A semiconductor reaction chamber includes a chamber body, a dielectric window, a gas inlet member, a carrier, an upper radio frequency assembly, and a plurality of ultraviolet light generation devices. The dielectric window is arranged at a top of the chamber body. The gas inlet member is arranged at a center position of the dielectric window and configured to introduce a process gas into the chamber body. The carrier is arranged inside the chamber body and configured to carry a to-be-processed wafer. The upper radio frequency assembly is arranged above the chamber body and configured to ionize the process gas introduced into the chamber body to generate a plasma and first ultraviolet light. The plurality of ultraviolet light generation devices is arranged between the dielectric window and the carrier and around the gas inlet member and configured to generate second ultraviolet light radiating toward the carrier.

A transmission line for conveying a radio frequency (RF) signal between a first terminal and a second terminal. The transmission line comprises an inner conductor, a middle conductor and an outer conductor. The inner conductor comprises a length of conductive material having a first end for electrical connection with the first terminal and a second end for electrical connection with the second terminal. The middle conductor surrounds at least a part of the length of the inner conductor and is electrically connected to the electrical ground of the source. The outer conductor surrounds at least a part of the length of the middle conductor and is electrically connected to the electrical ground of the load.

An electrodeless discharge lamp with one or more stationary light emitting bulbs inside a common conductive shield to confine an electromagnetic excitation field provided by a plurality of sources. Each bulb can be excited by several electromagnetic radiation sources or by an individual electromagnetic radiation source. Tubular realization of the lamp, with two magnetron or transistor electromagnetic sources facing each other at the extremity of a tubular bulb, are particularly suitable for installation at the focal line of parabolic trough reflector. Some variants combine bulbs of different compositions, and excitation levels can be independently set to control the spectrum of emitted light.

A plasma light with at least one non-rotating light bulb is disclosed. The light includes a conducting cavity structure with a radiation source input port and a light bulb. The geometry of the cavity is designed to generate electrical fields with time-dependent geometrical designed orientation within parts of the light bulb, while the direction of the radiation fields from the radiation source port caused by a microwave generator to the input port fields is stationary.

A lucent waveguide plasma light source has a quartz waveguide body with a central through bore. The bore has orifices at its opposite ends, opening centrally of flat, end faces of the body. Between these the body has a circular cylindrical periphery. A drawn quartz tube is inserted into the body. The tube has its one end closed and a collar which locates the tube in the bore and is fused to the faces at the orifices of the bore. The tube is evacuated and charged with excitable material and closed as a sealed void. A Faraday cage and an antenna in a bore in the body are provided for feeding microwave energy to the light source. When powered with microwaves, resonance is established in the wave guide and a plasma is established in the void, wherein Light radiates and leaves the waveguide and Faraday cage radially of the periphery.

The present disclosure describes a plasma illumination device with microwave pumping, comprising:

a hermetically sealed casing, a magnetron, a microwave resonator containing a rotatable electrodeless plasma lamp,

a coaxial coupling line running parallel to the casing axis, for transmitting microwave power from the magnetron to the microwave resonator, at least one heat sink located on the inner walls of the casing and providing heat transfer through the casing to the external environment, and a light-transmitting hermetically sealed hollow cylinder fitted in a hermetically sealed way on the casing above the microwave resonator. This results in an illumination device with microwave pumping, which may be used to illuminate objects located in unfavorable environmental conditions, particularly those in which there is a high content of dust or other contaminants, or in an aqueous environment at great depths.

The invention relates to a lamp (1) comprising a light source (2) that can be excited by microwaves to provide illumination and a housing (4) surrounding the light source, said housing having at least one light exit opening (5). The light exit opening (5) has associated therewith a grille structure (6) or a labyrinth structure (7) acting as a microwave shield.

An apparatus for artificial weathering or lightfastness testing of samples or for simulating solar radiation, the apparatus comprises a weathering chamber, an electrodeless lamp provided in the weathering chamber and comprising a bulb filled with a composition that emits light when in a plasma state, and a radio frequency source being arranged so that it radiate a radio frequency field into the bulb to generate a luminous plasma for emitting a radiation comprising spectral emission characteristics similar to natural solar radiation.

There is provided a photoreactor for the remediation of gaseous emissions and/or contaminated water using ultraviolet (UV) or vacuum ultraviolet (VUV). There is also provided an emission source for generating UV and/or VUV, the source comprising: a microwave generator; a chamber arranged to receive microwaves generated by the microwave generator, the chamber comprising: a gas comprising species for forming excimers; a resonator arranged to receive the microwaves in the chamber and generate a plasma; a first electrode spaced apart from the resonator; and a voltage source configured to generate an electric field between the resonator and the first electrode, wherein, on application of the electric field, the electric field drives electrons and/or ions from the plasma to generate excimers and produce vacuum ultraviolet or ultraviolet emission. There are also provided methods of generating UV and/or VUV, and methods of remediating fluids.

A low-dose, preferably unsaturated, fill of microwave excitable material (9), including at least two metal halides in a noble gas with an optional mercury buffer, is contained in a plasma crucible (2) to form a light emitting plasma therein.