A temperature sensor is a temperature sensor using a MEMS resonator, and includes: a MEMS resonator; a sweeper that sweeps a frequency of an excitation signal for a vibrator of the MEMS resonator in a predetermined sweep direction, and outputs the excitation signal swept to the MEMS resonator; a discontinuity point detector that obtains a vibration state information signal, which is a characteristic quantity expressing a vibration state of the vibrator based on the excitation signal, from the MEMS resonator, and detects a detection value that is (i) a frequency of the excitation signal when the vibration state information signal obtained changes discontinuously or (ii) a time corresponding to the frequency; and a converter that determines a physical quantity acting on the MEMS resonator based on the detection value detected.

In certain embodiments, an accelerometer is a microelectromechanical systems (MEMS) device including a proof mass, an anchor located in an opening defined by a body of the proof mass, a spring, a drive electrode, and a sense beam. The spring and the proof mass form a spring system suspended from the anchor. The sense beam oscillates at a particular resonance frequency based on application of a signal to the drive electrode. The MEMS device further includes a support structure coupled to the anchor. The support structure operates as a stress decoupling area and includes a support beam, with the spring corresponding to an end of the support beam that has a reduced thickness. The sense beam has a first end attached to the proof mass and a second end attached to the support beam such that the sense beam is orthogonal to the support beam.

In certain embodiments, an accelerometer is a microelectromechanical systems (MEMS) device including a proof mass, an anchor located in an opening defined by a body of the proof mass, a spring, a drive electrode, and a sense beam. The spring and the proof mass form a spring system suspended from the anchor. The sense beam oscillates at a particular resonance frequency based on application of a signal to the drive electrode. The MEMS device further includes a support structure coupled to the anchor. The support structure operates as a stress decoupling area and includes a support beam, with the spring corresponding to an end of the support beam that has a reduced thickness. The sense beam has a first end attached to the proof mass and a second end attached to the support beam such that the sense beam is orthogonal to the support beam.

Sensor apparatus and methods for operating the same for measuring acceleration are disclosed. In some embodiments, circuitry inside a sensor digitizes a measured acceleration signal from an accelerometer into a digitized acceleration signal, which is processed by a digital equalization filter within the sensor to provide an equalized acceleration signal. The equalized acceleration signal may have a frequency response that is substantially flat over a frequency range that extends beyond the resonant frequency of a MEMs sensor within the accelerometer of the sensor.

A method is provided for identifying or authenticating an object. The method includes vibrating the object at a plurality of frequencies. The vibrations from the object are sensed at each of the plurality of frequencies using an accelerometer. A vibration profile of the object is generated using the sensed vibrations. The generated vibration profile is then compared to a stored vibration profile. It is determined if the generated vibration profile matches the stored vibration profile. A match indicates that the object has been identified or authenticated. In another embodiment, an object capable of implementing the method is provided. In another embodiment, the object may include a replaceable accessary. In this case, the initial and generated vibration profiles may be created with the replacement accessary attached to the object. A match of the generated and initial vibration profiles indicates that the replaceable accessary is authentic.

A method is provided for identifying or authenticating an object. The method includes vibrating the object at a plurality of frequencies. The vibrations from the object are sensed at each of the plurality of frequencies using an accelerometer. A vibration profile of the object is generated using the sensed vibrations. The generated vibration profile is then compared to a stored vibration profile. It is determined if the generated vibration profile matches the stored vibration profile. A match indicates that the object has been identified or authenticated. In another embodiment, an object capable of implementing the method is provided. In another embodiment, the object may include a replaceable accessary. In this case, the initial and generated vibration profiles may be created with the replacement accessary attached to the object. A match of the generated and initial vibration profiles indicates that the replaceable accessary is authentic.

A multi-axis acceleration sensor comprises a frame, a central mass disposed within the frame, and a plurality of transducers mechanically coupled between the frame and the central mass. At least a first set of the transducers are arranged between the frame and the central mass in a manner configured to measure translational and rotational motion with respect to a first predefined axis.

A multi-axis acceleration sensor comprises a frame, a central mass disposed within the frame, and a plurality of transducers mechanically coupled between the frame and the central mass. At least a first set of the transducers are arranged between the frame and the central mass in a manner configured to measure translational and rotational motion with respect to a first predefined axis.

A multi-axis acceleration sensor comprises a frame, a central mass disposed within the frame, and a plurality of transducers mechanically coupled between the frame and the central mass. At least a first set of the transducers are arranged between the frame and the central mass in a manner configured to measure translational and rotational motion with respect to a first predefined axis.

A multi-axis acceleration sensor comprises a frame, a central mass disposed within the frame, and a plurality of transducers mechanically coupled between the frame and the central mass. At least a first set of the transducers are arranged between the frame and the central mass in a manner configured to measure translational and rotational motion with respect to a first predefined axis.