A pulse measurement device is provided, including a first signal source, a second signal source, two microwave resonators, two mixers, and a signal processing unit. The first signal source and the second signal source output a first high-frequency signal and a second high-frequency signal, respectively. Each of the microwave resonators generates an electric field according to the first high-frequency signal, and senses a variation in the electric field which is interfered by a pulse to obtain a sensing signal. Each of the mixers is coupled to one of the microwave resonators, to mix the sensing signal and the second high-frequency signal to output a down-converted signal. The signal processing unit respectively demodulates amplitudes of the down-converted signals of the two mixers to obtain amplitude signals.

A pulse measurement device is provided, including a first signal source, a second signal source, two microwave resonators, two mixers, and a signal processing unit. The first signal source and the second signal source output a first high-frequency signal and a second high-frequency signal, respectively. Each of the microwave resonators generates an electric field according to the first high-frequency signal, and senses a variation in the electric field which is interfered by a pulse to obtain a sensing signal. Each of the mixers is coupled to one of the microwave resonators, to mix the sensing signal and the second high-frequency signal to output a down-converted signal. The signal processing unit respectively demodulates amplitudes of the down-converted signals of the two mixers to obtain amplitude signals.

Disclosed are an apparatus for monitoring pulsed high-frequency power and a substrate processing apparatus including the same. The apparatus includes an attenuation module configured to attenuate a pulsed high-frequency power signal; a rectifier module configured to convert the pulsed high-frequency power signal into a direct current signal; and a detection module configured to detect a pulse parameter based on the direct current signal.

Disclosed are an apparatus for monitoring pulsed high-frequency power and a substrate processing apparatus including the same. The apparatus includes an attenuation module configured to attenuate a pulsed high-frequency power signal; a rectifier module configured to convert the pulsed high-frequency power signal into a direct current signal; and a detection module configured to detect a pulse parameter based on the direct current signal.

A frequency measurement system and method of a radio frequency (RF) signal. The frequency measurement system includes: a magnetic field source module, a light source module, an excitation module, a complementary metal-oxide-semiconductor (CMOS) camera, and a signal processing module; the excitation module is disposed in the magnetic field; the excitation module is disposed on an output light path of the light source module; the CMOS camera is disposed on an output light path of the excitation module; and the CMOS camera is connected to the signal processing module; the light source module is configured to emit a laser; the CMOS camera is configured to capture an excitation image when the laser enters the excitation module to which a to-be-tested RF signal is applied; and the signal processing module is configured to determine a frequency of the to-be-tested RF signal according to the excitation image.

The present disclosure relates to a motor control system including: a motor control device, including a semiconductor integrated circuit having a memory and forming a control loop for a motor so as to control a drive of the motor; and an external debug device, externally connected to the motor control device and accessible to the memory in the motor control device. The external debug device includes a disturbance signal superimposer and a frequency characteristics deriver. The interference signal superimposer generates a disturbance signal for the control loop and superimposes the disturbance signal on a signal generated in the control loop. The frequency characteristics deriver derives frequency characteristics of the control loop based on the signal generated in the control loop by superimposition.

The present disclosure relates to a motor control system including: a motor control device, including a semiconductor integrated circuit having a memory and forming a control loop for a motor so as to control a drive of the motor; and an external debug device, externally connected to the motor control device and accessible to the memory in the motor control device. The external debug device includes a disturbance signal superimposer and a frequency characteristics deriver. The interference signal superimposer generates a disturbance signal for the control loop and superimposes the disturbance signal on a signal generated in the control loop. The frequency characteristics deriver derives frequency characteristics of the control loop based on the signal generated in the control loop by superimposition.

A wireless power transmission system, and a method for controlling wireless power transmission and wireless power reception are provided. According to an aspect, a method for controlling a wireless power transmission may include: detecting a plurality of target devices used to wirelessly receive power; selecting a source resonating unit from among a plurality of source resonating units, based on the amount of power to be transmitted to one or more of the plurality of target devices, a coupling factor associated with one or more of the plurality of target devices, or both; and wirelessly transmitting power to a target device using the selected source resonating unit.

A wireless power transmission system, and a method for controlling wireless power transmission and wireless power reception are provided. According to an aspect, a method for controlling a wireless power transmission may include: detecting a plurality of target devices used to wirelessly receive power; selecting a source resonating unit from among a plurality of source resonating units, based on the amount of power to be transmitted to one or more of the plurality of target devices, a coupling factor associated with one or more of the plurality of target devices, or both; and wirelessly transmitting power to a target device using the selected source resonating unit.

A setting of a measurement instrument comprises the providing a reference measurement instrument that uses at least one instrument parameter. A training phase is performed for a particular signal type to be processed by said reference measurement instrument in order to retrieve an optimal setting for said at least one instrument parameter. A lookup table is created for said particular signal type, said lookup table comprising at least said optimal setting for said at least one instrument parameter.