H01J11/38

High-power ultraviolet (UV) and vacuum ultraviolet (VUV) lamps with micro-cavity plasma arrays

A product having at least one plasma lamp that includes plates that are approximately parallel, with at least one array of microcavities formed in a surface of at least one plate. When desirable, the plates are separated a fixed distance by spacers with at least one spacer being placed near the plate's edge to form a hermetic seal therewith. A gas makes contact with the microcavity array. Electrodes capable of delivering a time-varying voltage are located such that the application of the time-varying voltage interacts with the gas to form a glow discharge plasma in the microcavities and the fixed volume between the plates. The glow discharge plasma efficiently and uniformly emits radiation that is predominantly in the UV/VUV spectral range with at least a portion of the radiation being emitted from the plasma lamp.

High-power ultraviolet (UV) and vacuum ultraviolet (VUV) lamps with micro-cavity plasma arrays

A product having at least one plasma lamp that includes plates that are approximately parallel, with at least one array of microcavities formed in a surface of at least one plate. When desirable, the plates are separated a fixed distance by spacers with at least one spacer being placed near the plate's edge to form a hermetic seal therewith. A gas makes contact with the microcavity array. Electrodes capable of delivering a time-varying voltage are located such that the application of the time-varying voltage interacts with the gas to form a glow discharge plasma in the microcavities and the fixed volume between the plates. The glow discharge plasma efficiently and uniformly emits radiation that is predominantly in the UV/VUV spectral range with at least a portion of the radiation being emitted from the plasma lamp.

HIGH-POWER ULTRAVIOLET (UV) AND VACUUM ULTRAVIOLET (VUV) LAMPS WITH MICRO-CAVITY PLASMA ARRAYS

A product having at least one plasma lamp that includes plates that are approximately parallel, with at least one array of microcavities formed in a surface of at least one plate. When desirable, the plates are separated a fixed distance by spacers with at least one spacer being placed near the plate's edge to form a hermetic seal therewith. A gas makes contact with the microcavity array. Electrodes capable of delivering a time-varying voltage are located such that the application of the time-varying voltage interacts with the gas to form a glow discharge plasma in the microcavities and the fixed volume between the plates. The glow discharge plasma efficiently and uniformly emits radiation that is predominantly in the UV/VUV spectral range with at least a portion of the radiation being emitted from the plasma lamp.

HIGH-POWER ULTRAVIOLET (UV) AND VACUUM ULTRAVIOLET (VUV) LAMPS WITH MICRO-CAVITY PLASMA ARRAYS

A product having at least one plasma lamp that includes plates that are approximately parallel, with at least one array of microcavities formed in a surface of at least one plate. When desirable, the plates are separated a fixed distance by spacers with at least one spacer being placed near the plate's edge to form a hermetic seal therewith. A gas makes contact with the microcavity array. Electrodes capable of delivering a time-varying voltage are located such that the application of the time-varying voltage interacts with the gas to form a glow discharge plasma in the microcavities and the fixed volume between the plates. The glow discharge plasma efficiently and uniformly emits radiation that is predominantly in the UV/VUV spectral range with at least a portion of the radiation being emitted from the plasma lamp.

High-power ultraviolet (UV) and vacuum ultraviolet (VUV) lamps with micro-cavity plasma arrays

A plasma lamp includes plates that are approximately parallel, with at least one array of microcavities formed in a surface of at least one plate. When desirable, the plates are separated a fixed distance by spacers with at least one spacer being placed near the plate's edge to form a hermetic seal therewith. A gas makes contact with the microcavity array. Electrodes capable of delivering a time-varying voltage are located on the surface of each plate. At least one electrode is located on an exterior surface of at least one interior plate. Optionally, protective windows may be placed over the electrodes. The application of the time-varying voltage interacts with the gas to form a glow discharge plasma in the microcavities and the fixed volume between the plates (when present). The glow discharge plasma efficiently and uniformly emits UV/VUV radiation over the entire surface of the lamp.

High-power ultraviolet (UV) and vacuum ultraviolet (VUV) lamps with micro-cavity plasma arrays

A plasma lamp includes plates that are approximately parallel, with at least one array of microcavities formed in a surface of at least one plate. When desirable, the plates are separated a fixed distance by spacers with at least one spacer being placed near the plate's edge to form a hermetic seal therewith. A gas makes contact with the microcavity array. Electrodes capable of delivering a time-varying voltage are located on the surface of each plate. At least one electrode is located on an exterior surface of at least one interior plate. Optionally, protective windows may be placed over the electrodes. The application of the time-varying voltage interacts with the gas to form a glow discharge plasma in the microcavities and the fixed volume between the plates (when present). The glow discharge plasma efficiently and uniformly emits UV/VUV radiation over the entire surface of the lamp.

HIGH-POWER ULTRAVIOLET (UV) AND VACUUM ULTRAVIOLET (VUV) LAMPS WITH MICRO-CAVITY PLASMA ARRAYS
20190214244 · 2019-07-11 ·

A plasma lamp includes plates that are approximately parallel, with at least one array of microcavities formed in a surface of at least one plate. When desirable, the plates are separated a fixed distance by spacers with at least one spacer being placed near the plate's edge to form a hermetic seal therewith. A gas makes contact with the microcavity array. Electrodes capable of delivering a time-varying voltage are located on the surface of each plate. At least one electrode is located on an exterior surface of at least one interior plate. Optionally, protective windows may be placed over the electrodes. The application of the time-varying voltage interacts with the gas to form a glow discharge plasma in the microcavities and the fixed volume between the plates (when present). The glow discharge plasma efficiently and uniformly emits UV/VUV radiation over the entire surface of the lamp.

Curing method, manufacture method of display panel, display panel and mask

A curing method, a manufacture method of a display panel, a display panel and a mask, the curing method includes: providing curable material, providing a mask; and providing an incident light on a side of the mask to cure the curable material, wherein a shielding layer of the mask aligns with the curable material; the shielding layer including light conversion material, and the light conversion material is configured to convert the incident light to an exiting light which is capable of curing the curable material.

Curing method, manufacture method of display panel, display panel and mask

A curing method, a manufacture method of a display panel, a display panel and a mask, the curing method includes: providing curable material, providing a mask; and providing an incident light on a side of the mask to cure the curable material, wherein a shielding layer of the mask aligns with the curable material; the shielding layer including light conversion material, and the light conversion material is configured to convert the incident light to an exiting light which is capable of curing the curable material.

CURING METHOD, MANUFACTURE METHOD OF DISPLAY PANEL, DISPLAY PANEL AND MASK
20180053619 · 2018-02-22 ·

A curing method, a manufacture method of a display panel, a display panel and a mask, the curing method includes: providing curable material, providing a mask; and providing an incident light on a side of the mask to cure the curable material, wherein a shielding layer of the mask aligns with the curable material; the shielding layer including light conversion material, and the light conversion material is configured to convert the incident light to an exiting light which is capable of curing the curable material.