H
ELECTRICITY
H
ELECTRICITY
H01
ELECTRIC ELEMENTS
H01
ELECTRIC ELEMENTS
H01L
SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
H01L
SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
H01L21/02
Manufacture or treatment of semiconductor devices or of parts thereof
H01L21/02
Manufacture or treatment of semiconductor devices or of parts thereof
H01L21/02104
Forming layers
H01L21/02104
Forming layers
H01L21/02107
Forming insulating materials on a substrate
H01L21/02107
Forming insulating materials on a substrate
H01L21/02225
characterised by the process for the formation of the insulating layer
H01L21/02225
characterised by the process for the formation of the insulating layer
H01L21/0226
formation by a deposition process
H01L21/0226
formation by a deposition process
H01L21/02263
deposition from the gas or vapour phase
H01L21/02263
deposition from the gas or vapour phase
H01L21/02271
deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
H01L21/02271
deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
H01L21/0228
deposition by cyclic CVD, e.g. ALD, ALE, pulsed CVD
H01L21/0228
deposition by cyclic CVD, e.g. ALD, ALE, pulsed CVD