Patent classifications
H01J61/0735
HIGH-TEMPERATURE COMPONENT
A high-temperature component made of a refractory metal or a refractory metal alloy, includes a coating for increasing thermal emissivity. The coating is formed substantially of tungsten and rhenium, i.e. of at least 55 wt. % rhenium and at least 10 wt. % tungsten, and has a Re3W phase of at least 35 wt. %. A process for producing a high-temperature component having a coating for increasing thermal emissivity, is also provided.
High-temperature component and method for producing a high-temperature component
A high-temperature component of a refractory metal or a refractory metal alloy has an emissivity-increasing coating. The coating is formed of tantalum nitride and/or zirconium nitride; and tungsten with a tungsten content between 0 and 98 wt. %.
Short-arc discharge lamp
A short-arc discharge lamp includes a pair of electrodes disposed facing each other inside a light-emitting tube, a scale-like structure being formed on an outer surface of at least one electrode of the pair of electrodes, and a coating film covering the outer surface on which the scale-like structure is formed. The scale-like structure includes a plurality of flaky protrusions protruding from the outer surface in a direction inclined with respect to a normal direction of the outer surface, each flaky protrusion having a front surface whose angle formed with the outer surface is an obtuse angle and a back surface whose angle formed with the outer surface is an acute angle. The coating film contains at least one of metal oxides, metal carbides, metal borides, metal silicides, and metal nitrides. A part of the coating film enters a space sandwiched between the back surface and the outer surface.
ELECTRODE FOR A DISCHARGE CHAMBER
A discharge chamber for a deep ultraviolet (DUV) light source includes a housing; and a first electrode and a second electrode in the housing, the first electrode and the second electrode being separated from each other to form a discharge region between the first electrode and the second electrode, the discharge region being configured to receive a gain medium including at least one noble gas and a halogen gas. At least one of the first electrode and the second electrode includes a metal alloy including more than 33% and less than 50% zinc by weight.
Cathode material
A cathode material for use in a high-pressure discharge lamp contains a matrix based on tungsten having a tungsten content of greater than or equal to 95% by weight, tungsten carbide, and oxides and/or predominantly oxidic phases of one or more emitter elements from the group of rare earth metals, Hf, and Zr. The cathode material additionally contains predominantly carbidic phases of the one or more emitter elements from the group of rare earth metals, Hf, and Zr. A high-pressure discharge lamp would contain such a cathode composed of the above cathode material.
Short-arc discharge lamp
The short-arc discharge lamp includes a pair of electrodes arranged facing each other inside a light-emitting tube, the pair of electrodes made of a material containing tungsten; a coating formed on the first outer surface of at least one of the pair of electrodes, the coating made of a material containing ceramics; and tungsten particles adhered to a part of the second outer surface of the coating.
Electrode for a discharge lamp, discharge lamp and method for producing an electrode
The invention relates to an electrode for a discharge lamp, wherein the electrode has a base body having an electrode plateau providing an end face of the electrode, wherein the base body is delimited by the electrode plateau in a longitudinal extension direction of the electrode. Furthermore, the electrode has a coating, arranged in at least a first region of the base body that is different from the electrode plateau, to increase an emission of heat. In addition, the electrode has an at least partially contiguous free region of the base body extending at least partly in the longitudinal extension direction as far as the electrode plateau, in which the coating for increasing the emission of heat is not arranged, and wherein the first region adjoins at least one section of the free region in the circumferential direction of the electrode.
Electrode for a discharge chamber
A discharge chamber for a deep ultraviolet (DUV) light source includes a housing; and a first electrode and a second electrode in the housing, the first electrode and the second electrode being separated from each other to form a discharge region between the first electrode and the second electrode, the discharge region being configured to receive a gain medium including at least one noble gas and a halogen gas. At least one of the first electrode and the second electrode includes a metal alloy including more than 33% and less than 50% zinc by weight.
SHORT-ARC DISCHARGE LAMP
A short-arc discharge lamp includes a pair of electrodes disposed facing each other inside a light-emitting tube, a scale-like structure being formed on an outer surface of at least one electrode of the pair of electrodes, and a coating film covering the outer surface on which the scale-like structure is formed. The scale-like structure includes a plurality of flaky protrusions protruding from the outer surface in a direction inclined with respect to a normal direction of the outer surface, each flaky protrusion having a front surface whose angle formed with the outer surface is an obtuse angle and a back surface whose angle formed with the outer surface is an acute angle. The coating film contains at least one of metal oxides, metal carbides, metal borides, metal silicides, and metal nitrides. A part of the coating film enters a space sandwiched between the back surface and the outer surface.
CATHODE MATERIAL
A cathode material for use in a high-pressure discharge lamp contains a matrix based on tungsten having a tungsten content of greater than or equal to 95% by weight, tungsten carbide, and oxides and/or predominantly oxidic phases of one or more emitter elements from the group of rare earth metals, Hf, and Zr. The cathode material additionally contains predominantly carbidic phases of the one or more emitter elements from the group of rare earth metals, Hf, and Zr. A high-pressure discharge lamp would contain such a cathode composed of the above cathode material.