An extreme-ultraviolet light source device comprises: a discharge chamber of which the inside is maintained in a vacuum; an electron beam-emitting unit which is located inside the discharge chamber and produces electron beams; and a metal radiator which is located inside the discharge chamber and is ionized by the electron beams. Extreme-ultraviolet radiation occurs in plasma generated from the metal radiator. The electron beam-emitting unit comprises: a cathode electrode; a plurality of emitters located on the cathode electrode and including a carbon-based material; and a gate electrode which is located on the plurality of emitters at a distance therefrom and to which a pulse voltage is applied.

An extreme-ultraviolet light source device comprises: a discharge chamber of which the inside is maintained in a vacuum; an electron beam-emitting unit which is located inside the discharge chamber and produces electron beams; and a metal radiator which is located inside the discharge chamber and is ionized by the electron beams. Extreme-ultraviolet radiation occurs in plasma generated from the metal radiator. The electron beam-emitting unit comprises: a cathode electrode; a plurality of emitters located on the cathode electrode and including a carbon-based material; and a gate electrode which is located on the plurality of emitters at a distance therefrom and to which a pulse voltage is applied.

The invention relates to a particle beam system (PBS) comprising a particle guiding tube, one or more transversely movable electrodes (of a defined type) providing a transverse electric and/or magnetic field (pulse or linear) wherein a particle flow can be influenced by the electrodes which can further have a defined shape. The PBS can be provided with a protective film and/or an insulation, it can form a mono and/or stereo particle path. The PBC can provide a cross-sectionally shaped beam, an adjustable optical axis, a rotating electric and/or magnetic field, a circularly polarized beam. The PBS can form an array, it can comprise one or more connections, one or more modules. The PBC can be coupled with electro- and/or mechanocomponents. The PBC can form lenses configured in a separate eye ray configuration. A method for providing a particle beam and a digitizer of photographic or X-ray images are proposed.

The invention relates to a particle beam system (PBS) comprising a particle guiding tube, one or more transversely movable electrodes (of a defined type) providing a transverse electric and/or magnetic field (pulse or linear) wherein a particle flow can be influenced by the electrodes which can further have a defined shape. The PBS can be provided with a protective film and/or an insulation, it can form a mono and/or stereo particle path. The PBC can provide a cross-sectionally shaped beam, an adjustable optical axis, a rotating electric and/or magnetic field, a circularly polarized beam. The PBS can form an array, it can comprise one or more connections, one or more modules. The PBC can be coupled with electro- and/or mechanocomponents. The PBC can form lenses configured in a separate eye ray configuration. A method for providing a particle beam and a digitizer of photographic or X-ray images are proposed.

The present disclosure relates to devices and methods for enhancing the collection of charge carriers, such as electrons. Methods of manufacturing the devices are also disclosed. An electronic device can include a cathode, an anode, a gate electrode, and a focus electrode. The cathode can include a cathode substrate and an emitting region that is configured to emit an electron flow. The anode can include an anode substrate and a collection region that is configured to receive and/or absorb the electron flow. The gate electrode can be receptive to a first power source to produce a voltage in the gate electrode that is positively-biased with respect to the cathode. The focus electrode can be receptive to a second power source to produce a voltage in the focus electrode that is negatively-biased with respect to the gate electrode and/or the cathode.

The present disclosure relates to devices and methods for enhancing the collection of charge carriers, such as electrons. Methods of manufacturing the devices are also disclosed. An electronic device can include a cathode, an anode, a gate electrode, and a focus electrode. The cathode can include a cathode substrate and an emitting region that is configured to emit an electron flow. The anode can include an anode substrate and a collection region that is configured to receive and/or absorb the electron flow. The gate electrode can be receptive to a first power source to produce a voltage in the gate electrode that is positively-biased with respect to the cathode. The focus electrode can be receptive to a second power source to produce a voltage in the focus electrode that is negatively-biased with respect to the gate electrode and/or the cathode.

The present invention generally relates to systems and methods for generating controllable beam of electrons using a hollow-cathode triode electron gun that substantially mitigate impact of back-streaming electrons. In one embodiment, a triode hollow-cathode electron gun is configured to provide electrons and substantially mitigates the impact of back-streaming electrons. The triode hollow-cathode electron gun includes a hollow cathode, a heating filament, an anode, a control grid, a shadow grid and a sleeve mechanically coupled to the hollow-cathode. The sleeve is substantially centered on the axis of the triode hollow-cathode electron gun and configured to maintain shape and trajectory of emitted beams of electrons.

The present invention generally relates to systems and methods for generating controllable beam of electrons using a hollow-cathode triode electron gun that substantially mitigate impact of back-streaming electrons. In one embodiment, a triode hollow-cathode electron gun is configured to provide electrons and substantially mitigates the impact of back-streaming electrons. The triode hollow-cathode electron gun includes a hollow cathode, a heating filament, an anode, a control grid, a shadow grid and a sleeve mechanically coupled to the hollow-cathode. The sleeve is substantially centered on the axis of the triode hollow-cathode electron gun and configured to maintain shape and trajectory of emitted beams of electrons.

The present disclosure relates to devices and methods for enhancing the collection of charge carriers, such as electrons. Methods of manufacturing the devices are also disclosed. An electronic device can include a cathode, an anode, a gate electrode, and a focus electrode. The cathode can include a cathode substrate and an emitting region that is configured to emit an electron flow. The anode can include an anode substrate and a collection region that is configured to receive and/or absorb the electron flow. The gate electrode can be receptive to a first power source to produce a voltage in the gate electrode that is positively-biased with respect to the cathode. The focus electrode can be receptive to a second power source to produce a voltage in the focus electrode that is negatively-biased with respect to the gate electrode and/or the cathode.

The present disclosure relates to devices and methods for enhancing the collection of charge carriers, such as electrons. Methods of manufacturing the devices are also disclosed. An electronic device can include a cathode, an anode, a gate electrode, and a focus electrode. The cathode can include a cathode substrate and an emitting region that is configured to emit an electron flow. The anode can include an anode substrate and a collection region that is configured to receive and/or absorb the electron flow. The gate electrode can be receptive to a first power source to produce a voltage in the gate electrode that is positively-biased with respect to the cathode. The focus electrode can be receptive to a second power source to produce a voltage in the focus electrode that is negatively-biased with respect to the gate electrode and/or the cathode.