: a readout circuit used for analog signal processing of the output signal of the MEMS sensor to generate detection voltage; a cancellation voltage generation circuit used for generating a gravity cancellation voltage according to the detection voltage, wherein the gravity cancellation voltage and the gravity acceleration are in a positive proportional relationship; a selection circuit used for selecting the detection voltage output in a feedback phase and selecting the gravity cancellation voltage output in a gravity cancellation phase, wherein in one detection period, the feedback phase is located after the gravity cancellation phase; and a feedback circuit used for generating a feedback voltage according to the output voltage of the selection circuit, wherein the feedback voltage is in a positive proportional relationship with the output voltage of the selection circuit. The MEMS sensor detection device and the MEMS sensor system disclosed by the invention can cancel the influence of gravity acceleration and improve the sensitivity of the MEMS sensor system.

The invention discloses a MEMS sensor detection device and a MEMS sensor system, wherein the MEMS sensor detection device comprises: a readout circuit used for analog signal processing of the output signal of the MEMS sensor to generate detection voltage; a cancellation voltage generation circuit used for generating a gravity cancellation voltage according to the detection voltage, wherein the gravity cancellation voltage and the gravity acceleration are in a positive proportional relationship; a selection circuit used for selecting the detection voltage output in a feedback phase and selecting the gravity cancellation voltage output in a gravity cancellation phase, wherein in one detection period, the feedback phase is located after the gravity cancellation phase; and a feedback circuit used for generating a feedback voltage according to the output voltage of the selection circuit, wherein the feedback voltage is in a positive proportional relationship with the output voltage of the selection circuit. The MEMS sensor detection device and the MEMS sensor system disclosed by the invention can cancel the influence of gravity acceleration and improve the sensitivity of the MEMS sensor system.