An actuator device includes a support part, a first movable part, a second movable part, a first connecting part connecting the first movable part to the second movable part, a second connecting part connecting the second movable part to the support part, a spiral coil provided to the second movable part, a first external terminal provided to the support part, and a first wiring connected to an inner end portion of the coil and the first external terminal. The first wiring includes a lead wiring connected to the first external terminal, and a straddle wiring provided to the second movable part so as to straddle the coil and connected to the inner end of the coil and the lead wiring. The width of the straddle wiring is larger than the width of the coil, and the thickness of the straddle wiring is smaller than the thickness of the coil.

A micromirror comprising a mirror pivotally attached to a mount by a first pivoting structure that permits pivotal movement of the mirror relative to the mount about a first axis. A first comb drive with a first portion fixed relative to the mirror and a second portion fixed relative to the mount, and the first comb drive are adapted to actuate the mirror about the first axis. A first support structure pivotally attached to the mount by a second pivoting structure that permits pivotal movement of the mount relative to the first support structure about a second axis, and the second axis is non-parallel to the first axis. A second comb drive with a first portion fixed relative to the mount and a second portion fixed relative to the first support structure, and the second comb drive is adapted to actuate the mount about the second axis.

A microelectromechanical systems (MEMS) scanning device comprising a torsional beam flexure that has a variable width in relation to a rotational axis for a scanning mirror. The geometric properties of the torsional beam vary along the rotational axis to increase a desired mode of mechanical strain at a location where a strain sensor is operating within the MEMS scanning device to generate a feedback signal. The torsional beam flexure mechanically suspends the scanning mirror from a frame structure. During operation of the MEMS scanning device, actuators induce torsional deformation into the torsional beam flexure to cause rotation of the scanning mirror about the rotational axis. The degree or amount of this torsional deformation is directly related to the angular position of the scanning mirror and, therefore, the desired mode of mechanical strain may be this torsional deformation strain component.

A head-up display device and a transportation device are provided. The head-up display device includes a light source, a scanner configured to scan light emitted from the light source to form scanned light, an angle adjuster configured to change an exit angle of the scanned light, a display unit configured to form an image according to the scanned light from the angle adjuster, and a projection assembly configured to project the image formed on the display component to a selected area.

Systems, methods, and apparatuses for providing electromagnetic radiation sensing using sequential beam splitting. The apparatuses can include a micro-mirror chip having a plurality of light reflecting surfaces, an image sensor having an imaging surface, and a beamsplitter unit located between the micro-mirror chip and the image sensor. The beamsplitter unit includes a plurality of beamsplitters aligned along a horizontal axis that is parallel to the micro-mirror chip and the imaging surface. The beamsplitters implement the sequential beam splitting. Because of the structure of the beamsplitter unit, the height of the arrangement of the micro-mirror chip, the beamsplitter unit, and the image sensor is reduced such that the arrangement can fit within a mobile device. Within a mobile device, the apparatuses can be utilized for human detection, fire detection, gas detection, temperature measurements, environmental monitoring, energy saving, behavior analysis, surveillance, information gathering and for human-machine interfaces.

A drive device (10) includes a support (23), a first movable portion (21), a first magnet (41), a second magnet (42), a first coil (31), and a second coil (32). The first movable portion (21) is swingable in two axial directions with respect to the support (23). The first magnet (41) is positioned inside the first movable portion (21) when viewed from a first direction. The second magnet (42) is positioned outside the first movable portion (21) when viewed from the first direction. Magnetic flux from the first magnet (41) acts on the first coil (31). Magnetic flux from the second magnet (42) acts on the second coil (32).

A microelectromechanical system MEMS structure is described. A first actuator is attached to a substrate and configured to rotate the substrate along a first axis of rotation. An array of rotatable MEMS mirrors is mounted on the substrate, aligned parallel to the first axis of rotation. Each rotatable MEMS mirror is rotatable about a second axis of rotation with each second axis of rotation being perpendicular to the first axis of rotation and parallel to every other axis of rotation. An array of second actuators is configured to rotate each of the rotatable MEMS mirrors about its corresponding second axis of rotation. A controller is configured to control the first actuator to rotate the substrate about the first axis of rotation. The controller further controls the array of second actuators to rotate each rotatable MEMS mirror of the array of rotatable MEMS mirrors about its corresponding second axis of rotation.

A Lidar system, a mirror assembly for a Lidar system and method of operating the mirror assembly. The mirror assembly of the Lidar system includes a first frame and a first conductor. The first frame is rotatable about a first axis. The first conductor extends along the first frame to one side of the first axis. The first conductor extends through a first magnetic field on the one side of the first axis in a direction parallel to the first axis. A first current is passed through the first conductor to interact with the first magnetic field to induce a first rotation of the first frame about the first axis.

A light detection and ranging system includes synchronously scanning transmit and receive mirrors that scan a pulsed fanned laser beam in two dimensions. Imaging optics image a receive aperture onto an arrayed receiver that includes a plurality of light sensitive devices. Scanning mirror assemblies include stationary permanent magnets and MEMS devices with attached mirrors and conductive coils.

A mirror unit includes a mirror device includes a support portion and a movable mirror portion configured to be movable with respect to the support portion, and a package including a light incident opening and accommodating and holding the mirror device such that light incident from the light incident opening is able to be incident on the movable mirror portion. The package is provided with a ventilation port communicating an inside and an outside of the package.