A mechanism to reduce the amplitude of acceleration experienced by IMUs for tracked objects while maintaining a more accurate estimate of the device orientation. The invention uses parallel mechanisms to maintain the correct orientation of an IMU while allowing for damped translational degrees of freedom to limit the degradation of performance while spatially tracking a body.

An embodiment of an integrated atom chip used for measuring atoms is discussed. One or more magnetic traps integrated with an optical waveguide that is imprinted onto the integrated atom chip facilitate loading of the atoms into an evanescent field optical trap of the optical waveguide in order to measure the atoms. The two or more stages of cooling are used to progressively cool the atoms from an initial temperature down to a final temperature of the atoms when mode matched and loaded into the evanescent field optical trap of the optical waveguide.

A composite sensor includes a first sensor outputting a first sensor signal, a second sensor outputting a second sensor signal, a circuit board electrically connected to the first and second sensors, and a mount member having one surface on which the first and second sensors and the circuit board are disposed. The first and second sensors have respective input terminals to which respective input signals are inputted, and have respective output terminals from which the first and second sensor signals are outputted. When a virtual straight line passing respective centers of the first and second sensors parallel to an arrangement direction of the sensors is defined, the respective input terminals of the first and second sensors are disposed in one of two regions divided by the virtual line, and the respective output terminals of the first and second sensors are disposed in a remaining one of the two regions.

Provided is an acceleration sensor capable of realizing a simultaneous operation method of signal detection and servo control in place of a time-division processing method, by an MEMS process in which a manufacturing variation is large.

The acceleration sensor is an MEMS capacitive acceleration sensor and has capacitive elements for signal detection and capacitive elements for servo control different from the capacitive elements for the signal detection. A voltage to generate force in a direction reverse to a detection signal of acceleration by the capacitive elements for the signal detection is applied to the capacitive elements for the servo control. Further, the acceleration sensor includes a variable capacity unit compensating for a mismatch of capacity values of the capacitive elements for the servo control at an ASIC side, detects a leak signal due to the mismatch of the capacity values in an ASIC, controls a capacity value of the variable capacity unit, on the basis of a detection result, compensates for an influence of the mismatch of the capacity values, and executes a normal signal detection/servo control simultaneous operation.

A multi-axis acceleration sensor comprises a frame, a central mass disposed within the frame, and a plurality of transducers mechanically coupled between the frame and the central mass. At least a first set of the transducers are arranged between the frame and the central mass in a manner configured to measure translational and rotational motion with respect to a first predefined axis.

A device of or attached to a roller body determines a rotational frequency of the roller body (or other object) rotating about an axis of rotation includes an acceleration sensor that detects an acceleration signal of an acceleration in a first direction extending in a radial or tangential direction to the axis of rotation of the roller body; and an electronic processing unit and configured to low-pass and high-pass, particularly adaptively high-pass filter, the detected acceleration signal, perform a derivation, with respect to time, of the filtered signal, optimize the signal with a subsequent absolute-amount generation and with moving averaging, and ascertain a frequency of the filtered acceleration signal, which corresponds to the rotational frequency of the roller body.

Described herein are methods and systems for configuring a motion sensor assembly to compensate for a temperature gradient. First and second sensors of the same type are arranged as opposing pairs with respect to a first axis that may be defined by a temperature gradient caused by at least one thermal element. Combining the output measurements of the first sensor and the second sensor allows effects of the temperature gradient on sensor measurements of the first sensor and the second sensor to be compensated.

A closed-loop microelectromechanical accelerometer includes a substrate of semiconductor material, an out-of-plane sensing mass and feedback electrodes. The out-of-plane sensing mass, of semiconductor material, has a first side facing the supporting body and a second side opposite to the first side. The out-of-plane sensing mass is also connected to the supporting body to oscillate around a non-barycentric fulcrum axis parallel to the first side and to the second side and perpendicular to an out-of-plane sensing axis. The feedback electrodes are capacitively coupled to the sensing mass and are configured to apply opposite electrostatic forces to the sensing mass.

A multi-axis acceleration sensor comprises a frame, a central mass disposed within the frame, and a plurality of transducers mechanically coupled between the frame and the central mass. At least a first set of the transducers are arranged between the frame and the central mass in a manner configured to measure translational and rotational motion with respect to a first predefined axis.

An example system comprising: a microelectromechanical system (MEMS) vibrating beam accelerometer (VBA) comprising: a proof mass; and a first resonator mechanically coupled to the proof mass; a first electrode configured to apply a force to the proof mass.