The present disclosure provides an optical imager and a method for imaging electromagnetic radiation. In one aspect, the optical imager includes an object array substantially located at an object plane, a first catadioptric element configured to substantially collimate, at a central plane, electromagnetic radiation emanating from the object array, a second catadioptric element configured to image the substantially collimated electromagnetic radiation from the central plane onto an image plane, and a detecting element substantially located at the image plane. The first catadioptric element includes at least one refractive surface and at least one reflective surface, and the second catadioptric element includes at least one refractive surface and at least one reflective surface.

A projection objective configured to image an object field in an object plane into an image field in an image field plane includes a reflective unit, a first refractive unit, and a second refractive unit. An optical axis of the first refractive unit is parallel to but displaced from an optical axis of the second refractive unit. The reflective unit includes a first curved mirror and a second curved mirror. The second curved mirror is immediately downstream from the first curved mirror in a path of light from the object plane to the image plane. The projection objective is a microlithography projection objective.

A multiplexing module provided herein is configured to perform operations of receiving a plurality of laser pulses from a pulsed laser source; splitting each laser pulse into a plurality of beamlets; introducing a delay between each adjacent beamlet of the plurality of beamlets, such that the plurality of beamlets associated with a respective laser pulse of the plurality of laser pulses is distributed equally across a pulse repetition period associated with the pulsed laser source; changing a divergence of each subsequent beamlet of the plurality of beamlets associated with each respective laser pulse to introduce a distinguishing feature between each beamlet of the plurality of beamlet to cause each beamlet to focus on a different axial plane or lateral position of the sample; and outputting the plurality of beamlets associated with each respective laser pulse.

An example optical system for a 3D stereoscopic image display comprises a changing mirror, a rotating mirror, a tilted mirror, a concave mirror and a planar mirror. The changing mirror can change the path of light from a horizontal direction to a vertical direction. The rotating mirror can rotate while having an X-axis and a Y-axis with different curvature radii. The tilted mirror can include a central region with a hole for allowing light to pass therethrough, and a peripheral region having one surface having a concave tilted structure while the other surface has a planar structure. The concave mirror can include a central region with a hole having a size capable of encompassing the tilted mirror and a peripheral region having a bent structure that is completely concave. The planar mirror can include a central region with a hole and a peripheral region with a flat doughnut structure.

A reflective microscope objective lens includes a concave mirror system that reflects incoming radiation, a convex mirror in optical communication with the concave mirror system, and a primary concave mirror in optical communication with the convex mirror. The concave mirror system includes a first concave mirror. The primary concave mirror focuses outgoing radiation onto a focal plane wherein the concave mirror system. Characteristically, the convex mirror and the primary concave mirror are arranged to direct light along a non-concentric path.

An optical system for a three-dimensional stereoscopic image display, according to exemplary embodiments, can comprise a changing mirror, a rotating mirror, a tilted mirror, a concave mirror and a planar mirror. The changing mirror can be provided so as to change the path of light, having passed through a spatial light modulator, from a horizontal direction to a vertical direction. The rotating mirror can be provided to rotate while having an X-axis and a Y-axis with respectively different curvature radii. The tilted mirror can be provided such that a central region thereof has a hole for allowing light to pass therethrough, and a peripheral region thereof has one surface having a concave tilted structure while the other surface has a planar structure. The concave mirror can be provided such that a central region thereof has a hole having a size capable of encompassing the tilted mirror and a peripheral region thereof has a bent structure that is completely concave. The planar mirror can be provided such that a central region thereof has a hole formed therein and a peripheral region thereof has a flat doughnut structure.

The present disclosure provides an optical imager and a method for imaging electromagnetic radiation. In one aspect, the optical imager includes an object array substantially located at an object plane, a first catadioptric element configured to substantially collimate, at a central plane, electromagnetic radiation emanating from the object array, a second catadioptric element configured to image the substantially collimated electromagnetic radiation from the central plane onto an image plane, and a detecting element substantially located at the image plane. The first catadioptric element includes at least one refractive surface and at least one reflective surface, and the second catadioptric element includes at least one refractive surface and at least one reflective surface.

The present invention provides a projection optical system including a first concave reflecting surface, a first convex reflecting surface, a second concave reflecting surface, and a third concave reflecting surface, wherein the first concave reflecting surface, the first convex reflecting surface, the second concave reflecting surface, and the third concave reflecting surface are arranged such that light from an object plane forms an image on an image plane by being reflected by the first concave reflecting surface, the first convex reflecting surface, the second concave reflecting surface, the first convex reflecting surface, and the third concave reflecting surface in an order named.

The present disclosure provides an optical imager and a method for imaging electromagnetic radiation. In one aspect, the optical imager includes an object array substantially located at an object plane, a first catadioptric element configured to substantially collimate, at a central plane, electromagnetic radiation emanating from the object array, a second catadioptric element configured to image the substantially collimated electromagnetic radiation from the central plane onto an image plane, and a detecting element substantially located at the image plane. The first catadioptric element includes at least one refractive surface and at least one reflective surface, and the second catadioptric element includes at least one refractive surface and at least one reflective surface.

An image forming optical system 1 includes, in order from an enlargement side, a first optical system 111 having a reflecting surface, and a second optical system 112 having a refracting surface. The image forming optical system 1 is configured to form an intermediate image 104 between the first optical system 111 and the second optical system 112. The first optical system 111 includes, in order from the enlargement side, a first reflecting group 113 having at least one reflecting surface having negative power, and a second reflecting group 114 having a plurality of reflecting surfaces 116 and 117 having positive power. The at least one reflecting surface having negative power includes a reflecting surface 115 closest to the enlargement side in the first reflecting group 113. An absolute value of power of the reflecting surface 115 is smallest in the first optical system 111.