H
ELECTRICITY
H
ELECTRICITY
H01
ELECTRIC ELEMENTS
H01
ELECTRIC ELEMENTS
H01L
SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
H01L
SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
H01L21/02
Manufacture or treatment of semiconductor devices or of parts thereof
H01L21/02
Manufacture or treatment of semiconductor devices or of parts thereof
H01L21/02104
Forming layers
H01L21/02104
Forming layers
H01L21/02107
Forming insulating materials on a substrate
H01L21/02107
Forming insulating materials on a substrate
H01L21/02109
characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
H01L21/02109
characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
H01L21/02112
characterised by the material of the layer
H01L21/02112
characterised by the material of the layer
H01L21/02123
the material containing silicon
H01L21/02123
the material containing silicon
H01L21/02164
the material being a silicon oxide, e.g. SiO2
H01L21/02164
the material being a silicon oxide, e.g. SiO2