G03F7/70416

Three-dimensional printing with build plates having surface topologies for increasing permeability and related methods

A build plate for a three-dimensional printer includes: a rigid, optically transparent, gas-impermeable planar base having an upper surface and a lower surface; and a flexible, optically transparent, gas-permeable sheet having an upper and lower surface, the sheet upper surface comprising a build surface for forming a three-dimensional object, the sheet lower surface positioned on the base upper surface. The build plate includes a gas flow enhancing feature configured to increase gas flow to the build surface.

Forming multiple aerial images in a single lithography exposure pass

A set of the pulses of light in a light beam is passed through a mask toward a wafer during a single exposure pass; at least a first aerial image and a second aerial image on the wafer based on pulses of light in the set of pulses that pass through the mask is generated during a single exposure pass, the first aerial image is at a first plane on the wafer and the second aerial image is at a second plane on the wafer, the first plane and the second plane being spatially distinct from each other and separated from each other by a separation distance along the direction of propagation; and a three-dimensional semiconductor component is formed.

Method for manufacturing an article made of a polymerized material

Disclosed is a method for manufacturing an article made of a polymerized material including the steps of: —providing a vat of polymerizable material, transparent at least in the 400-800 nanometers wavelengths range, —irradiating the polymerizable material with a laser beam according to a predetermined pattern so as to polymerize the polymerizable material in order to form the article, the predetermined pattern being determined based on a three-dimension representation of the article with the positions in three dimensions of a plurality of volume units adapted to form together the article, the laser beam scanning the vat in three dimensions in order to be focused at each position of the volume units present in the predetermined pattern so as to initiate locally the polymerization of the polymerizable material at each of these positions.

ADDITIVE FABRICATION SUPPORT STRUCTURES

Techniques for evaluating support for an object to be fabricated via an additive fabrication device are provided. In some embodiments, a three-dimensional representation of the object is obtained and a plurality of voxels corresponding to the representation of the object is generated. A first supportedness value may be assigned to a first voxel of the plurality of voxels based on an amount of support provided by a support structure to the first voxel, and a second supportedness value determined for a second voxel of the plurality of voxels, wherein the second voxel neighbors the first voxel, and wherein the second supportedness value is determined based on the first supportedness value of the first voxel and a weight value representing a transmission rate of supportedness through voxels of the plurality of voxels.

VOLUMETRIC MICROLITHOGRAPHY
20220363010 · 2022-11-17 · ·

Systems and methods for volumetric microlithography are described, wherein the method may include receiving a data representation of a 3D target structure and determining a plurality of planes in a volume of a photosensitive medium or in a build volume, each plane of the plurality of planes associated with a respective depth of a plurality of depths in the build volume, the plurality of depths being defined along an optical axis of an exposure system. Each plane may correspond to a possible position of a focal plane of the exposure system. Preferably, the depths in the plurality of depths are mutually different. The photosensitive medium may include an activation compound for initiating a chemical reaction in the photosensitive medium, the activation compound being activatable by light of a first wavelength. In an embodiment, the photosensitive medium may further include an inhibition compound for inhibiting the chemical reaction in the photosensitive medium, the inhibition compound being activatable by light of a second wavelength, different from the first 216 wavelength. The method may also comprise computing, based on a shape of the 3D target structure and, preferably, properties of the photosensitive medium, a sequence of exposure images, where each exposure image of the sequence of exposure images is associated with a plane of the plurality of planes in the build volume. Each exposure image may be associated with light of the first wave-length and/or light of the second wavelength. In an embodiment, the light may be intensity modulated light. The method may further comprise, for each focal plane of the plurality of planes, controlling the exposure system to position a focal plane of the exposure system at the depth in the build volume associated with the respective plane and to illuminate the build volume with the exposure image associated with the respective plane.

MICROSTRUCTURE AND METHOD FOR MANUFACTURING SAME

The present invention relates to a microstructure 20 having pores 22 on its surface or inside. The microstructure is a sheet containing an energy ray active resin 21. The pores 22 are formed in a vertical array and are in a formation pattern with a Talbot distance being specified by Formula 1 below:


Z.sub.T=(2nd.sup.2)/λ  [Formula 1] where Z.sub.T represents a Talbot distance (nm), n represents a refractive index, d represents a pitch distance (nm), and λ represents a light wavelength (nm). The pores have a periodic shape in the planar direction. Thus, the present invention provides three-dimensional microfabricated structures through which the periodicity is controlled.

METHOD FOR MANUFACTURING INDIUM-CONTAINING ORGANIC POLYMER FILM, PATTERNING METHOD, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

A method for manufacturing an indium-containing organic polymer film includes forming an organic polymer film on a base body, infiltrating the organic polymer film with an alkylindium having an alkyl group having 2 to 4 carbon atoms, and oxidizing the organic polymer film infiltrated with the alkylindium.

Stereolithography apparatus and light emission control method
11602889 · 2023-03-14 · ·

A stereolithography apparatus according to an embodiment of the present technology includes a light source unit, a photo-detector, and a control unit. The light source unit includes a plurality of light-emitting elements that emits light for curing a photo-curing resin. The photo-detector detects the light emitted from the light source unit. The control unit generates an amount-of-light profile indicating an amount-of-light distribution of the light on the basis of the light detected by the photo-detector and controls light emission of the plurality of light-emitting elements on the basis of the amount-of-light profile.

Systems and methods for alignment of anisotropic inclusions in additive manufacturing processes

Three-dimensional printing methods and systems use a derived geometry and aligns anisotropic inclusions in any orientation at any number of discrete volumetric sections. Structural, thermal, or geometry-based analyses are combined with inclusion alignment computations and print preparation methods and provided to 3D printers to produce composite material parts that meet demanding geometric needs as well as enhanced structural and thermal requirements. In one example, optimal inclusion alignment vectors associated with a section of the object are calculated based on specifications for the object, segmenting a three-dimensional model of the object into layer slices, grouping each section within each layer slice having similar alignment vectors and combining the groupings and generating printing instructions for the object according to the grouped alignment vectors.

Devices, systems, and methods for multi-projector three dimensional printing
11472119 · 2022-10-18 · ·

Devices, systems, and/or methodologies are provided for three dimensional printing, for example, additive manufacturing, wherein an array of energy patterning (e.g., light patterning) modules are used in conjunction with an automated positional control system to coordinate implementation of patterning modules of the array. Implementation of the array can be controlled by a sensory feed-back.